Global MEMS/Microsystems Markets and Opportunities 2008

Table of Contents

EXECUTIVE SUMMARY 1

• Application Trends 2
• Major Recent Application Developments 3

1. INTRODUCTION 3

2. MEMS MARKET OVERVIEW 4

• 2.1 MEMS Demand to Accelerate, Average 17% Growth 2007 - 2012 4
• 2.2 Growth Comes from Consumer Applications 4
• 2.3 Consumer Markets Drive Growth at Top 30 MEMS Manufacturers 6

3. OVERVIEW OF MEMS PROCESS TECHNOLOGIES 7

4. MEMS APPLICATIONS: TRENDS AND OPPORTUNITIES 7

• 4.1 Ink Jet Heads 7
• 4.2 Pressure Sensors 8
• 4.3 Silicon Microphones 9
• 4.4 Accelerometers 10
• 4.5 Gyroscopes 12
• 4.6 MOEMS, Micro Bolometers and Micro Displays 13
• 4.7 Microfluidics 15
• 4.8 RF MEMS Devices: Filters, Switches and Oscillators 17
• 4.9 Micro Tips 19
• 4.10 Emerging MEMS 19

5. EQUIPMENT AND MATERIALS FOR MEMS:TRENDS AND OPPORTUNITIES 20

• 5.1 Overview 20
• 5.2 Etching 21
• 5.3 Deposition 23
• 5.4 Lithography 23
• 5.5 Wafer Bonding 25
• 5.6 Wafer Cleaning 26
• 5.7 Wafer Thinning and Planarization 27
• 5.8 Metrology 30
• 5.9 Packaging 30
• 5.10 Test 30
• 5.11 Materials 30

6. APPENDICES 33

List of Figures

• Figure A MEMS Market Annual Growth (US$ Millions) 1
• Figure B The MEMS Supply Chain 2
• Figure C MEMS Equipment to Average 17% Growth Driven by New Applications (US$ Millions) 2
• Figure D MEMS Materials Forecast (US$ Millions) 3
• Figure 2.1 MEMS Units Forecast (Million Units) 5
• Figure 2.2 MEMS Market Forecast by Application 6
• Figure 2.3 Top 30 MEMS Manufacturers by 2007 Revenue 6
• Figure 3.1 Bulk Micromachining Makes Thick Structures 7
• Figure 3.2 Sacrificial Etching Makes Thinner Structures 7
• Figure 4.1 Ink Jet Heads (US$ Millions) 7
• Figure 4.2 MEMS Inkjet Print Head - Market and Volumes 2007 - 2012 8
• Figure 4.3 Inkjet Printhead Market Share - 2007 8
• Figure 4.4 TPMS Market (US$ Millions) 9
• Figure 4.5 Pressure Sensor Market Share 9
• Figure 4.6 Schematic of Single Axis Gyroscope Structure 12
• Figure 4.7 Commercial Micro Bolometer Applications 14
• Figure 4.8 Wafer Level Packaging 15
• Figure 4.9 Market Size Impacted by WLP (US$ Millions) 15
• Figure 5.1 MEMS Equipment Sales Forecast 21
• Figure 5.2 Release Etching Process Market Share Overview 21
• Figure 5.3 Dual Side Stepper: CD and Overlay Requirements Roadmap 24
• Figure 5.4 Wafer Bonding: Bonding Technology vs. Applications 25
• Figure 5.5 Wafer Bonding:Technology Types 27
• Figure 5.6 Wafer Cleaning in MEMS 28
• Figure 5.7 Global CMP Market Share (2.9 Billion US$) 29
• Figure 5.8 Ball Bonder Market Share (574 Million US$) 30
• Figure 5.9 Si Wafers Unit Forecast for MEMS (6-Inch Equivalent) 31
• Figure 5.10 MEMS Si Wafers Market Forecast 31
• Figure 5.11 SOI Wafers Unit Forecast for MEMS (6-Inch Equivalent) 31
• Figure 5.12 MEMS SOI Wafers Market Forecast 32
• Figure 5.13 Glass Wafers Unit Forecast for WLC MEMS 32
• Figure 5.14 WLC MEMS Glass Wafers Market Forecast 32
• Figure 5.15 MEMS Photomask Market Forecast 32
• Figure 5.16 MEMS Chemicals Market Forecast 32

List of Tables

• Table 2.1 Market Value (US$ Millions) CAGR Ranking 5
• Table 2.2 Market Value (US$ Millions) CAGR Ranking 5
• Table 2.3 MEMS Market Value (Units in US$ Million) 5
• Table 4.1 IJ Heads Market (US$ Millions) 8
• Table 4.2 Pressure Sensors Market (US$ Millions) 9
• Table 4.3 Microphones Market (US$ Millions) 10
• Table 4.4 Accelerometers Market (US$ Millions) 10
• Table 4.5 Gyroscopes Market (US$ Millions) 12
• Table 4.6 Micro Displays Market (US$ Millions) 14
• Table 4.7 Micro Bolometers Market (US$ Millions) 14
• Table 4.8 MOEMS Market (US$ Millions) 14
• Table 4.9 Microfluidics Market (US$ Millions) 15
• Table 4.10 Microfluidics Supply Chain 16
• Table 4.11 Microfluidic Industrial Supply Chain 6 Different Business Models 16
• Table 4.12 Microfluidic Manufacturing Technologies 17
• Table 4.13 RF MEMS Market (US$ Millions) 17
• Table 4.14 RF MEMS Switch Application Roadmap 18
• Table 4.15 Micro Tips Market (US$ Millions) 19
• Table 4.16 Emerging MEMS Market (US$ Millions) 19
• Table 5.1 MEMS Equipment Market Forecast (US$ Millions) 20
• Table 5.2 Market Demand for Specialized Etching Leads (US$ Thousands) 21
• Table 5.3 Wafer Bonding Market Share 26
• Table 5.4 Wafer Thinning: Process Comparison 28
• Table 5.5 CMP Requirements for MEMS 29
• Table 5.6 MEMS Materials Market Forecast (US$ Millions) 31
• Table 5.7 6-Inch SOI Market (US$ Millions) 31