Global Markets for Lithographic Chemicals

TABLE OF CONTENTS

INTRODUCTION

• STUDY BACKGROUND
• STUDY GOALS AND OBJECTIVES
• INTENDED AUDIENCE
• SCOPE AND FORMAT
• METHODOLOGY AND INFORMATION SOURCES
• ANALYST CREDENTIALS
• RELATED BCC, INC. RESEARCH
• BCC ON-LINE SERVICES
• DISCLAIMER

EXECUTIVE SUMMARY

• Summary Table:
  GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, THROUGH 2009 ($ MILLIONS)
• Summary Figure:
  GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, 2003-2009 ($ MILLIONS)

LITHOGRAPHIC CHEMICALS OVERVIEW

• THE LITHOGRAPHIC PROCESS
  • DEFINITION OF LITHOGRAPHY
  • GENERAL DESCRIPTION OF LITHOGRAPHY PROCESS
    • Optical Lithography
• Figure 1 ELEMENTS OF AN OPTICAL LITHOGRAPHY SYSTEM
  • Emerging Lithographic Technologies
• Table 1 ITRS TECHNOLOGY NODES MINIMUM LINE WIDTH PER YEAR, 1995-2018 (NM)
• Table 2 PRINCIPAL MICROLITHOGRAPHY TECHNOLOGIES
• Table 2 (CONTINUED)
  • APPLICATIONS
• Figure 2 SEMICONDUCTOR VS. OTHER APPLICATIONS SHARE OF TOTAL MARKET FOR MICROLITHOGRAPHIC CHEMICALS, 2003 AND 2009 (%)
  • Integrated Circuits
• Figure 3 MILESTONES IN NUMBER OF TRANSISTORS PER CHIP, 1971-2003
  • Photomasks
• Figure 4 PHOTOMASK BLANK
• Figure 5 FINISHED PHOTOMASK
  • Printed Circuit Boards
  • Hard Disk Drive Read/Write Heads
  • Micro-Electromechanical Systems
  • Flat Panel Displays
  • Image Sensors
  • LITHOGRAPHIC CHEMICALS
    • RESISTS
      • Description
      • Trends in Resist Technology
        • Optical Photoresists
          • Photomask Resists
• Figure 6 PHOTORESIST PRINCIPLES
  • Maskless (Laser Direct Imaging) Resists
  • Color Resists
  • Next-Generation Resists
    • Extreme Ultraviolet Resists
    • X-Ray Resists
    • Electron Beam Resists
    • Ion Beam Resists
    • Nano-Imprint Resists
    • Step and Flash Imprint Lithograph Resists
    • Micro-Contact Lithography Resists
  • Thick Film Resists
  • Resist Types and Applications
• Table 3 RESIST TYPES AND APPLICATIONS
  • Thin Film vs. Thick Film Resists
  • Thin Film Resists
    • Ultraviolet Resists
    • PCB Fabrication
    • Semiconductors and Other Microelectronic Devices
    • Deep Ultraviolet Resists
    • NGL Resists
    • Color Resists
  • Thick Film Resists
  • Patent Analysis
    • Patents Issued
• Table 4 RESIST PATENTS
• Table 4 (CONTINUED)
  • Patent Holders
• Figure 7 RESIST PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
• Figure 8 RESIST PATENT HOLDERS BY REGION, 1975 THROUGH LATE 2004 (%)
  • Resist Technologies
• Figure 9 RESIST PATENTS BY TYPE OF RESIST TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
  • Patent Applications
• Table 5 PHOTORESIST PATENT APPLICATIONS
• Figure 10 RESIST PATENT APPLICATIONS BY TYPE OF RESIST, 1975 THROUGH LATE 2004 (%)
  • Manufacturers
• Table 6 RESIST MANUFACTURERS
  • DOPANTS
    • Description
    • Trends in Doping Technology
      • Diffusion Doping
• Figure 11 DIFFUSION PROCESS (DIFFUSION FURNACE ¾ ~1,000°C)
  • Ion Implantation
• Figure 12 DOPING BY ION IMPLANTATION PROCESS
  • Dopant Types and Applications
    • Arsine
    • Diborane
    • Phosphine
    • Other Types of Dopants
  • Patent Analysis
• Table 7 DOPING PRECURSOR PATENTS
• Table 7 (CONTINUED)
• Table 8 PHOTORESIST PATENT APPLICATIONS
• Table 8 (CONTINUED)
  • Manufacturers
• Table 9 DOPANT GAS MANUFACTURERS
  • ETCHANTS
    • Description
    • Trends in Etching Technology
