Table of Contents
Chapter 1: SUMMARY
- EXECUTIVE SUMMARY 8
- SUMMARY TABLE GLOBAL MARKET FOR CHEMICAL MECHANICAL POLISHING, THROUGH
2013 ($MILLIONS) 9
- SUMMARY FIGURE GLOBAL MARKET FOR CHEMICAL MECHANICAL POLISHING, 2006-2013
($MILLIONS)
Chapter 2: OVERVIEW 17
- INTRODUCTION 11
- HISTORY OF CHEMICAL MECHANICAL POLISHING 11
- HISTORY OF CHEMICAL ........(CONTINUED) 12
- TABLE 1 CHEMICAL MECHANICAL POLISHING - TECHNOLOGICAL MILESTONES 13
- FIGURE 1 CHEMICAL MECHANICAL POLISHING - WORLDWIDE PATENT APPLICATIONS AND
PATENTS ISSUED SINCE 1960 14
- FIGURE 1 (CONTINUED) 15
- CHEMICAL-MECHANICAL POLISHING: PROCESS AND EQUIPMENT 15
- POLISHING 15
- Requirements of a CMP Process 15
- TABLE 2 GENERAL REQUIREMENTS OF A CMP PROCESS 15
- Equipment and Process 15
- Dual Force Planarization 16
- Multiple Polishing Systems 17
- POST-CMP CLEANING 17
- Cleaning Steps and Chemistries 17
- Post-CMP Equipment Technology 18
- Wet Process 18
- Dry and Other Processes 19
- CURRENT AND EMERGING APPLICATIONS OF CHEMICAL MECHANICAL POLISHING 19
- TABLE 3 APPLICATIONS OF CHEMICAL MECHANICAL POLISHING BY INDUSTRY 20
- ELECTRONICS 20
- Microelectronics 20
- Semiconductor Devices 20
- TABLE 4 IC CONFIGURATIONS 21
- TABLE 5 TYPICAL APPLICATIONS OF CHEMICAL MECHANICAL POLISHING IN
SEMICONDUCTOR MANUFACTURING 22
- Wafer Planarization 22
- Deep Trench Capacitor Fabrication 22
- Polysilicon Films 23
- Shallow Trench Isolation 23
- Pre-metal Dielectric Layers 23
- Inter-layer Dielectric Films 23
- Aluminum and Aluminum Alloys 24
- Metal Polishing for Vias and Contacts 24
- Damascene Process 24
- MEMS and NEMS 24
- Inkjet Printheads 25
- Data Storage Media and Recording Heads 25
- Magnetic Storage Media 25
- Recording Heads 26
- Advanced Displays 26
- OPTICS 26
- Lenses 26
- Color Filters for Image Sensors 26
- Sapphire Substrates
Chapter 3: GLOBAL MARKET 93
- ANALYSIS OUTLINE 28
- GLOBAL MARKET SUMMARY 28
- MARKET SEGMENTATION BY PRODUCT CATEGORY 28
- Market Segmentation by ........(Continued) 29
- TABLE 6 CHEMICAL MECHANICAL POLISHING: GLOBAL REVENUES BY PRODUCT
CATEGORY, THROUGH 2013 ($MILLIONS) 30
- FIGURE 2 CHEMICAL MECHANICAL POLISHING: GLOBAL MARKET BY PRODUCT CATEGORY,
2006-2013 ($MILLIONS) 31
- FIGURE 3 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY PRODUCT CATEGORY,
2008 AND 2013 (%) 31
- FIGURE 3 (CONTINUED) 32
- MARKET SEGMENTATION BY APPLICATION 32
- TABLE 7 CHEMICAL MECHANICAL POLISHING: GLOBAL REVENUES BY APPLICATION,
THROUGH 2013 ($MILLIONS) 33
- FIGURE 4 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY APPLICATION, 2008
AND 2013 (%) 34
- MARKET SEGMENTATION BY REGION 35
- TABLE 8 CHEMICAL MECHANICAL POLISHING: REVENUES BY REGION, THROUGH 2013
($MILLIONS) 35
- FIGURE 5 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY REGION, 2008 AND
2013 (%) 36
- CMP EQUIPMENT 37
- BASIC EQUIPMENT DESIGN 37
- TABLE 9 BASIC CHEMICAL MECHANICAL POLISHING PROCESS 37
- CURRENT TECHNICAL ISSUES 37
- Uniform Polishing Pressure 37
- Carrier Head Position 37
- Determination of Polishing Endpoint 38
- Higher Production Throughput 38
- On-line Inspection 38
- Uniform Polishing Rate 38
- Reduction of Polishing Defects 39
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 39
- Electro-chemical Mechanical Polishing 39
- Apparatuses and Methods for In-situ Endpoint Detection 40
- Laser Interferometer Detector 40
- Combined Eddy Current Sensing and Optical Monitoring 41
- System for Endpoint Detection in Copper Damascene Process 41
- Polishing Equipment with Pad Drum 42
- Chemical Mechanical Polishing Equipment with Rotating Belt 42
