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Microelectronics Technology Alert

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Microelectronics Technology Alert reports on the latest advances in the broad range of technology related to microelectronic devices. Topics regularly presented range from the manufacture of CPUs and RAM chips to data storage to the emerging field of optoelectronic computing and communication. Special emphasis is given to semiconductor materials, displays, photonics, and novel approaches to chip design. Beyond reporting on the latest technology, Microelectronics Technology Alert keeps you abreast of the latest R&D developments at major corporate and academic research centers assisting you in monitoring your competitors and creating strategic alliances.

Sample Briefing

TEST CHIPS FAST AND CHEAP

A new way to use a laser pulse, developed at MIT, gives you a quicker, easier and cheaper way to test computer chips. The research team thinks it will save the microelectronics industry millions of dollars. And, looking further in the future, the laser pulse technology could lead to a way to optically switch materials from one phase to another. Or it could provide an early warning signal for eye disease.

The chemists at MIT's Materials Processing Center have been studying how materials respond when irradiated by pulsed laser light. They are learning how light, particularly short pulses, interacts with matter and how to exploit these interactions. Applications will range from basic knowledge about complex materials to devices.

The chip test uses the laser pulse to analyze the thin films used in microelectronics components. It shows up variations in the thickness of the metal layers, a major cause of device failure and low microelectronics manufacturing yield. Copper, tungsten, and other metal layers on the silicon base have precisely specified thicknesses ranging from 100 angstroms to 10,000 angstroms. Tests to insure that each film layer is the right thickness and is properly stuck to the layer below are costly and destroy the sample.

The MIT noncontact optical test is nondestructive, uses a briefcase-sized laser device, and can measure film thickness to within 1-3 angstroms, a single layer of atoms. At the same time, adhesion is checked.

Short pulses from the minilaser generate ultrasonic waves in the thin film. Light from a second laser monitors the acoustic waves and determines their velocity, which depends on the thickness and adhesion of the film. Difficult adjustments are not required and the machine is easy to use. Comparing the signal from a sample on the production line to that from a perfect component shows if the production sample is flawed. Other thin films could also be tested: optical elements, liquid crystal displays, and ultrahard coatings. Polymer films, including biopolymers such as the cornea of the eye, can also be examined. The sample simply must be smooth and reflective enough to bounce back light without too much scatter.

Experiments have begun on using the ultrashort laser pulses to optically control the structure of crystalline solids by moving atoms from their initial positions along selected microscopic pathways towards a new position. Getting this under enough control to be useful is still far off, but the goal is to optically switch a material from one structure to another without any absorption of the light. An ice crystal, for example, can assume nine different forms and other crystals may be altered by rearranging their structures from one phase to another. This way you could optically control a material by changing the configuration of its molecular infrastructure. You might even create new states of existing materials by forcing their atoms into configurations they wouldn't normally assume.

So far, the MIT group has shaped a pulse of light less than one femtosecond long into a timed sequence of pulses that can launch vibrational waves in a crystal that come with larger and larger amplitudes. The pulses of light push at the crystal lattice framework, causing ever-larger excursions from the original position. Get a big enough motion going and the material could enter a new crystalline phase.

The group has also shaped a single light pulse into many pulse sequences that can reach different regions of a sample. This gives another way to manipulate and amplify the vibrational wave as it travels through the crystal.

Looking at the more down-to-earth chip testing application, MIT's Lincoln Laboratory has developed the pulsing device into a very small mini laser. This has been developed commercially by a start-up formed by the original researchers, chemistry professor Keith Nelson and two grad students. The company has been acquired by Philips Analytical N.V.

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