• Figure 13 ISOTROPIC VS. ANISOTROPIC ETCHING
  • Plasma Etching
  • Sputtering (Ion Milling)
  • Reactive Ion Etching
  • Other Dry Etching Technologies
  • Etchant Types and Applications
    • Wet Etchants
• Table 10 WET ETCHANTS
• Table 10 (CONTINUED)
  • Dry Etchants
• Table 11 DRY ETCHANTS
  • Patent Analysis
• Table 12 DOPING PRECURSOR PATENTS
• Table 13 ETCHANT PATENT APPLICATIONS
• Figure 14 ETCHANT PATENTS BY TYPE OF TECHNOLOGY, 1975 THROUGH LATE 2004 (%)
  • Manufacturers
• Table 14 LIQUID ETCHANT MANUFACTURERS
  • DEPOSITION PRECURSORS
    • Description
    • Trends in Deposition Technology
      • Deposition Technologies
        • Physical Vapor Deposition Systems
        • Chemical Vapor Deposition
• Figure 15 CHEMICAL VAPOR DEPOSITION
  • Chemical Vapor Deposition
• Figure 16 CHEMICAL VAPOR DEPOSITION FURNACE SYSTEM
  • Low Pressure CVD
  • Plasma Enhanced CVD (PECVD)
  • Epitaxy
• Figure 17 EPITAXIAL REACTOR
  • Spin Coating
  • Materials
    • Dielectrics
    • Silicon Thin Films
• Table 15 SILICON THIN FILM PRECURSORS
  • Low-k Dielectrics
  • Gaseous Precursors
• Table 16 LOW-K DIELECTRIC PRECURSORS
  • Spin-On Dielectrics
  • High-k Dielectrics
• Table 17 HIGH-K DIELECTRIC CANDIDATES
  • Conductive Films
  • Polysilicon
  • Metals
• Table 18 METALS USED IN METALLIZATION APPLICATIONS
• Table 19 SPUTTERING TARGET MATERIALS USED IN METALLIZATION
• Table 20 COMMON CVD PRECURSORS USED IN METALLIZATION
  • Patent Analysis
• Table 21 SELECTED DEPOSITION PRECURSOR PATENTS
• Table 21 (CONTINUED)
• Figure 18 DEPOSITION PRECURSOR PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
• Figure 18 (CONTINUED)
• Table 22 DEPOSITION PRECURSOR PATENT APPLICATIONS
• Table 22 (CONTINUED)
• Figure 19 DEPOSITION PRECURSOR PATENT APPLICATIONS BY TYPE OF MATERIAL, THROUGH LATE 2004 (%)
  • Manufacturers
• Table 23 DEPOSITION PRECURSOR SUPPLIERS
  • DEVELOPERS
    • Description
    • Trends in Developer Technology
    • Application
    • Materials
      • Positive Developers
      • Negative Developers
    • Developer Types and Applications
      • Metal Ion Free Developers
      • Negative Developers
    • Patent Analysis
• Table 24 PHOTORESIST DEVELOPER PATENTS
• Figure 20 PHOTORESIST DEVELOPER PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)
• Figure 21 TRENDS IN NUMBER OF NEW PHOTORESIST DEVELOPER PATENTS ISSUED OVER TIME, 1985-2003
  • Manufacturers
• Table 25 PHOTORESIST DEVELOPER SUPPLIERS
  • STRIPPERS AND REMOVERS
    • Description
    • Technology Trends
      • Wet Stripping
      • Dry Stripping
      • Stripper Recycling
    • Products and Applications
      • Solvent-Based Removers
      • Aqueous/Semi-Aqueous Removers
    • Patent Analysis
• Table 26 PHOTORESIST STRIPPER AND REMOVER PATENTS
• Table 26 (CONTINUED)
• Table 26 (CONTINUED)
• Figure 22 PHOTORESIST STRIPPER AND REMOVER PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)
• Table 27 DEPOSITION PRECURSOR PATENT APPLICATIONS
• Table 27 (CONTINUED)
  • Manufacturers
• Table 28 STRIPPER AND REMOVER SUPPLIERS
  • OTHER CHEMICALS
    • Description
    • Products and Applications
    • Patent Analysis
• Table 29 OTHER LITHOGRAPHIC CHEMICAL PATENTS
• Table 29 (CONTINUED)
• Table 29 (CONTINUED)
• Figure 23 OTHER LITHOGRAPHIC CHEMICAL PATENTS BY TYPE OF CHEMICAL, 1975 THROUGH LATE 2004 (%)
  • Manufacturers
• Table 30 OTHER LITHOGRAPHIC CHEMICAL SUPPLIERS

GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS

• SUMMARY
• Figure 24 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS, 2003-2009 ($ MILLIONS)
  • DETAILED MARKET ESTIMATES AND PROJECTIONS
    • MARKET BY TYPE OF CHEMICAL
• Table 31 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, THROUGH 2009 ($ MILLIONS)
• Figure 25 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, 2003 AND 2009 (%)
  • Resists
    • Resist Market by Application
• Table 32 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, THROUGH 2009 ($ MILLION)
• Figure 26 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, 2003 AND 2009 (%)
  • Resist Market by Resist Type
• Table 33 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, THROUGH 2009 ($ MILLION)
  • Resist Market by Resist Type (Continued)
• Figure 27 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, 2003 AND 2009
  • Integrated Circuit Applications
    • Historical Sales
• Figure 28 GLOBAL PHOTORESIST SALES SHARE OF THE SEMICONDUCTOR INDUSTRY, BY TYPE OF RESIST, 2003 (%)
  • Market Drivers
  • Global Semiconductor Output
• Table 34 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2009 ($ BILLIONS)
• Figure 29 GLOBAL SEMICONDUCTOR PRODUCTION, 2002-2009 ($ BILLIONS)
  • Shifts in Lithographic Technology
• Figure 30 TRENDS IN MARKET SHARE OF INSTALLED BASE OF SEMICONDUCTOR LITHOGRAPHY TOOLS, 2003 AND 2009 (%)
  • Rising Photoresist Prices
  • Projected Market
• Table 35 PROJECTED GLOBAL MARKET FOR SEMICONDUCTOR RESISTS, BY TYPE, THROUGH 2009 ($ MILLIONS)
  • Photomask Applications
  • Historical Sales
• Figure 31 SALES OF ELECTRON BEAM VS. LASER RESISTS IN PHOTOMASK MANUFACTURE, 2003 (%)
  • Market Drivers
  • Trends in Photomask Production
• Table 36 GLOBAL PHOTOMASK SALES, THROUGH 2009 ($ BILLIONS)
• Figure 32 GLOBAL PHOTOMASK SALES, 2003-2009 ($ BILLIONS)
  • Photomask Lithography Technology Trends
  • Projected Market
• Table 37 PROJECTED GLOBAL MARKET FOR PHOTOMASK RESISTS, THROUGH 2009 ($ MILLIONS)
  • Printed Circuit Boards
    • Historical Sales
    • Market Drivers
    • Printed Circuit Board Production
• Table 38 PROJECTED PCB SALES, THROUGH 2009 ($ BILLIONS)
• Figure 33 PROJECTED PCB SALES, 2003-2009 ($ BILLIONS)
  • Projected Market
• Table 39 PROJECTED MARKET FOR PCB RESISTS, THROUGH 2009 ($ MILLIONS)
  • LCD Displays
    • Historical Sales
• Figure 34 SALES OF COLOR VS. OTHER RESISTS USED IN LCD DISPLAY MANUFACTURE, 2003 (%)
  • Market Drivers
  • Global LCD Display Output
• Table 40 PROJECTED GLOBAL LCD DISPLAY SALES, THROUGH 2009 ($ BILLIONS)
• Figure 35 PROJECTED GLOBAL LCD DISPLAY SALES, 2003-2009 ($ BILLIONS)
  • New Color Technologies
  • Projected Markets
• Table 41 PROJECTED GLOBAL MARKET FOR LCD RESISTS, THROUGH 2009 ($ MILLIONS)
  • MEMS and Other Microdevices
    • Historical Sales
    • Market Drivers
    • MEMS Production
• Table 42 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, THROUGH 2009 ($ BILLION)
• Figure 36 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, 2003-2009 ($ BILLIONS)
  • Projected Markets
• Table 43 PROJECTED GLOBAL MARKET FOR RESISTS USED IN MEMS/MICRODEVICE MANUFACTURE, THROUGH 2009 ($ MILLIONS)
  • Dopants
    • Historical Sales
• Figure 37 GLOBAL DOPANT CONSUMPTION BY TYPE, 2003 (%)
  • Market Drivers
    • Output of Microelectronic Devices
