Micro-Electromechanical Systems (MEMS)

Table of Contents

I. INTRODUCTION, METHODOLOGY & PRODUCT DEFINITIONS

• Study Reliability and Reporting Limitations
• Disclaimers
• Data Interpretation & Reporting Level
• Quantitative Techniques & Analytics
• Product Definitions and Scope Of Study
• MEMS Devices
• Commercial/Industrial
• Medical/BioMedical
• Telecommunication
• Computers
• Others
• MEMS in Geophysics
• Military Applications of MEMS

II. EXECUTIVE SUMMARY

1. Global Market Overview and Analysis

• MEMS - A Promising Industry
• MEMS Technology-What is it?
• A Peek into Global MEMS Market
• Positive Forecast for Global MEMS Market
• MEMS Industry Outlook
• Growth Outshines Global Economic Prospects
• MEMS Products Gaining Momentum
• Growth Drivers
• Product Developments: Driving the Market in Top Gear
• RF - A Sunrise Opportunity
• MEMS Gaining Popularity in Consumer Electronics
• Flash Memory Market, the Ray of Hope for MEMS
• MEMS-based Hearing Aids: the Next Revolutionary Medical Application
• Production Capacity - Where it Stands?
• Entry of Investors to MEMS Market
• Major Players Enter MEMS Industry
• Issues and Problems Confronting MEMS Industry
• MEMS Commercialization - A Tough Task
• Leading Players
• Table 1: Top Ten Players in Worldwide MEMS Market (2006): Percentage Share Breakdown of Revenues by Company - Avago Technologies, Canon, Formfactor, Freescale, Hewlett Packard, Lexmark, Robert Bosch, Seiko Epson, STMicroelectronics, and Texas Instruments (in US$ Million) (includes corresponding Graph/Chart)
• Emerging Market Dynamics in Inertial MEMS Industry

2. Market Trends

• MEMS Market Witnesses Gradual Shift from Sensor to Non-Sensor Revenues
• MEMS Drives Shift from Micro to Nano
• Innovation in Full Stream in MEMS Market
• Wireless Sector Offers Lucrative Market for MEMS
• MEMS Market for Mobile Handsets Foresees Growth
• Aerospace and Defense MEMS Market Poised for Growth
• MEMS Foundries Strengthen Foothold in the Market
• Table 2: Top Ten Foundries in Worldwide MEMS Market (2006): Percentage Share Breakdown of MEMS Contract Manufacturing Revenues by Foundry - IMT, APM, Dalsa, Micralyne, Silex, Colibrys, Memscap, X-Fab, Tronic’s, and TMT (in US$ Million) (includes corresponding Graph/Chart)
• Bio-MEMS Segment - A Potential Market
• Bio-Sensors - Market Analysis
• Microphones Rise in Popularity
• RF MEMS Technology Offers Significant Growth Potential
• Miniaturization of Devices Creates Potential Markets for State-of-the-Art Applications
• Inertial MEMS Sensors Offer Growing Applications in Automotive Sector
• Telecom Companies Show Growing Interest in Optical MEMS
• Start-Ups Face Stiff Challenges in Optical MEMS Field
• Foundry and Computer-Aided Design Infrastructure to Promote Market Development
• Diving Costs to Drive Sales
• MEMS: ‘Tough’ Jobs Ahead
• 3 - Dimensional Growth
• Upwardly Mobile
• Major Churn Out
• Europe - The Research Powerhouse of the World
• Asia - Picking up the Trail

3. Product Overview

• Micro-Electromechanical Systems - An Introduction
• Special Features of MEMS
• Difference Between MEMS and MST Microsystems Technology
• Advantages of MEMS
• MEMS Devices
• Sensors and Actuators
• Accelerometers
• Inkjet Heads
• Digital Micromirror Devices
• Gyroscopes
• Microfluidic Devices
• Micro-Opto-Electro-Mechanical Systems (MOEMS)
• Pressure Sensors
• RF MEMS
• Silicon Microphone
• Current Applications of MEMS
• Future Potential Applications

