Report: Ultrapure Materials for the Semiconductor Industry TOC

INTRODUCTION

STUDY GOALS AND OBJECTIVES
REASONS FOR DOING THE STUDY
HISTORY OF THE MARKET
SCOPE AND FORMAT
METHODOLOGY AND INFORMATION SOURCES
CONTRIBUTION OF THE STUDY AND FOR WHOM
RELATED BCC WORK CREDENTIALS
BCC ON-LINE SERVICES
DISCLAIMER

SUMMARY

Summary Table:
U.S. VALUE OF ULTRAPURE CHEMICALS, WATER, AND GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Summary Figure:
U.S. VALUE OF ULTRAPURE CHEMICALS, WATER, AND GASES USED IN SEMICONDUCTORS, 1992-2007 ($ MILLIONS)
- CHEMICALS
- WATER SYSTEMS
- BULK, SPECIALTY GASES

ULTRAPURE SEMICONDUCTOR MATERIAL OVERVIEW

ULTRAPURE SEMICONDUCTOR MATERIAL OVERVIEW

Table 1. ULTRAPURE CHEMICALS, WATER AND GASES USED IN SEMICONDUCTOR MANUFACTURING
- SEMICONDUCTOR MANUFACTURE
  - MATERIAL PREPARATION
  - CRYSTAL GROWTH
  - WAFER FABRICATION
  - PACKAGING
- SEMICONDUCTOR CONTAMINATION
  - EFFECTS OF CONTAMINANTS

Device Processing Yield
Device Performance
Device Reliability

CONTAMINATION TYPES

Particles
Metallic Ions
Inorganic Chemicals
Dissolved Organics and Bacteria

MAJOR SOURCES OF SEMICONDUCTOR CONTAMINATION

Feedstocks
Fixtures
Process
Effluents
Information
Maintenance
Personnel
Environment

PURITY STANDARDS
- CHEMICAL QUALITY
- WATER QUALITY
- GAS QUALITY
- RECYCLING/REUSE

Recycling/Reuse (Continued)

INDUSTRY STRUCTURE AND ITS COMPETITIVE ASPECTS

INDUSTRY STRUCTURE AND ITS COMPETITIVE ASPECTS

Figure 1. REGIONAL MARKET SHARE OF TOTAL WORLD SEMICONDUCTOR SALES, 2002
Table 2. REGIONAL MARKET VALUE OF TOTAL WORLD SEMICONDUCTOR SALES, 2002
- SEMICONDUCTOR SALES AND THE DRIVE FOR CRITICAL CHEMICALS, GASES, AND WATER
Table 3. U.S. SHIPMENTS OF CHEMICALS, WATER, AND GASES USED IN COMPUTER MANUFACTURING COMPARED WITH SEMICONDUCTOR SHIPMENTS, THROUGH 2007 ($ MILLIONS)
- INDUSTRY ENVIRONMENT
- IMPORTANT STRATEGIES
- DRIVING FORCES
- MARKET SHARE
  - ULTRAPURE CHEMICALS MARKET LEADERS

Leading U.S. Photomask Suppliers

Figure 2. U.S. MARKET SHARE FOR THE MAJOR ULTRAPURE PHOTOMASKS SUPPLIERS, 2002 (%)
Table 4. U.S. MARKET VALUE FOR THE MAJOR ULTRAPURE PHOTOMASK SUPPLIERS, 2002 ($ MILLIONS)

Photronics
DuPont Photomasks
Captive Suppliers

Leading U.S. Photoresist Suppliers

Figure 3. U.S. MARKET SHARE OF THE MAJOR ULTRAPURE PHOTORESIST SUPPLIERS, 2002 (%)
Table 5. U.S. MARKET VALUE OF THE MAJOR ULTRAPURE PHOTORESIST SUPPLIERS, 2002 ($ MILLIONS)

Shipley Co.
Arch Microelectronic Materials
Tokyo Ohka
AZ Electronic Materials

Leading U.S. Wet Chemical Suppliers

Figure 4. U.S. MARKET SHARE OF THE MAJOR ULTRAPURE WET CHEMICAL SUPPLIERS, 2002 (%)
Table 6. U.S. MARKET VALUE FOR THE MAJOR ULTRAPURE WET CHEMICAL SUPPLIERS, 2002 ($ MILLIONS)

