Abstract
Introduction
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical
elements, sensors, actuators, and electronics on a common silicon substrate
through microfabrication technology. MEMS technology allows development of
smart products, augmenting the computational ability of microelectronics with
the perception and control capabilities of microsensors and microactuators.
MEMS devices can sense and control, making them valuable for numerous
applications that include ink jet printers, automotive motion sensors, digital
projectors etc. MEMS technology is used in different medical devices. Various
segments of the healthcare industry, like Patient monitoring, biological tests
& DNA sequencing, detection of specific ions and molecules, are steadily
adopting MEMS devices. MEMS devices can perform many actions that have
significance for the medical and biological fields. These actions include
sensing blood pressure, motion detection, pump and control fluids and can
measure forces. Further, miniature implantable medical devices such as
biosensors and pacemakers are also using MEMS technology. MEMS devices have a
great market in medicine, surgery, and biomedical appliances.
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