- CMP Equipment with Electromagnetic Coil 43
- CURRENT MARKET STATUS 43
- Current Market Summary 43
- Revenues by Equipment Type 43
- TABLE 10 SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2008 ($ BILLIONS) 44
- FIGURE 6 SEMICONDUCTORS: REVENUES BY REGION, 2003-2008 ($ BILLIONS) 44
- TABLE 11 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2008
($ MILLIONS) 45
- FIGURE 7 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES, 2003-2008 ($
MILLIONS) 46
- FIGURE 8 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY TYPE, 2008 (%) 46
- The Post-CMP Equipment Market 47
- TABLE 12 POST-CMP EQUIPMENT: GLOBAL REVENUES BY PROCESS TYPE, 2008 47
- Revenues by Application 47
- TABLE 13 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2008
($ MILLIONS) 48
- FIGURE 9 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY APPLICATION, 2008 (%)
48
- Revenues by Region 48
- Revenues ........(Continued) 49
- TABLE 14 CMP AND POST-CMP EQUIPMENT: REVENUES BY REGION, THROUGH 2008
($MILLIONS) 50
- FIGURE 10 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY REGION, 2008 (%) 50
- MARKET GROWTH TRENDS 51
- Semiconductor Industry Growth 51
- TABLE 15 FORECAST - SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2013
($BILLIONS) 51
- FIGURE 11 FORECAST - SEMICONDUCTORS: MARKET GROWTH BY REGION, 2008 AND
2013 ($ BILLIONS) 52
- Industry Growth for Other Emerging Applications 52
- Data Storage Media 53
- TABLE 16 FORECAST - HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH
2013 (MILLION UNITS) 53
- FIGURE 12 FORECAST - HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2013 (%
UNITS) 54
- TABLE 17 FORECAST - HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2013
(MILLION UNITS) 55
- FIGURE 13 FORECAST - HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2008 AND 2013
(MILLION UNITS) 55
- FIGURE 14 FORECAST - HARD DISKS: PRODUCTION SHARE BY TYPE, 2013 (% UNITS)
56
- Recording Heads 56
- Advanced Displays 57
- TABLE 18 FORECAST - FLAT PANEL DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH
2013 ($BILLIONS) 57
- FIGURE 15 FORECAST - FLAT PANEL DISPLAYS: GLOBAL REVENUES BY TYPE, 2008
AND 2013 (MILLION UNITS) 58
- FIGURE 16 FORECAST - FLAT PANEL DISPLAYS: MARKET SHARE BY TYPE, 2013 (%) 58
- Optics 59
- TABLE 19 FORECAST - OPTICS: GLOBAL MARKET GROWTH, THROUGH 2013 ($
BILLIONS) 59
- Technological Trends 59
- Regional Trends 60
- PROJECTED MARKET FOR CMP AND POST-CMP EQUIPMENT 61
- Key Observations 61
- TABLE 20 FACTORS AFFECTING SALES OF CMP AND POST-CMP EQUIPMENT, THROUGH
2013 61
- Market Forecast for CMP and Post-CMP Equipment 62
- Revenues by Application 62
- TABLE 21 FORECAST - CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY
APPLICATION, THROUGH 2013 ($ MILLION) 63
- FIGURE 17 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY
APPLICATION, 2013 (%) 63
- Revenues by Equipment Type 64
- TABLE 22 FORECAST - CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 64
- FIGURE 18 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY TYPE,
2013 (%) 65
- Post-CMP Equipment Revenues by Process Type 65
- TABLE 23 FORECAST - POST-CMP EQUIPMENT: GLOBAL REVENUES BY PROCESS TYPE,
THROUGH 2013 ($ MILLIONS) 66
- FIGURE 19 FORECAST - POST-CMP EQUIPMENT: MARKET SHARE BY PROCESS TYPE,
2013 (%) 66
- Revenues by Region 67
- TABLE 24 FORECAST - CMP AND POST-CMP EQUIPMENT: REVENUES BY REGION,
THROUGH 2013 ($ MILLIONS) 67
- FIGURE 20 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY REGION,
2013 (%) 68
- CMP SLURRIES 68
- TECHNOLOGY 68
- Abrasive Component 68