4. End-Use Analysis

• Commercial/ Industrial Segment
• MEMS in Automotive Field
• Automotive Airbag Sensor
• Industrial Applications
• MEMS in Electronics/Consumer Electronics
• Select MEMS - Based Consumer Electronic Products
• Mighty Chain at Micron Scale
• Microactuators Put Colors on Display
• Overhead Projection Display
• Medical/BioMedical Segment
• Bio-Medical Products Based on MEMS Technology
• Miniature Medical Pressure Sensors
• Biochips
• DNA Chips
• Lab Chips
• Protein Chips
• ISSYS and NIST’s ATP Enhances Performance of Multi-Drug Infusion Systems
• Communications/ Optical Segment
• MEMS Improves Network Connectivity
• Optical Networking Keeps MEMS Companies on Toes
• Major Players
• Applications in Live Networks
• Dim the Light
• Next-Generation Wireless
• MEMS Relays Enabled Frequency-agile Filter
• MEMS Products for Telecommunications
• MEMS Switches Market
• MEMS Switches - Product Categories
• 2-D versus 3-D MEMS
• RF Switches
• MOMEMS (Micro-optoelectromechanical Systems)
• Computers
• Inkjet Printer Head - One of the Most Successful MEMS Applications
• "Fan-on-a Chip" for Cool Electronics
• MEMS for Memory
• Other Applications
• MEMS in Geophysics
• Military Applications of MEMS
• Advantages of MEMS
• Easy Transferability of Technology
• Development Goes Beyond Weapons
• Companies Focused on MEMS Products

5. Production Overview

• Materials Used in Micromachining

1. Substrates

2. Additive and Film Materials

• MEMS Fabrication Methods
• I. Photolithography
  • II. Bulk Micromachining
  • III. Surface Micromachining
  • Fusion Bonding
  • IV. High-Aspect-Ratio Micromachining
  • MEMS Thin Film Deposition Processes
• I. Chemical-Reaction Based Processes
  • i. Chemical Vapor Deposition (CVD)
  • ii. Electrodeposition
  • iii. Epitaxy
  • iv. Thermal Oxidation
  • II. Physical-Reaction Based Processes
  • i. Physical Vapor Deposition (PVD)
  • ii. Casting
  • Micro-Fabrication of MEMS and Semiconductors - AComparison
  • Semiconductor to MEMS Manufacturing -Shifting Viability

6. Industry Issues and Challenges

• Barriers to Infrastructure
• MEMS Packaging Issues
• MEMS Packaging Goes Hybrid
• MEMS Packaging Needs
• MEMS Testing Issues
• Stiction and MEMS Reliability
• Access to Foundries
• Design, Simulation and Modelling
• Associated Costs
• Standardization
• Lack of Standards Hinders Growth

