Thin-layer Deposition: CVD, Ion Implantation & Epitaxy

Table of Contents

• SUMMARY TABLE: VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)
• SUMMARY FIGURE: GLOBAL VALUE OF THE CVD, ION IMPLANTATION, AND EPITAXY MARKETS, THROUGH 2013 ($ MILLIONS)

• THIN FILM DEPOSITION PROCESS STATUS
  • TABLE 1 STATUS OF MAJOR DEPOSITION STUDIES BY BCC RESEARCH
• DEPOSITION TECHNOLOGIES COVERED IN THIS REPORT
  • TABLE 2 KEY THIN FILM TECHNOLOGIES INCLUDED
• MAJOR APPLICATIONS
  • TABLE 3 KEY APPLICATIONS OF THIN FILM TECHNOLOGIES BY MARKET
• CLASSIFICATION OF MATERIALS
  • TABLE 4 TYPICAL MATERIALS AND THEIR APPLICATIONS

• INDUSTRY STRUCTURE
  • TABLE 5 KEY COMPANIES IN THE CVD, ION IMPLANTATION, AND EPITAXY BUSINESS
  • TABLE 5 (CONTINUED)
• THIN FILM INDUSTRY CHANGES
• TECHNOLOGY CONTINUES TO EXPAND IN CHINA
• MERGER AND ACQUISITION TREND CONTINUES
• GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING
  • TABLE 6 ESTMATED GLOBAL MANUFACTURING OFCVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT (%)
  • FIGURE 1 ESTIMATED GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURING, 2007-2013 (%)
• GLOBAL CONSUMPTION OF CVD, ION IMPLANTATION, AND EPITAXY EQUIPMENT
  • TABLE 7 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
  • FIGURE 2 GLOBAL SHARE OF CVD, ION IMPLANTATION, AND EPITAXY CONSUMPTION, 2007-2013 (%)
• MARKET SHARES
  • TABLE 8 MARKET SHARES OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY MANUFACTURERS, 2007
• COMPANY PROFILES
  • AIXTRON, AACHEN, GERMANY
  • AMEC INC., SHANGHAI, CHINA
  • APPLIED MATERIALS, INC., SANTA CLARA, CA
  • ASM INTERNATIONAL, THE NETHERLANDS
  • CVD EQUIPMENT CORPORATION, RONKOKOMA, NY
  • IBIS TECHNOLOGY CORPORATION, DANVERS, MA
  • IMPLANT SCIENCES CORPORATION, WAKEFIELD, MA.
  • NOVELLUS SYSTEMS, INC., SAN JOSE, CA
  • OERLIKON BALZERS, KOLN, GERMANY
  • OXFORD INSTRUMENTS, OXON, UNITED KINGDOM
  • RIBER COPORATION, BEZONS CEDEX, FRANCE
  • RICHTER PRECISION, INC., EAST PETERSBURG, PA
  • TOKYO ELECTRON LIMITED, TOKYO, JAPAN
  • ULVAC TECHNOLOGIES, INC., METHUEN, MASSACHUSETTS
  • VARIAN SEMICONDUCTOREQUIPMENT ASSOCIATES, GLOUCESTER, MA
  • VEECO INSTRUMENTS, INC., WOODBURY, NY

• CVD TECHNOLOGY
• BASIC THERMAL CVD
  • TABLE 9 KEY TECHNICAL ADVANTAGES OF THE CVD PROCESS
• Coating Technology
• METALLO-ORGANIC CVD
  • TABLE 10 KEY TECHNICAL ADVANTAGES OF MOCVD
• ATMOSPHERIC PRESSURE CVD
  • TABLE 11 MAJOR ADVANTAGES OF THE APCVD PROCESS
• LOW-PRESSURE CVD
• PLASMA-ENHANCED CVD
  • TABLE 12 KEY ADVANTAGES OF PLASMA-ENHANCED CVD
• HIGH-DENSITY PLASMA CVD
  • TABLE 13 MAJOR TECHNICAL ADVANTAGES OF HDP-CVD
• TEOS Ozone Chemistry
  • TABLE 14 KEY TECHNICAL ADVANTAGES OF TEOS/OZONE CHEMISTRY
• DEVELOPMENTS THAT ARE EXPANDING CVD
• CARBON NANOTUBES AND CVD
• CLUSTER TOOLS
• Definition
• Advantages
  • TABLE 15 TECHNICAL ADVANTAGES OF CLUSTER TOOLS
• ION IMPLANTATION TECHNOLOGY
  • TABLE 16 KEY TECHNICAL ADVANTAGES OF ION IMPLANTATION