Ashland Chemical
FMC Corp.
Solvay Interox
Japanese Companies
General Chemical Co.
Mallinckrodt Baker Microelectric Materials
DuPont Electronic Materials

ULTRAPURE WATER MARKET LEADERS

Figure 5. U.S. MARKET SHARE OF MAJOR ULTRAPURE WATER SUPPLIERS, 2002 (%)
Table 7. U.S. MARKET VALUE OF MAJOR ULTRAPURE WATER SUPPLIERS, 2002 ($ MILLIONS)

Semiconductor Manufacturers
- Ionics Ultrapure Water
- Glegg Water Conditioning, Inc.
- Vivendi-U.S. Filter Corp.

ULTRAPURE GAS MARKET LEADERS

Ultrapure Gas Market Share

Figure 6. U.S. MARKET SHARE OF THE MAJOR ULTRAPURE GAS SUPPLIERS, 2002 (%)
Table 8. U.S. MARKET VALUE OF THE MAJOR ULTRAPURE GAS SUPPLIERS, 2002 ($ MILLIONS)

Ultrapure Gas Suppliers
- Air Products and Chemicals
- Praxair
- The BOC Group
- L'Air Liquide
- Nippon Sanyo KK

ULTRAPURE SEMICONDUCTOR MATERIALS

Figure 7. U.S. MARKET SHARE OF THE THREE TYPES OF ULTRAPURE MATERIALS USED IN SEMICONDUCTORS, 2002 (%)
Figure 7. (CONTINUED)
Table 9. GROWTH OF THE U.S. MARKET FOR THE THREE TYPES OF ULTRAPURE MATERIALS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
- ULTRAPURE SEMICONDUCTOR CHEMICALS
- U.S. ULTRAPURE SEMICONDUCTOR CHEMICALS MARKET SIZE
Figure 8. U.S. MARKET SHARE OF ULTRAPURE CHEMICALS USED IN SEMICONDUCTORS, 2002 (%)
Table 10. GROWTH OF THE U.S. MARKET FOR ULTRAPURE CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

PHOTOMASKS

U.S. Photomask Market Size

Table 11. GROWTH OF THE U.S. MARKET FOR PHOTOMASKS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Photomask Types
- Chrome-on-Quartz Photomasks
- Aluminate Complexes for Photomasks
Lithographic Techniques
- Electron/Ion-beam Lithography
- Laser Beam Lithography
Steppers
- Narrow-beam Scanning

PHOTORESISTS

U.S. Photoresist Market Size

Table 12. GROWTH OF THE U.S. MARKET FOR PHOTORESISTS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Photoresist Classes
- Positive Photoresists
- Negative Photoresists
Deep-ultraviolet Lithography
- Deep-ultraviolet Lithography (Continued)
Direct Deposition and Lithography

WET CHEMICALS

Table 13. IMPORTANT LIQUID CHEMICALS USED IN WET ETCHING
Table 14. IMPORTANT LIQUID CHEMICALS USED IN WET STRIPPING

U.S. Ultrapure Wet Chemicals Market Size

Figure 9. U.S. MARKET SHARE OF THE THREE CLASSES OF ULTRAPURE WET CHEMICALS USED IN SEMICONDUCTORS, 2002 (%)
Table 15. GROWTH OF THE U.S. MARKET FOR THE THREE CLASSES OF ULTRAPURE WET CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Acids

Figure 10. U.S. MARKET SHARE OF THE SIX ACIDSUSED IN SEMICONDUCTORS, 2002 (%)
Table 16. GROWTH OF THE U.S. MARKET FOR THE SIX ACIDS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Sulfuric Acid
Hydrofluoric Acid
Hydrochloric Acid
Phosphoric Acid
Nitric Acid
Acetic Acid

Solvents

Figure 11. U.S. MARKET SHARE FOR THE FIVE ULTRAPURE SOLVENTS USED IN SEMICONDUCTORS, 2002 (%)
Table 17. GROWTH OF THE U.S. MARKET FOR THE FIVE ULTRAPURE SOLVENTS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Isopropyl Alcohol
Acetone
Methanol
Xylene

Other Wet Chemicals

Table 18. GROWTH OF THE U.S. MARKET FOR OTHER WET CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007