• Table 44 GLOBAL OUTPUT OF MICROELECTRONIC DEVICES REQUIRING DOPANTS IN PRODUCTION, THROUGH 2009 ($ BILLIONS)
• Figure 38 GLOBAL OUTPUT OF SELECTED MICROELECTRONIC DEVICES, 2003-2009 ($ BILLIONS)
  • Environmental, Health and Safety Concerns
  • Projected Market
• Table 45 PROJECTED MARKET FOR DOPANTS BY TYPE, THROUGH 2009 ($ MILLIONS)
  • Etchants
    • Historical Sales
• Figure 39 SALES OF WET VS. DRY ETCHANTS, 2003 (%)
  • Wet Etchants
• Figure 40 WET ETCHANT SALES, 2003 (%)
  • Dry Etchants
• Figure 41 DRY ETCHANT SALES, 2003 (%)
  • Market Drivers
    • Increasing Complexity of Microelectronic Devices
    • Decreasing Feature Sizes
    • Increasing Yields
    • Environmental Issues
  • Projected Market
• Table 46 PROJECTED GLOBAL MARKET FOR ETCHANTS, THROUGH 2009 ($ MILLION)
• Figure 42 TRENDS IN GLOBAL DRY ETCHANT MARKET COMPOSITION, 2003 AND 2009 (%)
• Figure 43 TRENDS IN GLOBAL SHARE OF WET ETCHANT MARKET, 2003 AND 2009 (%)
  • Deposition Precursors
    • Historical Sales
• Table 47 GLOBAL CONSUMPTION OF DEPOSITION PRECURSORS BY TYPE, 2003 ($ MILLIONS)
  • Gaseous Precursors
• Figure 44 GASEOUS PRECURSOR MARKET SHARES, 2003 (%)
  • Spin-on Materials
  • Sputtering Targets
• Figure 45 SPUTTERING TARGET MARKET SHARES, 2003 (%)
  • Market Drivers
    • Decreasing Feature Size
    • Technical and Cost Issues
  • Projected Market
• Table 48 PROJECTED GLOBAL MARKET FOR DEPOSITION PRECURSORS BY TYPE, THROUGH 2009 ($ MILLIONS)
  • Silicon Precursors
  • Reactant Gases
  • Low-k Dielectrics
  • High-k Dielectrics
  • Spin-On Materials
  • Sputtering Targets
  • Developers, Strippers and Removers
    • Historical Sales
• Figure 46 MARKET FOR PHOTORESIST DEVELOPERS, STRIPPERS AND REMOVERS, 2003 (%)
• Figure 46 (CONTINUED)
• Figure 47 MICROELECTRONICS MARKET SHARE FOR RESIST DEVELOPERS, 2003 (%)
• Figure 47 (CONTINUED)
• Figure 48 MICROELECTRONICS MARKET SHARE FOR STRIPPERS AND REMOVERS, 2003 (%)
  • Market Drivers
    • Economic and Environmental Considerations
  • Projected Market
• Table 49 PROJECTED GLOBAL MARKET FOR DEVELOPERS, STRIPPERS, AND REMOVERS, THROUGH 2009 ($ MILLIONS)
  • Other Chemicals
    • Historical Sales
• Figure 49 SALES OF OTHER MICROLITHOGRAPHIC CHEMICALS, 2003 (%)
• Figure 49 (CONTINUED)
  • Market Drivers
    • Photoresist Sales
    • Overall Microelectronic Device Sales
  • Projected Market
• Table 50 PROJECTED GLOBAL MARKET FOR OTHER LITHOGRAPHIC CHEMICALS, THROUGH 2009 (MILLION $)
  • MARKET SEGMENT BY MAJOR END-USER SEGMENT
• Figure 50 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY END-USER SEGMENT, 2003 AND 2009 (%)
  • GEOGRAPHICAL MARKETS
• Figure 51 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY REGION, 2003 AND 2009 (%)
  • OTHER DEVELOPMENTS THAT MAY INFLUENCE THE MARKET FOR MICROLITHOGRAPHIC CHEMICALS
    • ECONOMIC TRENDS
    • ENVIRONMENTAL/HEALTH/SAFETY/OTHER IMPACTS OF MICROLITHOGRAPHIC PROCESSES AND CHEMICALS
      • Environmental/Health/Safety/Other�EContinued)
      • Environmental/Health/Safety/Other�EContinued)
    • GOVERNMENT SPONSORSHIP
      • United States
        • Focus Center Research Program
        • Other Defense Department Initiatives
        • National Laboratories
        • National Nanotechnology Initiative
      • Europe
        • MEDEA
        • EU Nanotechnology Research
      • Japan
        • ASUKA
        • Nanotechnology Research
        • SELETE
      • Other Countries