• BEAMLINE ION IMPLANTATION
  • TABLE 17 KEY ADVANTAGES OF BEAMLINE IMPLANTATION
• PLASMA IMMERSION ION IMPLANTATION (PIII)
  • TABLE 18 KEY ADVANTAGES OF PIII
• ION-ASSISTED DEPOSITION
• Ion Beam-Assisted Deposition (IBAD)
  • TABLE 19 KEY TECHNICAL ADVANTAGES OF IBAD/PIIID
• EPITAXY
• MOLECULAR BEAM EPITAXY (MBE)
  • TABLE 20 MAJOR TECHNICAL ADVANTAGES OF MBE
• Metal Organic Chemical Vapor Deposition (MOCVD)
• DEVELOPMENTS THAT COULD EXPAND ION IMPLANTATION AND EPITAXY
  • TABLE 21 DEVELOPMENTS THAT COULD EXPAND THE USE OF ION IMPLANTATION AND EPITAXY
• ANALYSIS OF PATENTS FOR CVD, ION IMPLANTATION, AND EPITAXY
• PATENTS BY TECHNICAL TOPIC
  • TABLE 22 THIN FILM PRODUCT PATENTS BY TECHICAL TOPIC, 2005-2007
• PATENTS BY GLOBAL REGION
  • TABLE 23 CVD, ION IMPLANTATION, AND EPITAXY-RELATED PATENTS BY REGION, 2005-2007
• PATENTS BY ASSIGNEES
  • TABLE 24 ASSIGNEES WITH THREE OR MORE PATENTS
  • TABLE 24 (CONTINUED)
• SAMPLE PATENT ABSTRACTS
• CVD Method for Depositing a High-k Dielectric Film
• Fabricating Semiconductor Structures with Epitaxially Grown Source and Drain Structures
• Ion Implantation System with an Interlock Function
• Ion Implantation used in Silicon-in-insulator Wafer Transfer Process
• Fabricating Nitride-based Transistors with a Protective Layer and a Low Damage Recess
• Multicomponent Barrier Layers in Quantum Well Active Regions Enhance Confinement and Speed
• Multicomponent Barrier A

• INDUSTRY APPROACH
• INDUSTRY COMPETITIVENESS
• MEASUREMENT OBJECTIVES

• CVD, ION IMPLANTATION, AND EPITAXY
• MICROELECTRONICS PRODUCT DEFINITON
• TABLE 25 BASIC PRODUCTS USING CVD, ION IMPLANTATION, AND EPITAXY PRODUCTS
• CHANGING PRODUCT CHARACTERISTICS
  • TABLE 26 INTEGRATED CIRCUIT CHARACTERISTICS
• INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN MICROELECTRONICS
• ECONOMIC CONDITIONS IN MICROELETRONICS
  • TABLE 27 GLOBAL DEMAND FOR KEY MICROELECTRONIC PRODUCTS BY TYPE, THROUGH 2007 ($ BILLIONS)
• THIN FILM PRODUCT DEVELOPMENT AND STANDARDS
• SEMI
• Impact of Globalization
• Standards
  • TABLE 28 KEY ADVANTAGES OF STANDARDS
• SEMATECH
• Importance to Thin Film Equipment
• International Technology Roadmap for Semiconductors (ITRS)
• The Semiconductor Industry Association
  • TABLE 29 CHALLENGES FOR THE SIA
• GLOBAL ECONOMIC ENVIRONMENT
• Continued Chip Industry Growth Seen by Many
  • TABLE 30 ECONOMIC IMPACT ON CHIP INDUSTRY, 2008
• TECHNOLOGY ADVANCES
• CVD Metal Fill Technology
• Using Epitaxy to Extend CMOS
• MICROELECTRONICS COMPETITIVENSS FACTORS
• Driving Force for CVD, Ion Implantation, and Epitaxy
• Impact of Market Growth Factors
  • TABLE 31 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD, ION IMPLANTATION, AND EPITAXY IN THE MICROELECTRONICS INDUSTRY (%)
• SEMICONDUCTOR APPLICATIONS FOR CVD
• MICROELECTRONIC MARKET SEGMENTS
• CVD APPLICATIONS
  • TABLE 32 BASIC/EMERGING CVD SEMICONDUCTOR APPLICATIONS
• Changes in Applications with Copper