- Fumed Metal Oxides 69
- Precipitated Powders 69
- Other Slurry Components 69
- Slurry Compositions 70
- TABLE 25 SLURRIES FOR CHEMICAL-MECHANICAL POLISHING 71
- Oxide Slurry 72
- TABLE 26 SAMSUNG ELECTRONICS - OXIDE CMP SLURRY COMPOSITION 72
- Low-K Dielectric Slurry 73
- TABLE 27 CABOT MICROELECTRONICS - LOW-K DIELECTRIC CMP SLURRY COMPOSITION
73
- Polycrystalline Silicon Slurry 74
- TABLE 28 CHEIL INDUSTRIES - POLYCRYSTALLINE SILICON CMP SLURRY COMPOSITION
74
- Copper Slurry 74
- TABLE 29 MOTOROLA - COPPER CMP SLURRY COMPOSITION 75
- TABLE 30 CABOT MICROELECTRONICS - COPPER CMP SLURRY COMPOSITION 76
- TABLE 31 ROHM AND HAAS - COPPER CMP SLURRY COMPOSITION 77
- Tungsten Slurry 77
- TABLE 32 DUPONT AIR PRODUCTS - TUNGSTEN CMP SLURRY COMPOSITION 77
- CURRENT TECHNICAL ISSUES 77
- Minimization of Polishing Defects 78
- Polishing of Different Materials 78
- Polishing Rate 78
- Waste Disposal 79
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 79
- CMP Slurry Containing Abrasive Particles with Photocatalytic Activity 79
- Additive for Improved Selectivity of CMP Slurry 80
- Slurry Containing Cerium Oxide for High-Speed Polishing 80
- Polishing Slurry Causing Reduced Dishing 81
- CURRENT MARKET STATUS 82
- Current Market Summary 82
- TABLE 33 CMP SLURRIES: GLOBAL REVENUES, THROUGH 2008 ($
MILLIONS) 83
- FIGURE 21 CMP SLURRIES: GLOBAL REVENUES, 2003-2008 ($
MILLIONS) 83
- Revenues by Material Type 83
- TABLE 34 CMP SLURRIES: GLOBAL REVENUES BY MATERIAL TYPE, 2008 ($
MILLIONS/%) 84
- FIGURE 22 CMP SLURRIES: MARKET SHARE BY MATERIAL TYPE, 2008 (%) 85
- TABLE 35 DIELECTRIC CMP SLURRIES: GLOBAL REVENUES BY TYPE, 2008 ($
MILLIONS/%) 85
- FIGURE 23 DIELECTRIC CMP SLURRIES: MARKET SHARE BY TYPE, 2008 (%) 86
- TABLE 36 METAL CMP SLURRIES: GLOBAL REVENUES BY TYPE, 2008 ($ MILLIONS/%)
87
- FIGURE 24 METAL CMP SLURRIES: MARKET SHARE BY TYPE, 2008 (%) 87
- Revenues by Application 88
- TABLE 37 CMP SLURRIES: GLOBAL REVENUES BY APPLICATION, 2008 ($ MILLIONS/%)
88
- FIGURE 25 CMP SLURRIES: MARKET SHARE BY APPLICATION, 2008 (%) 89
- Revenues by Region 89
- TABLE 38 CMP SLURRIES: REVENUES BY REGION, THROUGH 2008 ($MILLIONS) 90
- FIGURE 26 CMP SLURRIES: MARKET SHARE BY REGION, 2008 (%) 90
- MARKET GROWTH TRENDS 91
- Technological Trends 91
- PROJECTED MARKET FOR CMP SLURRIES 92
- Key Observations 92
- TABLE 39 FACTORS AFFECTING SALES OF CMP SLURRIES, THROUGH 2013 92
- Market Forecast for CMP Slurries 93
- Revenues by Application 93
- TABLE 40 FORECAST - CMP SLURRIES: GLOBAL REVENUES BY APPLICATION, THROUGH
2013 ($ MILLION) 94
- FIGURE 27 FORECAST - CMP SLURRIES: MARKET SHARE BY APPLICATION, 2013 (%)
94
- FIGURE 27 (CONTINUED) 95
- Revenues by Material Type 95
- TABLE 41 FORECAST - CMP SLURRIES: GLOBAL REVENUES BY MATERIAL TYPE,
THROUGH 2013 ($ MILLIONS) 95
- FIGURE 28 FORECAST - CMP SLURRIES: MARKET SHARE BY MATERIAL TYPE, 2013
(%) 96
- TABLE 42 FORECAST - DIELECTRIC CMP SLURRIES: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 97
- FIGURE 29 FORECAST - DIELECTRIC CMP SLURRIES: MARKET SHARE BY TYPE, 2013
(%) 97
- TABLE 43 FORECAST - METAL CMP SLURRIES: GLOBAL REVENUES BY TYPE, THROUGH
2013 ($ MILLIONS) 98
- FIGURE 30 METAL CMP SLURRIES: MARKET SHARE BY TYPE, 2013 (%) 99
- Revenues by Region 99
- TABLE 44 FORECAST - CMP SLURRIES: REVENUES BY REGION, THROUGH 2013 ($
MILLIONS) 100
- FIGURE 31 FORECAST - CMP SLURRIES: MARKET SHARE BY REGION, 2013 (%) 100
- FIGURE 31 (CONTINUED) 101
- OTHER CMP CONSUMABLES 101
- TECHNOLOGY 101
- Pads 101
- Designs and Materials 101
- Shapes 102
- Pad Conditioners 103