Hydrogen Peroxide
Ammonium Hydroxide
Aluminum Triisobutyl
Phosphorus Oxychloride
Titanium Tetrachloride
Silicon Tetrachloride
1,1,1-Trichloroethane
Trimethyl Borate
Trimethyl Phosphate

ULTRAPURE SEMICONDUCTOR WATER

WATER SOURCES
- WATER-QUALITY PARAMETERS

Conductivity
Total Organic Carbon
Bacterial Content

MARKET SIZE OF U.S. ULTRAPURE WATER FOR SEMICONDUCTORS

Figure 12. U.S. MARKET SHARE OF THE THREE ULTRAPURE WATER TREATMENT SYSTEMS USED IN SEMICONDUCTORS, 2002 (%)
Table 19. GROWTH OF THE U.S. MARKET FOR THE THREE ULTRAPURE WATER TREATMENT SYSTEMS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

REVERSE OSMOSIS SYSTEMS

RO Osmosis Membrane Types
- Asymmetric Membranes
- Thin-film Composite Membranes
RO Configuration Types

DEIONIZATION

Ion-exchange Systems
- Ion-exchange Resin Classes

Cation-exchange Resins
Anion-exchange Resins

Ion-exchange Resin Configurations
Separate-bed Deionization Systems
Mixed-bed Deionization Systems

Nonseparating Mixed Beds

Continuous Deionization Systems

Electrodialysis/Electrodialysis-Reversal Systems

FILTRATION SYSTEMS

Ultrafiltration
- Ultrafiltration Membranes
- Ultrafiltration Costs

ULTRAPURE SEMICONDUCTOR GASES

ULTRAPURE SEMICONDUCTOR GASES
U.S. ULTRAPURE SEMICONDUCTOR GAS MARKET SIZE

Table 20. GROWTH OF THE U.S. MARKET FOR ULTRAPURE GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

BULK GASES

Figure 13. U.S. MARKET SHARE OF THE FOUR BULK GASES USED IN SEMICONDUCTORS, 2002 (%)
Table 21. GROWTH OF THE U.S. MARKET FOR THE FOUR BULK GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Nitrogen
Nitrogen (Continued)
Nitrogen (Continued)
Hydrogen
Argon
Oxygen

SPECIALTY GASES

Figure 14. U.S. MARKET SHARE OF THE FIVE FUNCTIONS OF SPECIALTY GASES USED IN SEMICONDUCTORS, 2002 (%)
Table 22. GROWTH OF THE MARKET FOR THE FIVE FUNCTIONS OF SPECIALTY GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)

Etchant Gases
- Halocarbons

Halocarbon 23
Halocarbon 114
Halocarbon 116

Hydrogen Bromide
Nitrogen Trifluoride

Silicon Source Gases
- Silane
- Dichlorosilane
- Silicon Tetrachloride
- Trichlorosilane
Reactant Gases
- Ammonia
- Boron Trichloride
- Carbon Dioxide
- Chlorine
- Nitrous Oxide
- Tungsten Hexafluoride
Dopant Gases
- Arsine
- Diborane
- Phosphine
Other Specialty Gases
- Helium
- Neon
- Krypton
- Xenon