• Dielectric Processing Options
  • TABLE 33 CHANGING APPLICATIONS OF CVD FOR SEMICONDUCTORS
• Impact of Larger Wafer Sizes
• New Applications-MEMS Devices and Nanotechnology
  • TABLE 34 ADVANTAGES OF CVD IN MAKING CARBON NANOTUBES
• IMPLANTATION APPLICATIONS FOR SEMICONDUCTORS
  • TABLE 35 SEMICONDUCTOR APPLICATIONS OF ION IMPLANTATION
• Doping of Integrated Circuits
  • TABLE 36 DOPANT SPECIES USED IN CMOS IMPLANTS
• Plasma Doping
• Silicon-on-Insulator Technology
• Hydrogen Implantation and Wafer Bonding
• Oxygen Implantation (SIMOX)
• Other Semiconductor Applications
• EPITAXY APPLICATIONS FOR SEMICONDUCTORS
• MOCVD for Silicon Wafers
• MBE Applications
  • TABLE 37 COMPOUND SEMICONDUCTOR DEVICES MANUFACTURED BY MBE
• Quantum Well Lasers
• KEY MATERIALS USED IN SEMICONDUCTOR APPLICATIONS
• CVD MATERIALS
  • TABLE 38 MAJOR MATERIALS DEPOSITED BY CVD IN THE FABRICATION OF SEMICONDUCTORS
• Dielectrics
• Conductors
• ION IMPLANTATION MATERIALS
  • TABLE 39 KEY MATERIALS USED FOR ION IMPLANTATION IN SEMICONDUCTOR FABRICATION
• MBE MATERIALS
• TABLE 40 TYPICAL MATERIALS USED IN MBE OPERATIONS
• SEMICONDUCTOR MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• CMOS Business Model
• Fluctuating Growth Trends
  • TABLE 41 GLOBAL GROWTH TREND FOR SEMICONDUCTORS AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
• CVD
• ION IMPLANTATION
• MBE
• OTHER MICROELECTRONIC APPLICATIONS
• COMPONENTS
• FLAT-PANEL DISPLAYS
• LIGHT-EMITTING DIODES
  • TABLE 42 OVERVIEW OF OTHER MICROELECTRONIC APPLICATIONS FOR THIN FILM EQUIPMENT
• Market Drivers for Other Microelectronic Products
• FORECAST ASSUMPTIONS-CVD, ION IMPLANTATION, AND EPITAXY IN MICROELECTRONICS
  • TABLE 43 FORECAST ASSUMPTIONS: THIN FILM GROWTH IN THE MICROELECTRONICS INDUSTRY
  • TABLE 43 (CONTINUED)
  • TABLE 44 PROJECTED GLOBAL GROWTH TREND FOR CVD, ION IMPLANTATION, AND EPITAXY THIN FILM TECHNOLOGIES, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF CVD SHIPMENTS
  • TABLE 45 VALUE OF GLOBAL CVD EQEUIPMENT SHIPMENTS FOR THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
  • FIGURE 3 GLOBAL CVD SHIPMENTS FOR MICROELECTRONICS ($ MILLIONS)
• FORECAST-VALUE OF IMPLANTATION EQUIPMENT SHIPMENTS
  • TABLE 46 FORECAST-VALUE OF GLOBAL IMPLANTATION EQUIPMENT FOR THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 4 GLOBAL SHIPMENT VALUE OF ION IMPLANTATION EQUIPMENT FOR MICROELECTRONICS ($ MILLIONS)
• FORECAST-VALUE OF MBE EQUIPMENT SHIPMENTS
  • TABLE 47 FORECAST-GLOBAL VALUE OF MBE SHIPMENTS FOR MICROELECTRONIC APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 5 GLOBAL VALUE OF MBE EQUIPMENT FOR MICROELECTRONICS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF DEPOSITED CVD MATERIALS
• Measurement Considerations
  • TABLE 48 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
  • FIGURE 6 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF ION IMPLANTATION MATERIALS