- Filters 103
- Chemicals 103
- CURRENT TECHNICAL ISSUES 104
- High-polishing Rate and Uniform Planarization 104
- Reducing Downtime for Pad Conditioning 104
- Post-CMP Cleaning in the Copper Damascene Process 105
- Specialized Cleaning Methods 105
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 105
- Enhanced Pad Conditioner 105
- Transparent Microporous CMP Pad 106
- Elastomer-modified CMP Pad 106
- Post-CMP Cleaning Solution for Thin Film Magnetic Heads Wafer Fabrication
107
- CURRENT MARKET STATUS 108
- Current Market Summary 108
- Revenues by Product Type 108
- TABLE 45 OTHER CMP CONSUMABLES: GLOBAL REVENUES BY TYPE, THROUGH 2008 ($
MILLIONS) 109
- FIGURE 32 OTHER CMP CONSUMABLES: GLOBAL REVENUES, 2003-2008 ($ MILLIONS)
109
- FIGURE 33 OTHER CMP CONSUMABLES: MARKET SHARE BY TYPE, 2008 (%) 110
- Revenues by Application 110
- TABLE 46 OTHER CMP CONSUMABLES: GLOBAL REVENUES BY APPLICATION, 2008 ($
MILLIONS) 111
- FIGURE 34 OTHER CMP CONSUMABLES: MARKET SHARE BY APPLICATION, 2008 (%) 111
- Revenues by Region 111
- TABLE 47 OTHER CMP CONSUMABLES: REVENUES BY REGION, THROUGH 2008
($MILLIONS) 112
- FIGURE 35 OTHER CMP CONSUMABLES: MARKET SHARE BY REGION, 2008 (%) 113
- MARKET GROWTH TRENDS 113
- Technological Trends 113
- PROJECTED MARKET FOR CMP PADS AND OTHER CONSUMABLES 114
- Key Observations 114
- TABLE 48 FACTORS AFFECTING SALES OF CMP PADS AND OTHER CONSUMABLE, THROUGH
2013 114
- Market Forecast for CMP Pads and Other Consumables 115
- Revenues by Product Type 115
- TABLE 49 FORECAST - OTHER CMP CONSUMABLES: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 116
- FIGURE 36 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY TYPE, 2013
(%) 116
- Revenues by Application 117
- TABLE 50 FORECAST - OTHER CMP CONSUMABLES: GLOBAL REVENUES BY
APPLICATION, THROUGH 2013 ($ MILLION) 117
- FIGURE 37 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY APPLICATION,
2013 (%) 118
- Revenues by Region 118
- TABLE 51 FORECAST - OTHER CMP CONSUMABLES: REVENUES BY REGION, THROUGH
2013 ($ MILLIONS) 119
- FIGURE 38 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY REGION, 2013
(%) 119
- FIGURE 38 (CONTINUED) 120
Chapter 4: GLOBAL INDUSTRY STRUCTURE 39
- ANALYSIS OUTLINE 28
- GLOBAL MARKET SUMMARY 28
- MARKET SEGMENTATION BY PRODUCT CATEGORY 28
- Market Segmentation by ........(Continued) 29
- TABLE 6 CHEMICAL MECHANICAL POLISHING: GLOBAL REVENUES BY PRODUCT
CATEGORY, THROUGH 2013 ($MILLIONS) 30
- FIGURE 2 CHEMICAL MECHANICAL POLISHING: GLOBAL MARKET BY PRODUCT CATEGORY,
2006-2013 ($MILLIONS) 31
- FIGURE 3 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY PRODUCT CATEGORY,
2008 AND 2013 (%) 31
- FIGURE 3 (CONTINUED) 32
- MARKET SEGMENTATION BY APPLICATION 32
- TABLE 7 CHEMICAL MECHANICAL POLISHING: GLOBAL REVENUES BY APPLICATION,
THROUGH 2013 ($MILLIONS) 33
- FIGURE 4 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY APPLICATION, 2008
AND 2013 (%) 34
- MARKET SEGMENTATION BY REGION 35
- TABLE 8 CHEMICAL MECHANICAL POLISHING: REVENUES BY REGION, THROUGH 2013
($MILLIONS) 35
- FIGURE 5 CHEMICAL MECHANICAL POLISHING: MARKET SHARE BY REGION, 2008 AND
2013 (%) 36
- CMP EQUIPMENT 37
- BASIC EQUIPMENT DESIGN 37
- TABLE 9 BASIC CHEMICAL MECHANICAL POLISHING PROCESS 37
- CURRENT TECHNICAL ISSUES 37
- Uniform Polishing Pressure 37
- Carrier Head Position 37
- Determination of Polishing Endpoint 38
- Higher Production Throughput 38
- On-line Inspection 38
- Uniform Polishing Rate 38
- Reduction of Polishing Defects 39
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 39