INDUSTRY STRUCTURE AND COMPETITION

• PHOTORESISTS
• Figure 52 GLOBAL PHOTORESIST COMPANY MARKET SHARES, 2003 (%)
• Figure 52 (CONTINUED)
  • Liquid Chemicals
• Figure 53 LITHOGRAPHY WET CHEMICALS MARKET SHARES, 2003 (%)
  • Gases
• Figure 54 LITHOGRAPHY GASES MARKET SHARES, 2002 (%)

COMPANY PROFILES

• AIR PRODUCTS AND CHEMICALS, INC.
• APPLIED MATERIALS, INC.
• ARCH CHEMICALS, INC.
• ASM INTERNATIONAL N.V.
• ATMI, INC.
• AZ ELECTRONIC MATERIALS
• THE BOC GROUP PLC
• CYANTEC, INC.
• DONGJIM SEMICHEM
• DONGWOO FINE CHEMICALS CO., LTD.
• DOW CHEMICAL CO.
• DOW CORNING CORP.
• DUPONT ELECTRONIC TECHNOLOGIES
• EKC TECHNOLOGIES
• ELECTRA POLYMERS & CHEMICALS LTD.
• ELECTRON TRANSFER TECHNOLOGIES
• ETERNAL CHEMICAL CO., LTD
• GENERAL CHEMICAL CORP.
• HITACHI CHEMICAL CO., LTD
• HONEYWELL ELECTRONIC MATERIALS
• HUNTSMAN
• JSR CORP.
• KANTO KAGAKU
• LAIR LIQUIDE SA
• MALLINCKRODT BAKER, INC.
• MACDERMID, INC.
• MATHESON TRI-GAS, INC.
• MERCK KGAA
• MITSUBISHI MATERIALS CORP.
• NIKKO MATERIALS USA, INC.
• NIPPON SANSO KK
• PRAXAIR, INC.
• RD CHEMICAL
• ROHM AND HAAS CO.
• SHIN-ETSU CHEMICAL CO., LTD.
• SHIPLEY CO., LLC
• SILECS OY
• SUMITOMO CHEMICAL CO. LTD.
• TAIYO INK MFG. CO., LTD.
• TOKYO OHKA KOGYO CO., LTD.
• TOSOH CORP.
• WAKO PURE CHEMICAL INDUSTRIES, LTD.