7. Research & Development/Product Launches

• ICx Photonics Introduces Low Power SensorChip MEMS CO2 4P Gas Sensor
• InvenSense Introduces MEMS Based Nasiri-Fabrication Technology
• Knowles Acoustics Launches MEMS Based Ultrasonic Acoustic Sensor
• Matsushita Electric Introduces MEMS Microphone
• Colibrys Unveils SF2005 Seismic Sensor
• STMicroelectronics Launches LIS244AL
• Microvision Unveils New ROV ™ Scanner
• IntelliSense Unveils Latest Version of IntelliSuite v8.2 Software
• GTI Launches MEMS-focused Tool
• Analog Releases ADIS16250 Gyroscope
• Coventor Introduces SEMulator3D
• Nintendo Incorporates ADXL330 to Enhance Gaming Experience
• Source Audio and Analog Devices Unveil New Products
• Gamma Solutions Releases Intermec 700 Series
• Semtech Launches SX8722 a New Data Acquisition Device
• Freescale Semiconductor Introduces Highly Sensitive Sensors
• XACTIX and STS Unveils Oriented Xenon Difluoride Silicon Etch Systems
• Siargo Launches Low Power MEMS Fuel Cell Sensors
• Veeco Launches Automated Wyko NT3300 Optical Profiler
• JDSU Unveils Novel MEMS Optical Product
• Akustica Introduces the First CMOS MEMS Single-Chip Microphone
• Analog Devices Launches 3-Axis MEMS Accelerometer
• Boston Micromachines Introduces MEMS mirror
• GenISys Releases Layout LAB
• Apogee’s Sensilica™ Makes a Debut
• Microfabrica and MOSIS Introduce MEMS FAB Services
• Analog Devices Rolls out the New ADXL330 Accelerator
• Knowles Acoustics Launches New Range of Silicon Microphones
• Honeywell Launches New MEMS Rotational Rate Sensor
• STMicroelectronics Expands 3-Axis Acclerometer Portfolio
• Philips Develops Novel MEMS Devices
• Analog Devices Extends Portfolio of Low-g MEMS
• Intermec Introduces the Use of MEMS Nanotechnology to Supply Chain Equipment
• Knowles Launches Digital SiSonic SMD Microphones
• Omron Unveils D6F-50A5-000, D6F-20A5-000 and D6F-10A5-000
• Siemens Develops Silicon-Based MEMS Devices
• LIGHTCONNECT Launches MEMs Dynamic Channel Equalizer
• Intermec Technologies Launches EXCELerate™
• MEMSCAP Introduces TP3100 Integrated Pressure Module
• Coventor Introduces Automotive Design Tool Sets
• Coventor Releases 3D Emulation Tool
• Discera Unveils Tunable 1.6-GHz MEMS Oscillator
• High-Precision Resist Applicator from Ushio
• Anritsu Develops MEMs-based Technology for OSA Modules
• Toshiba Launches a MEMS-Based Pump for Fuel Cells
• Coventor Introduces Automotive “Design Tool Kits”
• Sandia Launches Inchworm MEMs Device
• Chromux Introduces MEMS Switches
• STMicroelectronics Wins Laurels for MEMS- based Accelerometer
• Freescale Semiconductor Releases Dual-Axis Sensors
• Coventor Launches CoventorWare™ 2004 MEMS Design Software Suite
• Analog Devices Unveils ADXL32x Line of iMEMS® Accelerometers
• MEMSCAP Rolls Out MEMSMASTER V2.2
• PHS MEMS Rolls-out Custom Integrated Passive Devices (IPD)
• Analog Devices Inc. Releases ADXL203 iMEMS® Accelerometer
• Colibrys Introduces Novel Range of MEMS Accelerometers, SMD MS 8000 Series
• MEMSCAP and DOLPHIN Enter into Partnership for Launch of High-level MEMS Language Solutions
• Coventor, Inc., Unveils CoventorWare™ 2003 MEMS Design Software
• TT612 Switch From Teravicta Technologies
• MEMS Inertial Measurement Unit
• MEMSIC, Inc. Offers Ultra Low Noise Accelerometer
• S5200 3D MEMS Optical Switch Module from Agere Systems
• OMM Unveils Two New Optical Switches
• Solus Unwraps TFM Tunable Filters
• LightConnect, Inc. the Harbinger for MEMS-based Dynamic Channel Equalizer
• MEMS Foundry Services from Olympus Optical Company Ltd.
• Microlab Launches the Industry-First RF MEMS Latch Switch
• Multiple Wavelength MEMS Switch from JDUniphase
• MEMSCAP Launches MEMS-based Microwave Filters.
• Use of MEMS Technology for Squeezing-in Data in Hard Disk Drives
• MEMS Technology Used for Sensor Nodes
• Ion Optics and Jet Propulsion Laboratory Designs MOEMS
• LIGHTCONNECT Unveils MEMS-Based Optical Attenuator
• MEMSCAP Offers MEMS Pro V3
• STMicroelectronics Launches High-Performance MEMS-based Rotational Accelerometer
• MEMSCAP Develops RF-MEMS Device Library
• Thin-Film Micromirror Array Displays from Daewoo Electronics
• Ziptronix Develops New Process for Encapsulation of MEMS
• New Compliant MEMS Technology for MEMS Devices
• New Materials in Demand for Integrated-Circuit-Like Processing
• MEMS Motion Analyzer System - A Necessity in MEMS Development Labs