  • TABLE 49 GLOBAL VALUE OF MATERIALS USED FOR IMPLANTATION IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ THOUSANDS)
  • FIGURE 7 GLOBAL VALUE OF MATERIALS IMPLANTED IN THE MICROELECTRONICS MARKET, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF MBE MATERIALS
  • TABLE 50 GLOBAL VALUE OF MATERIALS USED FOR MBE IN THE MICROELECTRONICS MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 8 GLOBAL VALUE OF MATERIALS CONSUMED BY MBE BY THE MICROELECTRONICS INDUSTRY, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
  • TABLE 51 VALUE OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SERVICES IN THE MICROELECTRONICS INDUSTRY, THROUGH 2013 ($ MILLIONS)
• SUMMARY
  • TABLE 52 SUMMARY OF GLOBAL CVD, ION IMPLANTATION, AND EPITAXY SHIPMENTS, MATERIALS AND SERVICES FOR MICROELECTRONICS, THROUGH 2013 ($ MILLIONS)
• Summary (Continued)

• CVD AND ION IMPLANTATION IN THE MEDICAL EQUIPMENT MARKET
• MEDICAL PRODUCT DEFINITION
  • TABLE 53 BASIC TYPES OF MEDICAL DEVICES
• INDUSTRY COMPETITIVENESS OF THIN FILM PROCESSES IN THE MEDICAL PRODUCT MARKET
• GLOBAL ECONOMICS
  • TABLE 54 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND SUPPLIES BY REGION, 2007-2013 (%)
  • TABLE 55 POSITIVE ECONOMIC FACTORS FOR THE MEDICAL DEVICE INDUSTRY
• COST ISSUES
• TECHNOLOGY
• MEDICAL MARKET COMPETITIVENESS FACTORS
• Driving Force for CVD and Ion Implantation
• Impact of Market Growth Factors
  • TABLE 56 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY (%)
• MEDICAL INDUSTRY APPLICATIONS
• CVD PROCESS
  • TABLE 57 OVERVIEW OF CVD APPLICATIONS IN THE MEDICAL INDUSTRY
• ION IMPLANTATION APPLICATIONS
  • TABLE 58 MAJOR MEDICAL APPLICATIONS OF ION IMPLANTATION IN THE MEDICAL INDUSTRY
• TYPES OF CVD AND ION IMPLANTATION EQUIPMENT USED IN MEDICAL APPLICATIONS
• MAJOR MATERIALS USED FOR MEDICAL APPPLICATIONS
• CVD MATERIALS
  • TABLE 59 KEY MATERIALS DEPOSITED BY CVD FOR MEDICAL APPLICATIONS
• ION IMPLANTATION MATERIALS
  • TABLE 60 KEY MATERIALS USE FOR ION IMPLANTATION AND IBAD IN THE MEDICAL MARKET
• MEDICAL MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 61 GLOBAL GROWTH TREND FOR MEDICAL EQUIPMENT AND THIN FILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
• CVD
• ION IMPLANTATION
• FORECAST ASSUMPTIONS-CVD AND ION IMPLANTATION IN THE MEDICAL INDUSTRY
  • TABLE 62 FORECAST ASUMPTIONS-THIN FILM GROWTH IN THE MEDICAL PRODUCTS INDUSTRY
  • TABLE 63 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION TECHNOLOGIES IN MEDICAL, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF MEDICAL CVD SHIPMENTS
  • TABLE 64 VALUE OF GLOBAL CVD SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 9 GLOBAL SHIPMENTS OF CVD EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF MEDICAL IMPLANT EQUIPMENT SHIPMENTS
  • TABLE 65 FORECAST-VALUE OF GLOBAL ION IMPLANTATION EQUIPMENT SHIPMENTS FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLONS)
  • FIGURE 10 GLOBAL VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR MEDICAL PRODUCTS, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF CVD DEPOSITED MATERIALS