APPENDIX A: INDUSTRY SPECIFICATIONS FOR MAJOR CHEMICALS, GASES AND WATER USED IN SEMICONDUCTOR MANUFACTURE

Table 23. SULFURIC ACID SPECIFICATIONS
Table 23. (CONTINUED)
Table 24. HYDROFLUORIC ACID SPECIFICATIONS
Table 24. (CONTINUED)
Table 25. HYDROCHLORIC ACID SPECIFICATIONS
Table 25. (CONTINUED)
Table 26. PHOSPHORIC ACID SPECIFICATIONS
Table 26. (CONTINUED)
Table 27. NITRIC ACID SPECIFICATIONS
Table 27. (CONTINUED)
Table 28. ACETIC ACID SPECIFICATIONS
Table 28. (CONTINUED)
Table 29. ISOPROPYL ALCOHOL SPECIFICATIONS
Table 29. (CONTINUED)
Table 30. ACETONE SPECIFICATIONS
Table 31. METHANOL SPECIFICATIONS
Table 32. XYLENE SPECIFICATIONS
Table 33. N-BUTYL ACETATE SPECIFICATIONS
Table 34. TECHNICAL INFORMATION FOR HYDROGEN PEROXIDE (PURE)
Table 35. HYDROGEN PEROXIDE 30% SOLUTION SPECIFICATIONS
Table 35. (CONTINUED)
Table 36. AMMONIUM HYDROXIDE 29% SOLUTION SPECIFICATIONS
Table 36. (CONTINUED)
Table 37. TECHNICAL INFORMATION FOR ALUMINUM TRIISOBUTYL
Table 38. TECHNICAL INFORMATION FOR PHOSPHORUS OXYCHLORIDE
Table 39. PHOSPHORUS OXYCHLORIDE SPECIFICATIONS
Table 40. TECHNICAL INFORMATION FOR TITANIUM TETRACHLORIDE
Table 41. TECHNICAL INFORMATION FOR SILICON TETRACHLORIDE
Table 42. TECHNICAL INFORMATION FOR 1,1,1-TRICHLOROETHANE
Table 43. TECHNICAL INFORMATION FOR TRIMETHYL BORATE
Table 44. TECHNICAL INFORMATION FOR TRIMETHYL PHOSPHATE
Table 45. TECHNICAL INFORMATION FOR NITROGEN
Table 46. NITROGEN SPECIFICATIONS
Table 47. TECHNICAL INFORMATION FOR HYDROGEN
Table 48. HYDROGEN SPECIFICATIONS
Table 49. TECHNICAL INFORMATION FOR ARGON
Table 50. ARGON SPECIFICATIONS
Table 51. TECHNICAL INFORMATION FOR OXYGEN
Table 52. OXYGEN SPECIFICATIONS
Table 53. TECHNICAL INFORMATION FOR NITROGEN
Table 54. NITROGEN SPECIFICATIONS
Table 55. TECHNICAL INFORMATION FOR HYDROGEN
Table 56. HYDROGEN SPECIFICATIONS
Table 57. TECHNICAL INFORMATION FOR ARGON
Table 58. ARGON SPECIFICATIONS
Table 59. TECHNICAL INFORMATION FOR OXYGEN
Table 60. OXYGEN SPECIFICATIONS
Table 61. TECHNICAL INFORMATION FOR HALOCARBON 23
Table 62. HALOCARBON 23 SPECIFICATIONS
Table 63. TECHNICAL INFORMATION FOR HALOCARBON 114
Table 64. HALOCARBON 114 SPECIFICATIONS
Table 65. TECHNICAL INFORMATION FOR HALOCARBON 116
Table 66. HALOCARBON 116 SPECIFICATIONS
Table 67. TECHNICAL INFORMATION FOR HYDROGEN BROMIDE
Table 68. HYDROGEN BROMIDE SPECIFICATIONS
Table 69. TECHNICAL INFORMATION FOR NITROGEN TRIFLUORIDE
Table 70. NITROGEN TRIFLUORIDE SPECIFICATIONS
Table 71. TECHNICAL INFORMATION FOR SILANE
Table 72. SILANE SPECIFICATIONS
Table 73. TECHNICAL INFORMATION FOR DICHLOROSILANE
Table 74. DICHLOROSILANE SPECIFICATIONS
Table 75. TECHNICAL INFORMATION FOR SILICON TETRACHLORIDE
Table 76. SILICON TETRACHLORIDE SPECIFICATIONS
Table 77. TECHNICAL INFORMATION FOR TRICHLOROSILANE
Table 78. TRICHLOROSILANE SPECIFICATIONS
Table 79. TECHNICAL INFORMATION FOR AMMONIA
Table 80. AMMONIA SPECIFICATIONS
Table 81. TECHNICAL INFORMATION FOR BORON TRICHLORIDE
Table 82. BORON TRICHLORIDE SPECIFICATIONS
Table 83. TECHNICAL INFORMATION FOR CARBON DIOXIDE
Table 84. CARBON DIOXIDE SPECIFICATIONS
Table 85. TECHNICAL INFORMATION FOR CHLORINE
Table 86. CHLORINE SPECIFICATIONS
Table 87. TECHNICAL INFORMATION FOR NITROUS OXIDE
Table 88. NITROUS OXIDE SPECIFICATIONS
Table 89. TECHNICAL INFORMATION FOR TUNGSTEN HEXAFLUORIDE
Table 90. TUNGSTEN HEXAFLUORIDE SPECIFICATIONS
Table 91. TECHNICAL INFORMATION FOR ARSINE
Table 92. ARSINE SPECIFICATIONS
Table 93. TECHNICAL INFORMATION FOR DIBORANE
Table 94. TECHNICAL INFORMATION FOR PHOSPHINE
Table 95. PHOSPHINE SPECIFICATIONS
Table 96. TECHNICAL INFORMATION FOR HELIUM
Table 97. HELIUM SPECIFICATIONS
Table 97. (CONTINUED)
Table 98. TECHNICAL INFORMATION FOR KRYPTON
Table 99. KRYPTON SPECIFICATIONS
Table 100. TECHNICAL INFORMATION FOR NEON
Table 101. NEON SPECIFICATIONS
Table 102. TECHNICAL INFORMATION FOR XENON
Table 103. XENON SPECIFICATIONS