8. Recent Industry Activity

• Tegal Receives Order for Endeavor AT™ PVD Tool
• FDA Approves Cepheid' s MEMS-based Test for Meningitis
• MEMSIC Establishes R&D Institute for MEMS in China
• SAES® and STMicroelectronics to Co-Develop New Gyroscopes
• STMicroelectronics Ties-Up with IBM for Developing New Technology
• Micralyne Commences Facility Expansion
• Micralyne Ties-Up with Polychromix to Develop MEMS-NIR Products
• LSI Divests LIS Mobility Products Group
• LSI Logic Merges with Agere Systems
• Memscap Receives Purchase Order for Delivering Consumer Products
• Innovative Micro Commences Getter Deposition Services
• mPhase Technologies Establishes AlwaysReady Inc
• Boston Micromachines Bags Contract from UCO/Lick Observatory
• Semefab Offers UK’s First MNT Open Access Facility
• Sumitomo Precision Products Acquires Primaxx
• Wolfson Microelectronics Acquires Oligon
• DARPA Inks Contract with Georgia Tech
• PARC Collaborates with Uni-Pixel
• Memscap Launches the New ' Biomedical Sensors' Project
• Alcatel Receives Repeat Order for Sensors Tool
• pSivida Enters into Partnership for Transdermal Drug-Delivery Systems
• LSI Logic Takes Over Metta Technology
• Coventor Partners with iSLI for MEMS Development
• Surface Technology Bags Order for VPX Pegasus System
• SiTime Enters into Partnership Agreement with Jazz Semiconductor
• NeoPhotonics Acquires OpTun and LightConnect
• LioniX Inks an Agreement with MEMS TC
• MEMSIC Establishes Offices in Asia
• MEMSIC Inaugurates Design Center in Chicago
• Coventor Enters into Partnership with CMC Microsystem
• XCOM Selects Innovative Micro for RF Relay Die
• STMicroelectronics Opens New Wafer Production Facility for MEMS Devices
• SRI International Collaborates with United States-Mexico Foundation for Science
• Coventor Enters into an Alliance with MEMS Exchange
• Xerox Collaborates with DALSA for MEMS Technology
• Innovative Micro Establishes ‘Silicon Biosensor Division’
• Innovative Micro Partners with MEMtronics
• WiSpry Enters into Partnership with Jazz Semiconductor
• Apogee Joins Hands with UMDNJ Laboratory for Research on Medical Device
• Measurement Specialties Acquires HL Planartechnik
• Silex Starts New Sales Office for North American Operations
• Measurement Specialties Takes Over MWS Sensorik
• Schneider Electric Acquires BEI Technologies
• ISSYS Receives Phase I SBIT Contract from the US Army
• Colibrys Bags BAE’s MEMS Solutions Order
• SolidWorks Collaborates with Microfabrica and MOSIS
• TRONIC’S Microsystems Opens Office in North America
• MIG Receives Phase II MEMS CAT Project from DARPA
• Eyelit Receives VISUAL*eyes™ MES Software Deal from VTI Technologies
• Apogee Technology Reiterates Focus on MEMS
• Colibrys Acquires I/O’s Applied MEMS Business
• MEMS USA Acquires Bott Equipment and Gulfgate Equipment
• MEMSCAP Acquires Optogone
• Apogee Acquires MEMs Technology
• MEMs USA, Nevada to Acquire MEMs USA, California
• French Groups to Merge with RF MEMS Laboratories
• Bookham Collaborates with Colibrys
• Coventor Partners with Kyocera