- Electro-chemical Mechanical Polishing 39
- Apparatuses and Methods for In-situ Endpoint Detection 40
- Laser Interferometer Detector 40
- Combined Eddy Current Sensing and Optical Monitoring 41
- System for Endpoint Detection in Copper Damascene Process 41
- Polishing Equipment with Pad Drum 42
- Chemical Mechanical Polishing Equipment with Rotating Belt 42
- CMP Equipment with Electromagnetic Coil 43
- CURRENT MARKET STATUS 43
- Current Market Summary 43
- Revenues by Equipment Type 43
- TABLE 10 SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2008 ($ BILLIONS) 44
- FIGURE 6 SEMICONDUCTORS: REVENUES BY REGION, 2003-2008 ($ BILLIONS) 44
- TABLE 11 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY TYPE, THROUGH 2008
($ MILLIONS) 45
- FIGURE 7 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES, 2003-2008 ($
MILLIONS) 46
- FIGURE 8 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY TYPE, 2008 (%) 46
- The Post-CMP Equipment Market 47
- TABLE 12 POST-CMP EQUIPMENT: GLOBAL REVENUES BY PROCESS TYPE, 2008 47
- Revenues by Application 47
- TABLE 13 CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY APPLICATION, 2008
($ MILLIONS) 48
- FIGURE 9 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY APPLICATION, 2008 (%)
48
- Revenues by Region 48
- Revenues ........(Continued) 49
- TABLE 14 CMP AND POST-CMP EQUIPMENT: REVENUES BY REGION, THROUGH 2008
($MILLIONS) 50
- FIGURE 10 CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY REGION, 2008 (%) 50
- MARKET GROWTH TRENDS 51
- Semiconductor Industry Growth 51
- TABLE 15 FORECAST - SEMICONDUCTORS: REVENUES BY REGION, THROUGH 2013
($BILLIONS) 51
- FIGURE 11 FORECAST - SEMICONDUCTORS: MARKET GROWTH BY REGION, 2008 AND
2013 ($ BILLIONS) 52
- Industry Growth for Other Emerging Applications 52
- Data Storage Media 53
- TABLE 16 FORECAST - HARD DISK DRIVES: GLOBAL PRODUCTION BY TYPE, THROUGH
2013 (MILLION UNITS) 53
- FIGURE 12 FORECAST - HARD DISK DRIVES: PRODUCTION SHARE BY TYPE, 2013 (%
UNITS) 54
- TABLE 17 FORECAST - HARD DISKS: GLOBAL PRODUCTION BY TYPE, THROUGH 2013
(MILLION UNITS) 55
- FIGURE 13 FORECAST - HARD DISKS: GLOBAL PRODUCTION BY TYPE, 2008 AND 2013
(MILLION UNITS) 55
- FIGURE 14 FORECAST - HARD DISKS: PRODUCTION SHARE BY TYPE, 2013 (% UNITS)
56
- Recording Heads 56
- Advanced Displays 57
- TABLE 18 FORECAST - FLAT PANEL DISPLAYS: GLOBAL REVENUES BY TYPE, THROUGH
2013 ($BILLIONS) 57
- FIGURE 15 FORECAST - FLAT PANEL DISPLAYS: GLOBAL REVENUES BY TYPE, 2008
AND 2013 (MILLION UNITS) 58
- FIGURE 16 FORECAST - FLAT PANEL DISPLAYS: MARKET SHARE BY TYPE, 2013 (%) 58
- Optics 59
- TABLE 19 FORECAST - OPTICS: GLOBAL MARKET GROWTH, THROUGH 2013 ($
BILLIONS) 59
- Technological Trends 59
- Regional Trends 60
- PROJECTED MARKET FOR CMP AND POST-CMP EQUIPMENT 61
- Key Observations 61
- TABLE 20 FACTORS AFFECTING SALES OF CMP AND POST-CMP EQUIPMENT, THROUGH
2013 61
- Market Forecast for CMP and Post-CMP Equipment 62
- Revenues by Application 62
- TABLE 21 FORECAST - CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY
APPLICATION, THROUGH 2013 ($ MILLION) 63
- FIGURE 17 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY
APPLICATION, 2013 (%) 63
- Revenues by Equipment Type 64
- TABLE 22 FORECAST - CMP AND POST-CMP EQUIPMENT: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 64
- FIGURE 18 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY TYPE,
2013 (%) 65
- Post-CMP Equipment Revenues by Process Type 65
- TABLE 23 FORECAST - POST-CMP EQUIPMENT: GLOBAL REVENUES BY PROCESS TYPE,
THROUGH 2013 ($ MILLIONS) 66