APPENDIX B: DIRECTORY OF SUPPLIERS

APPENDIX B: DIRECTORY OF SUPPLIERS
DIRECTORY OF SUPPLIERS (CONTINUED)
DIRECTORY OF SUPPLIERS (CONTINUED)
DIRECTORY OF SUPPLIERS (CONTINUED)

LIST OF TABLES

Summary Table:
U.S. VALUE OF ULTRAPURE CHEMICALS, WATER, AND GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 1 ULTRAPURE CHEMICALS, WATER AND GASES USED IN SEMICONDUCTOR MANUFACTURING
Table 2 REGIONAL MARKET VALUE OF TOTAL WORLD SEMICONDUCTOR SALES, 2002
Table 3 U.S. SHIPMENTS OF CHEMICALS, WATER, AND GASES USED IN COMPUTER MANUFACTURING COMPARED WITH SEMICONDUCTOR SHIPMENTS, THROUGH 2007 ($ MILLIONS)
Table 4 U.S. MARKET VALUE FOR THE MAJOR ULTRAPURE PHOTOMASK SUPPLIERS, 2002 ($ MILLIONS)
Table 5 U.S. MARKET VALUE OF THE MAJOR ULTRAPURE PHOTORESIST SUPPLIERS, 2002 ($ MILLIONS)
Table 6 U.S. MARKET VALUE FOR THE MAJOR ULTRAPURE WET CHEMICAL SUPPLIERS, 2002 ($ MILLIONS)
Table 7 U.S. MARKET VALUE OF MAJOR ULTRAPURE WATER SUPPLIERS, 2002 ($ MILLIONS)
Table 8 U.S. MARKET VALUE OF THE MAJOR ULTRAPURE GAS SUPPLIERS, 2002 ($ MILLIONS)
Table 9 GROWTH OF THE U.S. MARKET FOR THE THREE TYPES OF ULTRAPURE MATERIALS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 10 GROWTH OF THE U.S. MARKET FOR ULTRAPURE CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007
($ MILLIONS)
Table 11 GROWTH OF THE U.S. MARKET FOR PHOTOMASKS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 12 GROWTH OF THE U.S. MARKET FOR PHOTORESISTS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 13 IMPORTANT LIQUID CHEMICALS USED IN WET ETCHING
Table 14 IMPORTANT LIQUID CHEMICALS USED IN WET STRIPPING
Table 15 GROWTH OF THE U.S. MARKET FOR THE THREE CLASSES OF ULTRAPURE WET CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 16 GROWTH OF THE U.S. MARKET FOR THE SIX ACIDS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 17 GROWTH OF THE U.S. MARKET FOR THE FIVE ULTRAPURE SOLVENTS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 18 GROWTH OF THE U.S. MARKET FOR OTHER WET CHEMICALS USED IN SEMICONDUCTORS, THROUGH 2007
Table 19 GROWTH OF THE U.S. MARKET FOR THE THREE ULTRAPURE WATER TREATMENT SYSTEMS USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 20 GROWTH OF THE U.S. MARKET FOR ULTRAPURE GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 21 GROWTH OF THE U.S. MARKET FOR THE FOUR BULK GASES USED IN SEMICONDUCTORS, THROUGH 2007
($ MILLIONS)
Table 22 GROWTH OF THE MARKET FOR THE FIVE FUNCTIONS OF SPECIALTY GASES USED IN SEMICONDUCTORS, THROUGH 2007 ($ MILLIONS)
Table 23 SULFURIC ACID SPECIFICATIONS
Table 24 HYDROFLUORIC ACID SPECIFICATIONS
Table 25 HYDROCHLORIC ACID SPECIFICATIONS
Table 26 PHOSPHORIC ACID SPECIFICATIONS
Table 27 NITRIC ACID SPECIFICATIONS
Table 28 ACETIC ACID SPECIFICATIONS
Table 29 ISOPROPYL ALCOHOL SPECIFICATIONS
Table 30 ACETONE SPECIFICATIONS
Table 31 METHANOL SPECIFICATIONS
Table 32 XYLENE SPECIFICATIONS
Table 33 N-BUTYL ACETATE SPECIFICATIONS
Table 34 TECHNICAL INFORMATION FOR HYDROGEN PEROXIDE (PURE)