• Measurement Considerations
  • TABLE 66 GLOBAL VALUE OF CVD-DEPOSITED MATERIALS IN THE MEDICAL SUPPLY INDUSTRY, THROUGH 2013 ($ MILLIONS)
• FIGURE 11 GLOBAL VALUE OF THIN FILM EQUIPMENT FOR THE MEDICAL SUPPLY BUSINESS, THROUGH 2013 ($ MILLIONS)
• FORECAST-VALUE OF IMPLANTATION MATERIALS
  • TABLE 67 GLOBAL VALUE OF MATERIALS USED FOR ION IMPLANTATION IN THE MEDICAL SUPPLY INDUSTRY ($ THOUSANDS)
  • FIGURE 12 VALUE OF MATERIALS USED FOR ION IMPLANTATION APPLICATIONS, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
• CVD Services
• Ion Implantation Services
  • TABLE 68 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE MEDICAL MARKET, THROUGH 2013 ($ MILLIONS)

• CVD IN THE CUTTING TOOL MARKET
• PRODUCT DEFINITION
  • TABLE 69 BASIC TYPES OF CUTTING TOOLS
• CUTTING TOOL INDUSTRY COMPETITIVENESS
• ECONOMIC CONDITIONS
• Economic Warnings
• INTERNATIONAL CONDITIONS
• Changing Market Shares
  • TABLE 70 GLOBAL CUTTING TOOL MARKET BY REGION, 2007-2013 (%)
• TECHNOLOGY
• CUTTING TOOL GROWTH FACTORS
• Driving Force for CVD
• Impact of Market Growth Factors
  • TABLE 71 IMPACT OF MAJOR FACTORS ON THE GROWTH OF CVD IN THE CUTTING TOOL INDUSTRY (%)
• CUTTING TOOL APPPLICATIONS
  • TABLE 72 MAJOR CVD CUTTING TOOL APPLICATIONS
• TYPES OF CVD REACTORS
• CVD versus PVD Process
• ADVANTAGES OF CVD IN CUTTING TOOL COATING
• MAJOR MATERIALS USED IN CUTTING TOOLS
• TABLE 73 KEY MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY
• CUTTING TOOL MARKET DRIVERS AND TRENDS
• CVD EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 74 GLOBAL GROWTH TREND FOR THE CUTTING TOOL INDUSTRY AND CVD EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIO)
• FORECAST ASSUMPTIONS-CVD IN CUTTING TOOLS
  • TABLE 75 FORECAST ASSUMPTIONS FOR CVD GROWTH IN CUTTING TOOLS
  • TABLE 76 PROJECTED GLOBAL GROWTH TREND OF CVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2013
• FORECAST-VALUE OF CVD CUTTING TOOL INDUSTRY SHIPMENTS
  • TABLE 77 FORECAST-VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 13 GLOBAL VALUE OF CVD EQUIPMENT FOR THE CUTTING TOOL INDUSTRY, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF DEPOSITED CVD MATERIALS
• Measurement Considerations
  • TABLE 78 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)
• FIGURE 14 GLOBAL VALUE OF MATERIALS FOR CVD IN THE CUTTING TOOL INDUSTRY ($ MILLIONS)
• FORECAST-VALUE OF CVD SERVICES
  • TABLE 79 GLOBAL VALUE OF CVD COATING SERVICES IN THE CUTTING TOOL INDUSTRY, THROUGH 2013 ($ MILLIONS)

• CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
• PRODUCT DEFINITION
  • TABLE 80 BASIC TYPES OF INDUSTRIAL PRODUCTS
• INDUSTRIAL MARKET COMPETITIVENESS
• AUTOMOTIVE MARKET
• Domestic and International Economic Conditions
  • TABLE 81 CLOSING GAP BETWEEN U.S AND ASIAN AUTOMAKERS (% OF MARKET)
• External Factors
  • TABLE 82 EXTERNAL FACTORS IMPACTING THE AUTO INDUSTRY
