Semiconductor Material Analysis 2009: CVD Liquid Chemical

Table of Contents

Chapter 1. Chemical Mechanical Planarization

• 1. Introduction
• 2. Semiconductor Manufacturing Process
• 3. Deposition
  • 3-1. Film Deposition
  • 3-2. Deposition Application
• 4. CVD (Chemical Vapor Deposition)
  • 4-1. CVD (Chemical Vapor Deposition)
  • 4-2. LPCVD (Low Pressure CVD)
  • 4-3. PECVD (Plasma Enhanced CVD)
  • 4-4. MOCVD (Metal Organic CVD)
  • 4-5. ALD (Atomic Layer Deposition)
• 5. Dielectric Deposition
• 6. Metallization
• 7. CVD Precursor
• 8. High K Material
• 9. Low K Material

Chapter 2. Major Semiconductor Maker

• 1. Semiconductor Maker
  • 1-1. Semiconductor Maker by Region
  • 1-2. Semiconductor by Product Category
• 2. Major Semiconductor Maker (25#)
  • 2-1. Intel, Samsung, Texas Instruments, Toshiba
  • 2-2. STMicroelectronics, TSMC, Hynix, Renesas, SONY
  • 2-3. NXP, AMD, Infineon, NEC, Freescale, Micron Technology, Fujitsu
  • 2-4. IBM, Elpida Memory, Panasonic, UMC, Sharp, Spansion, Powerchip, ProMOS, Nanya

Chapter 3. Worldwide CVD Liquid Chemical Market Trend

• 1. Worldwide Market Trend: 2008~2011
  • 1-1. ILD Source: TEOS, B&P Source
  • 1-2. Precursor : Metal (Ti, Ta, Al, Cu, Ru Source)
  • 1-3. Precursor: High K (Hf, Zr, Al Source)
• 2. Market Trend by Region: 2008~2011
  • 2-1. ILD Source: TEOS, B&P Source
  • 2-2. Precursor : Metal (Ti, Ta, Al, Cu, Ru Source)
  • 2-3. Precursor: High K (Hf, Zr, Al Source)

Chapter 4. Market Trend in Korea

• 1. Fab Status
  • 1-1. Samsung: Product, Capa, Wafer Size, Input Wafer Trend, Information
  • 1-2. Hynix & Others: Product, Capa, Wafer Size, Input Wafer Trend, Information
• 2. Market Trend: ILD Source
  • 2-1. Market Trend by Line: Volume
  • 2-2. Market Trend by Line: Amount
  • 2-3. Supply Chain
• 3. Market Trend: Metal Precursor
  • 3-1. Market Trend by Line: Volume
  • 3-2. Market Trend by Line: Amount
  • 3-3. Supply Chain
• 4. Market Trend: High K Precursor
  • 4-1. Market Trend by Line: Volume
  • 4-2. Market Trend by Line: Amount
  • 4-3. Supply Chain
• 5. Market Trend: Overall
  • 5-1. SEC: TEOS, TEB, TEPO, TMA, ALPIS, TEMAZr, TEMAHf, TiCl4, TDMAT
  • 5-2. Hynix: TEOS, TEB, TEPO, TMOP, TMA, TEMAZr, TiCl4, TDMAT

Chapter 5. Market Analysis

• 1. Market Analysis: ILD Source
  • 1-1. Market Forecast
  • 1-2. Price Trend: TEOS, TEB, TEPO
  • 1-3. Industry Analysis
• 2. Market Analysis: Metal Precursor
  • 2-1. Market forecast
  • 2-2. Price Trend: TiCl4, ALPIS, TDMAT
  • 2-3. Industry Analysis
• 3. Market Analysis: High K Precursor
  • 3-1. Market forecast
  • 3-2. Price Trend: TMA, TEMAZr, TEMAHf
  • 3.3. Industry Analysis