LIST OF TABLES

Summary Table:
GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, THROUGH 2009 ($ MILLIONS)

Table 1 ITRS TECHNOLOGY NODES MINIMUM LINE WIDTH PER YEAR, 1995-2018 (NM)

Table 2 PRINCIPAL MICROLITHOGRAPHY TECHNOLOGIES

Table 3 RESIST TYPES AND APPLICATIONS

Table 4 RESIST PATENTS

Table 5 PHOTORESIST PATENT APPLICATIONS

Table 6 RESIST MANUFACTURERS

Table 7 DOPING PRECURSOR PATENTS

Table 8 PHOTORESIST PATENT APPLICATIONS

Table 9 DOPANT GAS MANUFACTURERS

Table 10 WET ETCHANTS

Table 11 DRY ETCHANTS

Table 12 DOPING PRECURSOR PATENTS

Table 13 ETCHANT PATENT APPLICATIONS

Table 14 LIQUID ETCHANT MANUFACTURERS

Table 15 SILICON THIN FILM PRECURSORS

Table 16 LOW-K DIELECTRIC PRECURSORS

Table 17 HIGH-K DIELECTRIC CANDIDATES

Table 18 METALS USED IN METALLIZATION APPLICATIONS

Table 19 SPUTTERING TARGET MATERIALS USED IN METALLIZATION

Table 20 COMMON CVD PRECURSORS USED IN METALLIZATION

Table 21 SELECTED DEPOSITION PRECURSOR PATENTS

Table 22 DEPOSITION PRECURSOR PATENT APPLICATIONS

Table 23 DEPOSITION PRECURSOR SUPPLIERS

Table 24 PHOTORESIST DEVELOPER PATENTS

Table 25 PHOTORESIST DEVELOPER SUPPLIERS

Table 26 PHOTORESIST STRIPPER AND REMOVER PATENTS

Table 27 DEPOSITION PRECURSOR PATENT APPLICATIONS

Table 28 STRIPPER AND REMOVER SUPPLIERS

Table 29 OTHER LITHOGRAPHIC CHEMICAL PATENTS

Table 30 OTHER LITHOGRAPHIC CHEMICAL SUPPLIERS

Table 31 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, THROUGH 2009 ($ MILLIONS)

Table 32 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, THROUGH 2009 ($ MILLION)

Table 33 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, THROUGH 2009 ($ MILLION)

Table 34 GLOBAL SEMICONDUCTOR PRODUCTION, THROUGH 2009 ($ BILLIONS)

Table 35 PROJECTED GLOBAL MARKET FOR SEMICONDUCTOR RESISTS, BY TYPE, THROUGH 2009 ($ MILLIONS)

Table 36 GLOBAL PHOTOMASK SALES, THROUGH 2009 ($ BILLIONS)

Table 37 PROJECTED GLOBAL MARKET FOR PHOTOMASK RESISTS, THROUGH 2009 ($ MILLIONS)

Table 38 PROJECTED PCB SALES, THROUGH 2009 ($ BILLIONS)

Table 39 PROJECTED MARKET FOR PCB RESISTS, THROUGH 2009 ($ MILLIONS)