• Coventor Partners with MEM Research
• IMT Bags MEMtronics Development and Manufacturing Contract
• MEMSCAP Bags Contract from SEDAT
• MEMSCAP Wins Contract from GLIMMERGLASS
• MEMSCAP Bags Contract from KNOWLES
• MEMSCAP Wins Design In for Cockpit Instruments
• Analog Devices Signs Contract with InFocus® Corporation
• Lucent Bags Contract from DARPA
• Analog Devices Signs Contract with Toshiba
• Coventor and DALSA Semiconductor Sign Licensing Deal
• Semefab to Establish Production Facility in Scotland
• Nanomech Technology Integrates MEMs Technology
• PHS MEMS Closes MEMS Operations
• MEMSCAP Acquires Opsitech
• MEMSCAP Takes Over GalayOr
• Coventor Inc Inks a Multi-year Pact with Cadence Design Systems, Inc.
• BAE Systems Enters into Partnership
• Silicon Microstructures Expands MEMS Fab
• MEMSCAP Acquires Cronos MEMS Business Unit of JDS Uniphase Corp
• IMT Partners with L-3 Communications for MEMS Defense Products
• Colibrys and Coventor Sign Pact
• Coventor Enters into Manufacturing Partnership with SensFab
• Micralyne, Inc. Signs Contract with Kavlico Corporation
• MEMSCAP S.A Enters into Agreement with Jazz Semiconductor
• Umachines Enters into Licensing Agreement with Sanmina-SCI
• Network Photonics Enters into Supply Agreement with Fairchild
• Applied MEMS Enters into Joint Agreement with Kistler
• MegaSense, Inc. Sets-up New MEMS Wafer Producing Plant
• LightConnect Enters into Multiple Distribution Agreements
• Generics Group Forms Strategic Alliances with Microsystems Companies
• MEMSCAP SA Acquires Capto
• Lion Photonix Enters into Agreement with OnStream MST
• MEMSCAP Signs Agreement with BL Marketing Services
• Coventor, Inc. Enters into Strategic Alliance with BTG
• Applied MEMS Inc. Forms Manufacturing Partnership with Coventor Inc.
• Sandia National Laboratories Form Partnership with Ardesta
• MEMSCAP Collaborates with Cadence Design Systems
• Zyvex Forms Collaborative Partnership with Standard MEMS
• LightPointe Enters into Strategic Alliance with Texas Instruments
• Microvision Inc. Enters into Agreement with Walsin Lihwa Corporation
• IntelliSense Signs Manufacturing Agreement with Advion BioSciences
• Standard MEMS Signs Exclusive Agreement with Telephonics
• Motorola Brings Leading Aerospace Technology to the Automobile
• Walsin Lihwa Corporation Inks Pact with MEMSCAP
• BFGoodrich Signs Production Agreement with Movaz Networks
• Analog Devices and Tellium Ink Pact
• Coventor Teams Up with Sandia National Labs
• PHS MEMS Sets Up New US Subsidiary
• IntelliSense Enters into Partnership with MM Solutions
• MEMSCAP Enters Into Partnership with La Licorne
• Standard MEMS and ZiaSense Partner for New Product Development
• Corning Partners with Intellisense
• MEMSCAP, Inc. Enters into Agreement with ADC
• Analog Devices Enters into Agreement with Onix Microsystems
• MEMSCAP, Inc Enters into Agreement with ANSYS
• Coventor Teams With Cronos Integrated Microsystems
• Standard MEMS Forms BioMEMS Business Group
• Standard MEMS, Inc. Starts Joint Venture with Philips Semiconductors