Table 35 HYDROGEN PEROXIDE 30% SOLUTION SPECIFICATIONS
Table 36 AMMONIUM HYDROXIDE 29% SOLUTION SPECIFICATIONS
Table 37 TECHNICAL INFORMATION FOR ALUMINUM TRIISOBUTYL
Table 38 TECHNICAL INFORMATION FOR PHOSPHORUS OXYCHLORIDE
Table 39 PHOSPHORUS OXYCHLORIDE SPECIFICATIONS
Table 40 TECHNICAL INFORMATION FOR TITANIUM TETRACHLORIDE
Table 41 TECHNICAL INFORMATION FOR SILICON TETRACHLORIDE
Table 42 TECHNICAL INFORMATION FOR 1,1,1-TRICHLOROETHANE
Table 43 TECHNICAL INFORMATION FOR TRIMETHYL BORATE
Table 44 TECHNICAL INFORMATION FOR TRIMETHYL PHOSPHATE
Table 45 TECHNICAL INFORMATION FOR NITROGEN
Table 46 NITROGEN SPECIFICATIONS
Table 47 TECHNICAL INFORMATION FOR HYDROGEN
Table 48 HYDROGEN SPECIFICATIONS
Table 49 TECHNICAL INFORMATION FOR ARGON
Table 50 ARGON SPECIFICATIONS
Table 51 TECHNICAL INFORMATION FOR OXYGEN
Table 52 OXYGEN SPECIFICATIONS
Table 53 TECHNICAL INFORMATION FOR NITROGEN
Table 54 NITROGEN SPECIFICATIONS
Table 55 TECHNICAL INFORMATION FOR HYDROGEN
Table 56 HYDROGEN SPECIFICATIONS
Table 57 TECHNICAL INFORMATION FOR ARGON
Table 58 ARGON SPECIFICATIONS
Table 59 TECHNICAL INFORMATION FOR OXYGEN
Table 60 OXYGEN SPECIFICATIONS
Table 61 TECHNICAL INFORMATION FOR HALOCARBON 23
Table 62 HALOCARBON 23 SPECIFICATIONS
Table 63 TECHNICAL INFORMATION FOR HALOCARBON 114
Table 64 HALOCARBON 114 SPECIFICATIONS
Table 65 TECHNICAL INFORMATION FOR HALOCARBON 116
Table 66 HALOCARBON 116 SPECIFICATIONS
Table 67 TECHNICAL INFORMATION FOR HYDROGEN BROMIDE
Table 68 HYDROGEN BROMIDE SPECIFICATIONS
Table 69 TECHNICAL INFORMATION FOR NITROGEN TRIFLUORIDE
Table 70 NITROGEN TRIFLUORIDE SPECIFICATIONS
Table 71 TECHNICAL INFORMATION FOR SILANE
Table 72 SILANE SPECIFICATIONS
Table 73 TECHNICAL INFORMATION FOR DICHLOROSILANE
Table 74 DICHLOROSILANE SPECIFICATIONS
Table 75 TECHNICAL INFORMATION FOR SILICON TETRACHLORIDE
Table 76 SILICON TETRACHLORIDE SPECIFICATIONS
Table 77 TECHNICAL INFORMATION FOR TRICHLOROSILANE
Table 78 TRICHLOROSILANE SPECIFICATIONS
Table 79 TECHNICAL INFORMATION FOR AMMONIA
Table 80 AMMONIA SPECIFICATIONS
Table 81 TECHNICAL INFORMATION FOR BORON TRICHLORIDE
Table 82 BORON TRICHLORIDE SPECIFICATIONS
Table 83 TECHNICAL INFORMATION FOR CARBON DIOXIDE
Table 84 CARBON DIOXIDE SPECIFICATIONS
Table 85 TECHNICAL INFORMATION FOR CHLORINE
Table 86 CHLORINE SPECIFICATIONS
Table 87 TECHNICAL INFORMATION FOR NITROUS OXIDE
Table 88 NITROUS OXIDE SPECIFICATIONS
Table 89 TECHNICAL INFORMATION FOR TUNGSTEN HEXAFLUORIDE
Table 90 TUNGSTEN HEXAFLUORIDE SPECIFICATIONS
Table 91 TECHNICAL INFORMATION FOR ARSINE
Table 92 ARSINE SPECIFICATIONS
Table 93 TECHNICAL INFORMATION FOR DIBORANE
Table 94 TECHNICAL INFORMATION FOR PHOSPHINE
Table 95 PHOSPHINE SPECIFICATIONS
Table 96 TECHNICAL INFORMATION FOR HELIUM
Table 97 HELIUM SPECIFICATIONS
Table 98 TECHNICAL INFORMATION FOR KRYPTON
Table 99 KRYPTON SPECIFICATIONS
Table 100 TECHNICAL INFORMATION FOR NEON
Table 101 NEON SPECIFICATIONS
Table 102 TECHNICAL INFORMATION FOR XENON
Table 103 XENON SPECIFICATIONS