Table 40 PROJECTED GLOBAL LCD DISPLAY SALES, THROUGH 2009 ($ BILLIONS)

Table 41 PROJECTED GLOBAL MARKET FOR LCD RESISTS, THROUGH 2009 ($ MILLIONS)

Table 42 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, THROUGH 2009 ($ BILLION)

Table 43 PROJECTED GLOBAL MARKET FOR RESISTS USED IN MEMS/MICRODEVICE MANUFACTURE, THROUGH 2009 ($ MILLIONS)

Table 44 GLOBAL OUTPUT OF MICROELECTRONIC DEVICES REQUIRING DOPANTS IN PRODUCTION, THROUGH 2009 ($ BILLIONS)

Table 45 PROJECTED MARKET FOR DOPANTS BY TYPE, THROUGH 2009 ($ MILLIONS)

Table 46 PROJECTED GLOBAL MARKET FOR ETCHANTS, THROUGH 2009 ($ MILLION)

Table 47 GLOBAL CONSUMPTION OF DEPOSITION PRECURSORS BY TYPE, 2003 ($ MILLIONS)

Table 48 PROJECTED GLOBAL MARKET FOR DEPOSITION PRECURSORS BY TYPE, THROUGH 2009 ($ MILLIONS)

Table 49 PROJECTED GLOBAL MARKET FOR DEVELOPERS, STRIPPERS, AND REMOVERS, THROUGH 2009 ($ MILLIONS)

Table 50 PROJECTED GLOBAL MARKET FOR OTHER LITHOGRAPHIC CHEMICALS, THROUGH 2009 (MILLION $)  

LIST OF FIGURES

Summary Figure:
GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE, 2003-2009 ($ MILLIONS)

Figure 1 ELEMENTS OF AN OPTICAL LITHOGRAPHY SYSTEM

Figure 2 SEMICONDUCTOR VS. OTHER APPLICATIONS SHARE OF TOTAL MARKET FOR MICROLITHOGRAPHIC CHEMICALS, 2003 AND 2009 (%)

Figure 3 MILESTONES IN NUMBER OF TRANSISTORS PER CHIP, 1971-2003

Figure 4 PHOTOMASK BLANK

Figure 5 FINISHED PHOTOMASK

Figure 6 PHOTORESIST PRINCIPLES

Figure 7 RESIST PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)

Figure 8 RESIST PATENT HOLDERS BY REGION, 1975 THROUGH LATE 2004 (%)

Figure 9 RESIST PATENTS BY TYPE OF RESIST TECHNOLOGY, 1975 THROUGH LATE 2004 (%)

Figure 10 RESIST PATENT APPLICATIONS BY TYPE OF RESIST, 1975 THROUGH LATE 2004 (%)

Figure 11 DIFFUSION PROCESS (DIFFUSION FURNACE ¾ ~1,000°C)

Figure 12 DOPING BY ION IMPLANTATION PROCESS

Figure 13 ISOTROPIC VS. ANISOTROPIC ETCHING

Figure 14 ETCHANT PATENTS BY TYPE OF TECHNOLOGY, 1975 THROUGH LATE 2004 (%)

Figure 15 CHEMICAL VAPOR DEPOSITION

Figure 16 CHEMICAL VAPOR DEPOSITION FURNACE SYSTEM

Figure 17 EPITAXIAL REACTOR

Figure 18 DEPOSITION PRECURSOR PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)

Figure 19 DEPOSITION PRECURSOR PATENT APPLICATIONS BY TYPE OF MATERIAL, THROUGH LATE 2004 (%)

Figure 20 PHOTORESIST DEVELOPER PATENTS BY TYPE OF MATERIAL, 1975 THROUGH LATE 2004 (%)

Figure 21 TRENDS IN NUMBER OF NEW PHOTORESIST DEVELOPER PATENTS ISSUED OVER TIME, 1985-2003

Figure 22 PHOTORESIST STRIPPER AND REMOVER PATENT HOLDERS, 1975 THROUGH LATE 2004 (%)

