[Report] SemiconductOR & /Microelectronics Cleaning Market Research, Trends, Analysis TOC

INTRODUCTION

STUDY BACKGROUND
STUDY GOALS AND OBJECTIVES
INTENDED AUDIENCE
SCOPE AND FORMAT
METHODOLOGY AND INFORMATION SOURCES
ANALYST CREDENTIALS
RELATED BCC RESEARCH REPORTS
BCC ONLINE SERVICES
DISCLAIMER

EXECUTIVE SUMMARY

Summary Table:
- GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
Summary Figure:
- GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, 2005-2011 ($ BILLIONS)

CLEANING PROCESS OVERVIEW

GENERAL DESCRIPTION
- DEFINITIONS
  - Cleaning
  - Stripping
  - Ashing
  - Etching
  - Front End-of-Line (FEOL)
  - Back End-of-Line (BEOL)
- HISTORICAL NOTE
IMPORTANCE OF CLEANING TO THE ELECTRONICS INDUSTRY
- GENERAL IMPORTANCE OF CLEANING
  - Device Processing Yield
  - Device Performance
  - Device Reliability
- CONTAMINATION TYPES
  - Particles
  - Inorganic Chemicals
  - Organic Chemicals
  - Dissolved Organics and Bacteria
- CONTAMINATION SOURCES
SPECIFIC APPLICATIONS
- INTEGRATED CIRCUITS
- PHOTOMASKS
- PRINTED CIRCUIT BOARDS
- PCB CLEANING APPLICATIONS
  - Removal of Flux Residues from PCB Assemblies after Soldering
  - Removal of Solder Paste or Adhesive from Stencils or Misprints
- HARD DISK DRIVES
  - Read-write Heads
  - Storage Media
- MICROELECTROMECHANICAL SYSTEMS (MEMS)
- FLAT PANEL DISPLAYS
- IMAGE SENSORS
DEVELOPMENTS THAT MAY INFLUENCE MARKETS FOR CLEANING TECHNOLOGIES
- SHRINKING FEATURE SIZES
- NEW MATERIALS
  - High-k Dielectrics
  - New Salicides
  - Copper
- PROCESS-RELATED DEVELOPMENTS
  - Trends toward Single-wafer Processing
  - Multiple-use Tools
  - ITRS
  - Table 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELDS
    - Itrs (Continued)

CLEANING TECHNOLOGIES, EQUIPMENT, CHEMICALS AND SERVICES

SUMMARY
TECHNOLOGIES, EQUIPMENT, AND CHEMICALS
- WET PROCESS CLEANING
  - Technologies
    - Wet Cleaning Systems
      - Batch Immersion Cleaning Systems
      - Batch Spray Cleaning Systems
      - Single-wafer Immersion Systems
      - Single-wafer Spray Systems
    - Cleaning Chemistries
      - RCA Cleaning Chemistry
      - Piranha
      - Dilute Chemistries
      - Aqueous and Semiaqueous Chemistries
      - Single-wafer Cleaning Chemistries
      - Dilute Sulfuric Peroxide, Plus (DSP+)
      - Applied Materials AM1
      - Dilute HF with Ozonated Water (SCROD)
      - Direct Application of Gaseous Ozone
      - Aqueous Foam
    - Ultrapure Water
      - Reverse Osmosis Systems
      - Deionization
      - Ion Exchange Systems
      - Electrodialysis/Electrodialysis Reversal (ED/EDR) Systems
      - Filtration
  - Applications
    - Semiconductor Manufacturing
      - Current Applications
      - Emerging Applications
      - Other Applications
      - Photomasks
      - Printed Circuit Boards (PCBs)
      - Hard Disk Drive Media and Read/write Heads
      - Flat Panel Displays
  - Advantages and Disadvantages
    - Overall Advantages and Disadvantages of Wet Cleaning
      - Advantages and Disadvantages of Specific Wet Cleaning Technologies
      - Batch Immersion Systems
      - Batch Spray Systems
      - Single-wafer Immersion Systems
      - Single-Wafer Spray Systems
  - Products and Manufacturers
    - Wet Cleaning Equipment
    - Table 2 WET CLEANING EQUIPMENT MANUFACTURERS
    - Figure 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
    - Wet-cleaning Chemicals
    - Table 3 WET CLEANING CHEMICAL MANUFACTURERS
    - Figure 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2005 (%)
    - Water Purification Systems
    - Table 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS
    - Figure 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2005 (%)
  - Patent Analysis
    - Figure 4 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING TECHNOLOGIES (%)
    - Wet Cleaning Equipment
    - Figure 5 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT* (%)
    - Table 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS AND PATENT APPLICATIONS)
    - Wet Cleaning Chemicals
    - Figure 6 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE* (%)
    - Ultrapure Water
    - Figure 7 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO ULTRAPURE WATER BY PRODUCTION TECHNOLOGY TYPE* (%)
- DRY PROCESS CLEANING
  - Technologies
    - Dry Cleaning Systems
      - Plasma Cleaning
      - Figure 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM
      - Cryogenic Aerosol Cleaning
      - Laser Resist Stripping
      - Ultraviolet/Ozone Cleaning
    - Dry Cleaning Gases
    - Table 6 DRY CLEANING GASES
  - Applications
  - Advantages and Disadvantages
  - Products and Manufacturers
    - Equipment
    - Table 7 DRY CLEANING EQUIPMENT MANUFACTURERS
    - Figure 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
    - Consumables
    - Table 8 DRY CLEANING GAS MANUFACTURERS
    - Figure 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2005 (%)
    - Figure 10 (CONTINUED)
  - Patent Analysis
  - Figure 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS CLEANING (%)
- EMERGING ELECTRONICS CLEANING TECHNOLOGIES
  - Supercritical CO2 Process
    - Technology
    - Applications
    - Advantages and Disadvantages
    - Manufacturers
    - Table 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS
    - Patent Analysis
    - Figure 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%)
    - Figure 12 (CONTINUED)
  - Anhydrous SO3 Cleaning
    - Technology
    - Applications
    - Advantages and Disadvantages
    - Developers and Manufacturers
    - Patent Analysis
    - Figure 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%)
  - