RF MEMS--A Technology Analysis

1. Table of Contents

2. Executive Summary

1. Executive Summary
   1. Executive Summary
   2. Challenges and Outlook
2. Scope and Methodology
   1. Scope
   2. Methodology

3. RF MEMS: Revolution is in the Air in Communications

1. Technology and Potential Analysis: A Warm-Up
   1. RF MEMS: A Birds Eye View
   2. MEMS Applicability to RF and System Solutions
   3. Packaging in RF MEMS Devices
   4. Design Challenges Exist For RF MEMS
2. Application Potential Analysis
   1. Application Potential of RF MEMS
   2. Wireless and Mobile Phones in RF MEMS Development
   3. Pertinent Points for Wireless RF MEMS
   4. RF MEMS Switch Applications in Communications
   5. Other Application Markets for RF MEMS
3. Industry and Funding Activity in RF MEMS
   1. RF MEMS Industry Activity
   2. Specific Funding and Industry Developments

4. Technology Accelerators and Challenges

1. Adoption Accelerators and Restraints
   1. Adoption Accelerators
   2. Technology Roadblocks
2. Challenges
   1. Technical Challenges
   2. Commercial Challenges

5. The Innovation Frontier: RF MEMS Developments in North America

1. Research in Universities
   1. MEMS Microrelay for RF Applications
   2. RF MEMS Tunable Filter
   3. RF MEMS Switches Based on FPC Technology
   4. Biological and Chemical Agent Detection
   5. Low-Loss RF MEMS Filtering
   6. RF MEMS Resonator Modelling
   7. RF MEMS Packaging Innovation
2. Research in Company Laboratories
   1. Low-Loss RF MEMS Filters
   2. RF MEMS Switches for Cellphone Applications
   3. Hermetic Silicon Packaging Scheme for RF MEMS Switches
   4. Motorola Sensor Improves Tire Safety
   5. Microfabrica Introduces RF MEMS Production Platform

6. The Innovation Frontier: RF MEMS Developments in Asia and Europe

1. Research in Universities
   1. CMOS-Compatible RF MEMS Switch
   2. Material Properties in RF MEMS Device Integration
   3. A New Method to Measure Dynamics And Power Handling Of RF MEMS Devices
   4. RF MEMS Switches in Wireless Communication Products
   5. Micromechanical Resonators for RF MEMS
   6. Silicon Nitride in RF MEMS Devices
2. Research in Company Laboratories
   1. Opportunities For SOI In MEMS Applications
   2. PZT Shunt for RF MEMS Switches
   3. X-Band Capacitive Switch for RF MEMS Applications
   4. An Inexpensive Membrane RF MEMS Switch

7. Patents and Contact Details

1. Patent Details
   1. North American Patents
   2. Asian and European Patents
2. Published Applications and Research Contact Details
   1. Published Patent Applications (worldwide)
   2. Research Contacts