Figure 23 OTHER LITHOGRAPHIC CHEMICAL PATENTS BY TYPE OF CHEMICAL, 1975 THROUGH LATE 2004 (%)

Figure 24 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS, 2003-2009 ($ MILLIONS)

Figure 25 GLOBAL MARKET FOR LITHOGRAPHIC CHEMICALS BY TYPE OF CHEMICAL, 2003 AND 2009 (%)

Figure 26 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY APPLICATION, 2003 AND 2009 (%)

Figure 27 GLOBAL MARKET FOR LITHOGRAPHIC RESISTS BY RESIST TYPE, 2003 AND 2009

Figure 28 GLOBAL PHOTORESIST SALES SHARE OF THE SEMICONDUCTOR INDUSTRY, BY TYPE OF RESIST, 2003 (%)

Figure 29 GLOBAL SEMICONDUCTOR PRODUCTION, 2002-2009 ($ BILLIONS)

Figure 30 TRENDS IN MARKET SHARE OF INSTALLED BASE OF SEMICONDUCTOR LITHOGRAPHY TOOLS, 2003 AND 2009 (%)

Figure 31 SALES OF ELECTRON BEAM VS. LASER RESISTS IN PHOTOMASK MANUFACTURE, 2003 (%)

Figure 32 GLOBAL PHOTOMASK SALES, 2003-2009 ($ BILLIONS)

Figure 33 PROJECTED PCB SALES, 2003-2009 ($ BILLIONS)

Figure 34 SALES OF COLOR VS. OTHER RESISTS USED IN LCD DISPLAY MANUFACTURE, 2003 (%)

Figure 35 PROJECTED GLOBAL LCD DISPLAY SALES, 2003-2009 ($ BILLIONS)

Figure 36 PROJECTED GLOBAL SALES OF MEMS/MICRODEVICES, 2003-2009 ($ BILLIONS)

Figure 37 GLOBAL DOPANT CONSUMPTION BY TYPE, 2003 (%)

Figure 38 GLOBAL OUTPUT OF SELECTED MICROELECTRONIC DEVICES, 2003-2009 ($ BILLIONS)

Figure 39 SALES OF WET VS. DRY ETCHANTS, 2003 (%)

Figure 40 WET ETCHANT SALES, 2003 (%)

Figure 41 DRY ETCHANT SALES, 2003 (%)

Figure 42 TRENDS IN GLOBAL DRY ETCHANT MARKET COMPOSITION, 2003 AND 2009 (%)

Figure 43 TRENDS IN GLOBAL SHARE OF WET ETCHANT MARKET, 2003 AND 2009 (%)

Figure 44 GASEOUS PRECURSOR MARKET SHARES, 2003 (%)

Figure 45 SPUTTERING TARGET MARKET SHARES, 2003 (%)

Figure 46 MARKET FOR PHOTORESIST DEVELOPERS, STRIPPERS AND REMOVERS, 2003 (%)

Figure 47 MICROELECTRONICS MARKET SHARE FOR RESIST DEVELOPERS, 2003 (%)

Figure 48 MICROELECTRONICS MARKET SHARE FOR STRIPPERS AND REMOVERS, 2003 (%)

Figure 49 SALES OF OTHER MICROLITHOGRAPHIC CHEMICALS, 2003 (%)

Figure 50 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY END-USER SEGMENT, 2003 AND 2009 (%)

Figure 51 MICROLITHOGRAPHY CHEMICAL MARKET SHARES BY REGION, 2003 AND 2009 (%)

Figure 52 GLOBAL PHOTORESIST COMPANY MARKET SHARES, 2003 (%)

Figure 53 LITHOGRAPHY WET CHEMICALS MARKET SHARES, 2003 (%)

Figure 54 LITHOGRAPHY GASES MARKET SHARES, 2002 (%)