LIST OF FIGURES

Summary Figure:
U.S. VALUE OF ULTRAPURE CHEMICALS, WATER, AND GASES USED IN SEMICONDUCTORS, 1992-2007($ MILLIONS)
Figure 1 REGIONAL MARKET SHARE OF TOTAL WORLD SEMICONDUCTOR SALES, 2002
Figure 2 U.S. MARKET SHARE FOR THE MAJOR ULTRAPURE PHOTOMASKS SUPPLIERS (%)
Figure 3 U.S. MARKET SHARE OF THE MAJOR ULTRAPURE PHOTORESIST SUPPLIERS, 2002 (%)
Figure 4 U.S. MARKET SHARE OF THE MAJOR ULTRAPURE WET CHEMICAL SUPPLIERS, 2002 (%)
Figure 5 U.S. MARKET SHARE OF MAJOR ULTRAPURE WATER SUPPLIERS, 2002 (%)
Figure 6 U.S. MARKET SHARE OF THE MAJOR ULTRAPURE GAS SUPPLIERS, 2002 (%)
Figure 7 U.S. MARKET SHARE OF THE THREE TYPES OF ULTRAPURE MATERIALS USED IN SEMICONDUCTORS, 2002 (%)
Figure 8 U.S. MARKET SHARE OF ULTRAPURE CHEMICALS USED IN SEMICONDUCTORS, 2002 (%)
Figure 9 U.S. MARKET SHARE OF THE THREE CLASSES OF ULTRAPURE WET CHEMICALS USED IN SEMICONDUCTORS, 2002 (%)
Figure 10 U.S. MARKET SHARE OF THE SIX ACIDSUSED IN SEMICONDUCTORS, 2002 (%)
Figure 11 U.S. MARKET SHARE FOR THE FIVE ULTRAPURE SOLVENTS USED IN SEMICONDUCTORS, 2002 (%)
Figure 12 U.S. MARKET SHARE OF THE THREE ULTRAPURE WATER TREATMENT SYSTEMS USED IN SEMICONDUCTORS, 2002 (%)
Figure 13 U.S. MARKET SHARE OF THE FOUR BULK GASES USED IN SEMICONDUCTORS, 2002 (%)
Figure 14 U.S. MARKET SHARE OF THE FIVE FUNCTIONS OF SPECIALTY GASES USED IN SEMICONDUCTORS, 2002 (%)

Ultrapure Materials for the Semiconductor Industry

TABLE OF CONTENTS

LIST OF TABLES

LIST OF FIGURES