- FIGURE 19 FORECAST - POST-CMP EQUIPMENT: MARKET SHARE BY PROCESS TYPE,
2013 (%) 66
- Revenues by Region 67
- TABLE 24 FORECAST - CMP AND POST-CMP EQUIPMENT: REVENUES BY REGION,
THROUGH 2013 ($ MILLIONS) 67
- FIGURE 20 FORECAST - CMP AND POST-CMP EQUIPMENT: MARKET SHARE BY REGION,
2013 (%) 68
- CMP SLURRIES 68
- TECHNOLOGY 68
- Abrasive Component 68
- Fumed Metal Oxides 69
- Precipitated Powders 69
- Other Slurry Components 69
- Slurry Compositions 70
- TABLE 25 SLURRIES FOR CHEMICAL-MECHANICAL POLISHING 71
- Oxide Slurry 72
- TABLE 26 SAMSUNG ELECTRONICS - OXIDE CMP SLURRY COMPOSITION 72
- Low-K Dielectric Slurry 73
- TABLE 27 CABOT MICROELECTRONICS - LOW-K DIELECTRIC CMP SLURRY COMPOSITION
73
- Polycrystalline Silicon Slurry 74
- TABLE 28 CHEIL INDUSTRIES - POLYCRYSTALLINE SILICON CMP SLURRY COMPOSITION
74
- Copper Slurry 74
- TABLE 29 MOTOROLA - COPPER CMP SLURRY COMPOSITION 75
- TABLE 30 CABOT MICROELECTRONICS - COPPER CMP SLURRY COMPOSITION 76
- TABLE 31 ROHM AND HAAS - COPPER CMP SLURRY COMPOSITION 77
- Tungsten Slurry 77
- TABLE 32 DUPONT AIR PRODUCTS - TUNGSTEN CMP SLURRY COMPOSITION 77
- CURRENT TECHNICAL ISSUES 77
- Minimization of Polishing Defects 78
- Polishing of Different Materials 78
- Polishing Rate 78
- Waste Disposal 79
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 79
- CMP Slurry Containing Abrasive Particles with Photocatalytic Activity 79
- Additive for Improved Selectivity of CMP Slurry 80
- Slurry Containing Cerium Oxide for High-Speed Polishing 80
- Polishing Slurry Causing Reduced Dishing 81
- CURRENT MARKET STATUS 82
- Current Market Summary 82
- TABLE 33 CMP SLURRIES: GLOBAL REVENUES, THROUGH 2008 ($
MILLIONS) 83
- FIGURE 21 CMP SLURRIES: GLOBAL REVENUES, 2003-2008 ($
MILLIONS) 83
- Revenues by Material Type 83
- TABLE 34 CMP SLURRIES: GLOBAL REVENUES BY MATERIAL TYPE, 2008 ($
MILLIONS/%) 84
- FIGURE 22 CMP SLURRIES: MARKET SHARE BY MATERIAL TYPE, 2008 (%) 85
- TABLE 35 DIELECTRIC CMP SLURRIES: GLOBAL REVENUES BY TYPE, 2008 ($
MILLIONS/%) 85
- FIGURE 23 DIELECTRIC CMP SLURRIES: MARKET SHARE BY TYPE, 2008 (%) 86
- TABLE 36 METAL CMP SLURRIES: GLOBAL REVENUES BY TYPE, 2008 ($ MILLIONS/%)
87
- FIGURE 24 METAL CMP SLURRIES: MARKET SHARE BY TYPE, 2008 (%) 87
- Revenues by Application 88
- TABLE 37 CMP SLURRIES: GLOBAL REVENUES BY APPLICATION, 2008 ($ MILLIONS/%)
88
- FIGURE 25 CMP SLURRIES: MARKET SHARE BY APPLICATION, 2008 (%) 89
- Revenues by Region 89
- TABLE 38 CMP SLURRIES: REVENUES BY REGION, THROUGH 2008 ($MILLIONS) 90
- FIGURE 26 CMP SLURRIES: MARKET SHARE BY REGION, 2008 (%) 90
- MARKET GROWTH TRENDS 91
- Technological Trends 91
- PROJECTED MARKET FOR CMP SLURRIES 92
- Key Observations 92
- TABLE 39 FACTORS AFFECTING SALES OF CMP SLURRIES, THROUGH 2013 92
- Market Forecast for CMP Slurries 93
- Revenues by Application 93
- TABLE 40 FORECAST - CMP SLURRIES: GLOBAL REVENUES BY APPLICATION, THROUGH
2013 ($ MILLION) 94
- FIGURE 27 FORECAST - CMP SLURRIES: MARKET SHARE BY APPLICATION, 2013 (%)
94
- FIGURE 27 (CONTINUED) 95
- Revenues by Material Type 95
- TABLE 41 FORECAST - CMP SLURRIES: GLOBAL REVENUES BY MATERIAL TYPE,
THROUGH 2013 ($ MILLIONS) 95
- FIGURE 28 FORECAST - CMP SLURRIES: MARKET SHARE BY MATERIAL TYPE, 2013
(%) 96
- TABLE 42 FORECAST - DIELECTRIC CMP SLURRIES: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 97
- FIGURE 29 FORECAST - DIELECTRIC CMP SLURRIES: MARKET SHARE BY TYPE, 2013
(%) 97
- TABLE 43 FORECAST - METAL CMP SLURRIES: GLOBAL REVENUES BY TYPE, THROUGH
2013 ($ MILLIONS) 98
- FIGURE 30 METAL CMP SLURRIES: MARKET SHARE BY TYPE, 2013 (%) 99
