World MEMS Equipment & Materials Market 2009

Table of Contents

Executive summary p.3

MEMS markets p.12

• In MUS$
• In Munits
• Per devices
• Per applications

MEMS manufacturing infrastructure development p.18

• Top 30 MEMS manufacturers
• Top 20 MEMS foundries
• 8" MEMS projects status

Analysis of the most buoyant MEMS devices today: MEMS for cell phones, RF switches, energy harvesting & mirrors p.30

MEMS equipment & materials markets forecasts 2008-2012 p.74

• Market forecasts per type of tools
• MEMS wafers shipments
• 6" vs. 8" wafers shipments
• Chemicals for MEMS market forecasts

Emerging trends in MEMS manufacturing: trends, players and markets p.81

• Integrated sensor market/technical trend of MEMS & IC
• DRIE
• Sacrificial Etching
• Deposition & Cleaning
• Bonding
• Lithography
• MEMS on IC
• Standards
• Through Si Vias
• Testing CAD Tools

MEMS materials market p.231

• Si wafers
• SOI wafers
• Photomasks
• Chemicals

Conclusions p.245