9. Focus on Select Global Players

• Agere Systems Inc. (US)
• Analog Devices Inc. (US)
• Apogee Technology Inc. (US)
• BlueBird Optical MEMS Ltd. (Israel)
• Colibrys (Switzerland) Ltd (Switzerland)
• Coventor Inc. (US)
• Dalsa Semiconductor (Canada)
• Fairchild Semiconductor Corporation (US)
• IMT (Innovative Micro Technology) Inc (US)
• IntelliSense Software Corporation (US)
• Jazz Semiconductor (US)
• Kavlico Corporation (US)
• Kistler Instrument Corp. (US)
• LSI Corporation (US)
• LioniX BV (The Netherlands)
• MEMSCAP S.A. (France)
• Motorola Inc (US)
• Memsic Inc. (US)
• Micralyne Inc. (Canada)
• NeoPhotonics Corporation (US)
• Optiviva Inc (China)
• SensFab Pte Ltd (Singapore)
• Silicon Microstructures, Inc. (US)
• STMicroelectronics (Switzerland)
• Texas Instruments Inc (US)
• Umachines, Inc (US)

10. Global Market Perspective

• Table 3: World Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includescorresponding Graph/Chart)
• Table 4: World Long-term Projections for MEMS Devices by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 5: World 10-Year Perspective for Micro-Electromechanical Systems by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan) Latin America and Rest of World Markets for Years 2001,2007 & 2010 (includes corresponding Graph/Chart)
• Table 6: World Recent Past, Current & Future Analysis for MEMS in Commercial/Industrial Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific(excluding Japan), Latin America and Rest of WorldMarkets Independently Analyzed with Annual Salesin US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 7: World Long-term Projections for MEMS Devices in Commercial/Industrial Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 8: World 10-Year Perspective for MEMS in Commercial / Industrial Applications by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America andRest of World Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
• Table 9: World Recent Past, Current & Future Analysis for MEMS in Medical/BioMedical Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific(excluding Japan), Latin America and Rest of WorldMarkets Independently Analyzed with Annual Salesin US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 10: World Long-term Projections for MEMS Devices in Medical/BioMedical Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 11: World 10-Year Perspective for MEMS in Medical / BioMedical Applications by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America andRest of World Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
• Table 12: World Recent Past, Current & Future Analysis for MEMS in Telecommunications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 13: World Long-term Projections for MEMS Devices in Telecommunications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 14: World 10-Year Perspective for MEMS in Telecommunications by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
• Table 15: World Recent Past, Current & Future Analysis for MEMS in Computers by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 16: World Long-term Projections for MEMS Devices in Computers by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 17: World 10-Year Perspective for MEMS in Computers by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
• Table 18: World Recent Past, Current & Future Analysis for MEMS in Other Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million forYears 2001 through 2010 (includes corresponding Graph/Chart)
• Table 19: World Long-term Projections for MEMS Devices in Other# Applications by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 20: World 10-Year Perspective for MEMS in Other Applications by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), Latin America and Rest of World Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
• Table 21: World Current & Future Analysis for MEMS Devices by Category - Accelerometers, Gyroscopes, Inkjet heads, Microfluidics, MOEMS (Incl. DMDs), Pressure sensors, and Other* Markets Independently Analyzed with Annual Sales in US$ Million for Years 2005 through 2012 (includes corresponding Graph/Chart)
• Table 22: World 8-Year Perspective for MEMS Devices by Category - Percentage Breakdown of Dollar Sales for Accelerometers, Gyroscopes, Inkjet heads, Microfluidics, MOEMS (Incl. DMDs), Pressure sensors, and Other* Markets for Years 2005, 2007 & 2012 (includes corresponding Graph/Chart)

III. MARKET

1. The United States

• A. Market Analysis
  • MEMS Market - Brief Overview
  • Shaken by Under Investment in the Tech Sector
  • Resurging Corporate Profits Boost SectorConfidence
  • Production Trends
  • US Sensor Market to Post Sturdy Gains
  • Product Innovations/Introductions
  • Product Innovations/Introductions in Recent Past
  • Recent Industry Activity
  • Strategic Corporate Developments in Recent Past
  • Focus on Select Players
• B. Market Analytics
  • Table 23: US Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 24: US Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 25: US 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

2. Canada

• A. Market Analysis
  • Recent Industry Activity
  • Focus on Select Players
• B. Market Analytics
  • Table 26: Canadian Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-UseSegment - Commercial/Industrial, Medical/ BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales inUS$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 27: Canadian Long-term Projections for MEMS Devices by End-Use Segment - Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 28: Canadian 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

3. Japan

• A. Market Analysis
  • Market Overview
  • MEMS Suppliers Eying Consumer ElectronicsSector
  • Development of MEMS in Japan
  • Product Innovations/Introductions
• B. Market Analytics
  • Table 29: Japanese Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 30: Japanese Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 31: Japanese 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4. Europe

• A. Market Analysis
  • Europe - The Research Powerhouse of the World
  • Leading Developers, Fabs and ContractManufacturers of MEMS in Europe
  • Product Developments
• B. Market Analytics
  • Table 32: European Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by Geographic Region - France, Germany, Italy, UK, Spain, Russia,and Rest of Europe Markets Independently Analyzedwith Annual Sales in US$ Million for Years 2001through 2010 (includes corresponding Graph/Chart)
  • Table 33: European Long-term Projections for MEMS Devices by Geographic Region - France, Germany, Italy, UK, Spain, Russia, and Rest of Europe Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 34: European Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 35: European Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 36: European 10-Year Perspective for Micro- Electromechanical Systems by Geographic Region - Percentage Breakdown of Dollar Sales for France, Germany, Italy, UK, Spain, Russia, and Rest of Europe Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)
  • Table 37: European 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4a. France