- Revenues by Region 99
- TABLE 44 FORECAST - CMP SLURRIES: REVENUES BY REGION, THROUGH 2013 ($
MILLIONS) 100
- FIGURE 31 FORECAST - CMP SLURRIES: MARKET SHARE BY REGION, 2013 (%) 100
- FIGURE 31 (CONTINUED) 101
- OTHER CMP CONSUMABLES 101
- TECHNOLOGY 101
- Pads 101
- Designs and Materials 101
- Shapes 102
- Pad Conditioners 103
- Filters 103
- Chemicals 103
- CURRENT TECHNICAL ISSUES 104
- High-polishing Rate and Uniform Planarization 104
- Reducing Downtime for Pad Conditioning 104
- Post-CMP Cleaning in the Copper Damascene Process 105
- Specialized Cleaning Methods 105
- LATEST TECHNOLOGICAL DEVELOPMENTS, 2005 TO PRESENT 105
- Enhanced Pad Conditioner 105
- Transparent Microporous CMP Pad 106
- Elastomer-modified CMP Pad 106
- Post-CMP Cleaning Solution for Thin Film Magnetic Heads Wafer Fabrication
107
- CURRENT MARKET STATUS 108
- Current Market Summary 108
- Revenues by Product Type 108
- TABLE 45 OTHER CMP CONSUMABLES: GLOBAL REVENUES BY TYPE, THROUGH 2008 ($
MILLIONS) 109
- FIGURE 32 OTHER CMP CONSUMABLES: GLOBAL REVENUES, 2003-2008 ($ MILLIONS)
109
- FIGURE 33 OTHER CMP CONSUMABLES: MARKET SHARE BY TYPE, 2008 (%) 110
- Revenues by Application 110
- TABLE 46 OTHER CMP CONSUMABLES: GLOBAL REVENUES BY APPLICATION, 2008 ($
MILLIONS) 111
- FIGURE 34 OTHER CMP CONSUMABLES: MARKET SHARE BY APPLICATION, 2008 (%) 111
- Revenues by Region 111
- TABLE 47 OTHER CMP CONSUMABLES: REVENUES BY REGION, THROUGH 2008
($MILLIONS) 112
- FIGURE 35 OTHER CMP CONSUMABLES: MARKET SHARE BY REGION, 2008 (%) 113
- MARKET GROWTH TRENDS 113
- Technological Trends 113
- PROJECTED MARKET FOR CMP PADS AND OTHER CONSUMABLES 114
- Key Observations 114
- TABLE 48 FACTORS AFFECTING SALES OF CMP PADS AND OTHER CONSUMABLE, THROUGH
2013 114
- Market Forecast for CMP Pads and Other Consumables 115
- Revenues by Product Type 115
- TABLE 49 FORECAST - OTHER CMP CONSUMABLES: GLOBAL REVENUES BY TYPE,
THROUGH 2013 ($ MILLIONS) 116
- FIGURE 36 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY TYPE, 2013
(%) 116
- Revenues by Application 117
- TABLE 50 FORECAST - OTHER CMP CONSUMABLES: GLOBAL REVENUES BY
APPLICATION, THROUGH 2013 ($ MILLION) 117
- FIGURE 37 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY APPLICATION,
2013 (%) 118
- Revenues by Region 118
- TABLE 51 FORECAST - OTHER CMP CONSUMABLES: REVENUES BY REGION, THROUGH
2013 ($ MILLIONS) 119
- FIGURE 38 FORECAST - OTHER CMP CONSUMABLES: MARKET SHARE BY REGION, 2013
(%) 119
- FIGURE 38 (CONTINUED) 120
Chapter 5: INDUSTRY COMPETITIVENESS 25
- CHEMICAL MECHANICAL POLISHING DEVELOPMENT ACTIVITIES 160
- TABLE 63 RESEARCH ORGANIZATIONS INVOLVED IN CHEMICAL MECHANICAL POLISHING,
WORLDWIDE 160
- TABLE 63 (CONTINUED) 161
- TABLE 63 (CONTINUED) 162
- TABLE 63 (CONTINUED) 163
- TABLE 63 (CONTINUED) 164
- TABLE 63 (CONTINUED) 165
- UNITED STATES 165
- Clarkson University 165
- TABLE 64 CLARKSON UNIVERSITY RESEARCH 166
- Massachusetts Institute of Technology 166
- TABLE 65 MIT RESEARCH 167
- National Institute of Standards and Technologies 167
- TABLE 66 NIST RESEARCH 168
- Rensselaer Polytechnic Institute 168
- TABLE 67 RENSSELAER POLYTECHNIC INSTITUTE RESEARCH 169
- University of Florida at Gainesville 169
- TABLE 68 UNIVERSITY OF FLORIDA RESEARCH 170
- EUROPE 171
- Interuniversitair Microelektronica Centrum, Belgium 171
- TABLE 69 IMEC CMP RESEARCH 171
- University of Twente, The Netherlands 172
- TABLE 70 UNIVERSITY OF TWENTE RESEARCH 172
- ASIA PACIFIC 172
- Hanyang University, South Korea 172
- TABLE 71 HANYANG UNIVERSITY RESEARCH 173