• Technology
• AEROSPACE MARKET
• Economic Considerations
  • TABLE 83 U.S. AEROSPACE SALES BY PRODUCT, 2001-2006 ($ BILLIONS)
• International Market
• Technology
• MARKET GROWTH FACTORS FOR INDUSTRIAL CVD AND ION IMPLANTATION
• Driving Force for CVD
• Impact of Market Growth Factors
  • TABLE 84 IMPACT OF MAJOR FACTORS ON CVD AND ION IMPLANTATION GROWTH IN THE INDUSTRIAL MARKET (%)
• INDUSTRIAL THIN FILM APPLICATIONS
• CVD PROCESS
• ION IMPLANTATION APPLICATIONS
  • TABLE 85 MAJOR APPLICATIONS FOR CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
• TYPES OF CVD AND ION IMPLANTATI0N EQUIPMENT USED IN INDUSTRIAL APPLICATIONS
• MAJOR MATERIALS USED FOR INDUSTRIAL APPLICATIONS
• CVD MATERIALS
  • TABLE 86 KEY MATERIALS DEPOSITED BY CVD FOR INDUSTRIAL APPLICATIONS
• ION IMPLANTLANTATION MATERIALS
  • TABLE 87 KEY MATERIALS USED FOR ION IMPLANTATION IN THE INDUSTRIAL MARKET
• INDUSTRIAL MARKET DRIVERS AND TRENDS
• THIN FILM EQUIPMENT DEMAND
• Fluctuating Growth Trends
  • TABLE 88 GLOBAL GROWTH TREND FOR INDUSTRIAL PRODUCTS AND THIN FIILM EQUIPMENT, THROUGH 2007 (VALUE AND PERCENTAGE RATIOS)
• CVD
• ION IMPLANTATION
• FORECAST ASSUMPTIONS-CVD AND ION IMPLANTATION IN THE INDUSTRIAL MARKET
  • TABLE 89 FORECAST ASSUMPTIONS-THIN FILM GROWTH IN THE INDUSTRIAL MARKET
  • TABLE 90 PROJECTED GLOBAL GROWTH TREND FOR CVD AND ION THIN FILM TECHNOLOGIES IN THE INDUSTRIAL SECTORS, THROUGH 2013 (VALUE AND PERCENTAGE RATIO)
• FORECAST-VALUE OF INDUSTRIAL CVD EQUIPMENT SHIPMENTS
  • TABLE 91 VALUE OF GLOBAL CVD SHIPMENTS FOR THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
  • FIGURE 15 GLOBAL VALUE OF AUTOMOTIVE CVD SYSTEMS IN THE AUTOMOTIVE MARKET, 2007-2013 ($ MILLIONS)
  • FIGURE 16 GLOBAL VALUE OF CVD SYSTEMS IN THE AEROSPACE MARKET, THROUGH 2013 ($ MILLIONS)
• FORECAST-VALUE OF INDUSTRIAL ION IMPLANTANTION EQUIPMENT SHIPMENTS
  • TABLE 92 FORECAST-VALUE OF ION IMPLANTATION EQUIPMENT SHIPPED FOR THE INDUSTRIAL SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 17 GLOBAL VALUE OF ION-RELATED EQUIPMENT IN THE AUTOMOTIVE AND AEROSPACE INDUSTRIES, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF CVD DEPOSITED MATERIALS
• Measurement Considerations
  • TABLE 93 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD IN THE INDUSTRIAL MARKETS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 18 GLOBAL VALUE OF MATERIALS DEPOSITED BY CVD FOR THE INDUSTRIAL MARKET, 2007-2013 ($ MILLIONS)
• FORECAST-VALUE OF ION IMPLANTATION MATERIALS
  • TABLE 94 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED INDUSTRIAL APPLICATIONS, THROUGH 2013 ($ THOUSANDS)
  • FIGURE 19 GLOBAL VALUE OF MATERIALS USED FOR ION-RELATED INDUSTRIAL APPLICATIONS, 2007-2013 ($ THOUSANDS)
• FORECAST-VALUE OF THIN FILM EQUIPMENT SERVICES
• CVD Services
• Ion Services
  • TABLE 95 VALUE OF GLOBAL CVD AND ION IMPLANTATION SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2013 ($ MILLIONS)
• Ion Services (Continued)