Abstract
Each new generation of IC devices brings about a corresponding decrease in
linewidths and minimum feature sizes. The technological trends and innovations
in IC fabrication processes directly influences the market for
microlithography equipment. This market is the most competitive of all
front-end semiconductor equipment markets, due to the high price of the
equipment and the potential for high profit.
Optical methods of wafer imaging have remained the dominant force in the IC
industry, despite claims made by E-beam, X-ray, and focused ion beam equipment
manufacturers that even higher resolution is needed for VLSI devices. Two of
the main reasons for the continual acceptance of this technology have been
system maturity and the development of more effective exposure ultraviolet
radiation. The current advances in optical system will eventually reach their
limits, resulting in competitive marketing and technology strategies by X-ray
vendors for a share of the microlithography market.
American, Japanese, and European suppliers are reviewed in this report, and
the market growth is established to 2009 for step-and-scan projection aligners
and step-and-repeat aligners. This report also examines and projects the
technologies involved, their likely developments, what problems and choices
are facing users, and where the opportunities and pitfalls are.
Current advances in optical systems could reach their limitation for 4 Gbit
devices, but will continue to be a driving force. X-ray technology is being
positioned to step in. However, Sematech' s endorsement of EUV will push this
technology to the forefront. Advances in optics, phase shift masks, and
photoresists are fueling optical lithography and will further complicate the
future marketplace.
The primary objective of this report is to review the current issues dealing
with lithography as applied to the manufacture of VLSI devices.
Topics specifically covered include:
- Technology trends
- Products
- Applications
- Suppliers
- Markets
- Opportunities and strategies
This report examines and projects the technologies involved, their likely
developments, what problems and choices are facing users, and where the
opportunities and pitfalls are. The worldwide markets are analyzed and
projected.
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