Abstract
MEMS and wireless sensors are the two technologies whose applications are
increasing at a rapid pace. A number of new and emerging companies are
focusing on these technologies both by developing products for newer
applications and improving the technologies. Certain specific methods within
MEMS like deep-silicon reactive ion etching technology are used as the
platforms to develop newer pround it. Likewise the application spectrum in
wireless sensors spans from pharmaceuticals to power and utilities.
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