- Kyushu University, Japan 173
- TABLE 72 KYUSHU UNIVERSITY RESEARCH 174
- Nanyang Technological University, Singapore 174
- TABLE 73 NTU RESEARCH 175
- SUMMARY OF GLOBAL R&D ACTIVITIES IN CMP TECHNOLOGY 175
- FIGURE 44 CURRENT GLOBAL RESEARCH AND DEVELOPMENT BY SUBJECT (%) 176
- FIGURE 44 (CONTINUED) 177
- Industry Initiatives 177
- TABLE 74 PRIVATE ORGANIZATIONS INVOLVED IN CMP RESEARCH 177
- TABLE 74 (CONTINUED) 178
- OTHER CONSIDERATIONS 178
- COST FACTOR 178
- Equipment Cost 178
- Materials Cost 179
- QUALITY FACTOR 179
- TECHNOLOGY FACTOR 180
- MANUFACTURING CAPABILITY 180
- KEY GROWTH MARKETS 181
- TABLE 75 GLOBAL GROWTH FORECAST FOR CURRENT AND POTENTIAL CMP
APPLICATIONS, 2008-2013 182
- MARKET GROWTH FACTORS 183
- DRIVING FORCES 183
- IMPACT OF MARKET GROWTH FACTORS 184
- TABLE 76 PERCENTAGE IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF
THE CMP MARKET, 2008-2013 184
Chapter 6: U.S. PATENT ANALYSIS
- INTRODUCTION 185
- SUMMARY OF PATENTS AWARDED DURING THE PERIOD 2006 THROUGH 2008 185
- TABLE 77 CHEMICAL MECHANICAL POLISHING - U.S. PATENTS, 2008 186
- TABLE 77 (CONTINUED) 187
- TABLE 77 (CONTINUED) 188
- TABLE 77 (CONTINUED) 189
- TABLE 77 (CONTINUED) 190
- TABLE 77 (CONTINUED) 191
- TABLE 77 (CONTINUED) 192
- TABLE 77 (CONTINUED) 193
- TABLE 77 (CONTINUED) 194
- TABLE 78 CHEMICAL MECHANICAL POLISHING - U.S. PATENTS, 2007 194
- TABLE 78 (CONTINUED) 195
- TABLE 78 (CONTINUED) 196
- TABLE 78 (CONTINUED) 197
- TABLE 78 (CONTINUED) 198
- TABLE 78 (CONTINUED) 199
- TABLE 78 (CONTINUED) 200
- TABLE 78 (CONTINUED) 201
- TABLE 78 (CONTINUED) 202
- TABLE 78 (CONTINUED) 203
- TABLE 78 (CONTINUED) 204
- TABLE 78 (CONTINUED) 205
- TABLE 78 (CONTINUED) 206
- TABLE 78 (CONTINUED) 207
- TABLE 78 (CONTINUED) 208
- TABLE 78 (CONTINUED) 209
- TABLE 79 CHEMICAL MECHANICAL POLISHING - U.S. PATENTS, 2006 210
- TABLE 79 (CONTINUED) 211
- TABLE 79 (CONTINUED) 212
- TABLE 79 (CONTINUED) 213
- TABLE 79 (CONTINUED) 214
- TABLE 79 (CONTINUED) 215
- TABLE 79 (CONTINUED) 216
- TABLE 79 (CONTINUED) 217
- TABLE 79 (CONTINUED) 218
- TABLE 79 (CONTINUED) 219
- TABLE 79 (CONTINUED) 220
- TABLE 79 (CONTINUED) 221
- TABLE 79 (CONTINUED) 222
- TABLE 79 (CONTINUED) 223
- TABLE 79 (CONTINUED) 224
- TABLE 79 (CONTINUED) 225
- TABLE 79 (CONTINUED) 226
- TABLE 79 (CONTINUED) 227
- TABLE 79 (CONTINUED) 228
- TABLE 79 (CONTINUED) 229
- TABLE 79 (CONTINUED) 230
- TABLE 79 (CONTINUED) 231
- GENERAL TRENDS 231
- TABLE 80 CHEMICAL MECHANICAL POLISHING: GLOBAL PATENT TRENDS, 2006-2008 232
- FIGURE 45 CHEMICAL MECHANICAL POLISHING: GLOBAL PATENT TRENDS, 2006-2008
(NUMBER OF PATENTS) 232
- TRENDS BY COUNTRY AND REGION 232
- FIGURE 46 SHARES OF GLOBAL PATENTS RELATED TO CHEMICAL MECHANICAL
POLISHING BY REGION, 2006-2008 (%) 233
- FIGURE 47 CHEMICAL MECHANICAL POLISHING: PATENTS BY COUNTRY, 2006-2008 (%)
234
- FIGURE 47 (CONTINUED) 235
- TRENDS BY ASSIGNEE 235
- TABLE 81 ASSIGNEES OF U.S. PATENTS RELATED TO CHEMICAL MECHANICAL
POLISHING, 2006-2008 236
- TABLE 81 (CONTINUED) 237
- TABLE 81 (CONTINUED) 238
- TABLE 81 (CONTINUED) 239
- TABLE 81 (CONTINUED) 240
- TRENDS BY PATENT CATEGORY 240
- FIGURE 48 CHEMICAL MECHANICAL POLISHING: SHARES OF GLOBAL PATENTS BY
CATEGORY, 2006-2008 (%) 241
- TRENDS BY APPLICATION 241
- FIGURE 49 CHEMICAL MECHANICAL POLISHING: SHARES OF GLOBAL PATENTS BY
APPLICATION, 2006-2008 (%) 242
- TRENDS BY MATERIAL TYPE 243
- FIGURE 50 CHEMICAL MECHANICAL POLISHING: SHARES OF GLOBAL PATENTS BY
MATERIAL TYPE, 2006- 2008 (%) 243
- FIGURE 50 (CONTINUED) 244
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