• A. Market Analysis
  • Effort of National Organization in MEMSIndustry ADEMIS
  • Product Introductions
  • Product Introductions in Recent Past
  • Recent Industry Activity
  • Strategic Corporate Developments in Recent Past
  • MEMSCAP S.A. - A Key Player
• B. Market Analytics
  • Table 38: French Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/ BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 39: French Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 40: French 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4b. Germany

• A. Market Analysis
  • Effort of National Organization in MEMS Industry
  • IVAM NRW e.V.
  • Product Development
  • Strategic Corporate Development in Recent Past
• B. Market Analytics
  • Table 41: German Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Salesin US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 42: German Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 43: German 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4c. Italy

• Market Analysis
• Table 44: Italian Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 45: Italian Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 46: Italian 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4d. United Kingdom

• A. Market Analysis
  • Initiatives of National Organization for MEMSDevelopment
  • MMA
  • Recent Industry Activity
  • Strategic Corporate Developments in Recent Past
• B. Market Analytics
  • Table 47: UK Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 48: UK Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 49: UK 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4e. Spain

• Market Analysis
• Table 50: Spanish Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-UseSegment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales inUS$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 51: Spanish Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 52: Spanish 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4f. Russia

• Market Analysis
• Table 53: Russian Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/ BioMedical, Telecomm- unication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
• Table 54: Russian Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
• Table 55: Russian 10-Year Perspective for Micro-Electro mechanical Systems by End-Use Segment -Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

4g. Rest of Europe

• A. Market Analysis
  • Product Innovation
  • Product Introduction in Recent Past
  • Recent Industry Activity
  • Strategic Corporate Developments in Recent Past
  • Focus on Key Players
• B. Market Analytics
  • Table 56: Rest of Europe Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 57: Rest of Europe Long-term Projections for MEMS Devices by End-Use Segment - Commercial / Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 58: Rest of Europe 10-Year Perspective forMicro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

5. Asia-Pacific

• A. Market Analysis
  • Market Overview
  • Asia - Picking up the Trail
  • Asian Market Gains Impetus
  • The Chinese MEMS Market
  • The Indian MEMS Market
  • Modest Prospects with Promising Applications
  • Strategic Corporate
  • Strategic Corporate Developments in Recent Past
  • Key Players
• B. Market Analytics
  • Table 59: Asia-Pacific Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales inUS$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 60: Asia-Pacific Long-term Projections for MEMS Devices by End-Use Segment - Commercial/Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 61: Asia-Pacific 10-Year Perspective for Micro- Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

6. Latin America

• A. Market Analysis
  • Brazilian MEMS Market
  • Product Introduction
• B. Market Analytics
  • Table 62: Latin American Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes corresponding Graph/Chart)
  • Table 63: Latin American Long-term Projections for MEMS Devices by End-Use Segment - Commercial / Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 64: Latin American 10-Year Perspective for Micro-Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

7. Rest of World

• A. Market Analysis
  • BlueBird Optical MEMS (Israel) - A Key RegionalPlayer
• B. Market Analytics
  • Table 65: Rest of World Recent Past, Current & Future Analysis for Micro-Electromechanical Systems by End-Use Segment - Commercial/Industrial, Medical / BioMedical, Telecommunication, Computers, and Other Markets Independently Analyzed with Annual Sales in US$ Million for Years 2001 through 2010 (includes correspondingGraph/Chart)
  • Table 66: Rest of World Long-term Projections for MEMS Devices by End-Use Segment - Commercial / Industrial, Medical/BioMedical, Telecommunication, Computers, and Other# Markets Independently Analyzed with Annual Sales in US$ Million for Years 2011 through 2015 (includes corresponding Graph/Chart)
  • Table 67: Rest of World 10-Year Perspective for Micro-Electromechanical Systems by End-Use Segment - Percentage Breakdown of Dollar Sales for Commercial/ Industrial, Medical/BioMedical, Telecommunication, Computers, and Other Markets for Years 2001, 2007 & 2010 (includes corresponding Graph/Chart)

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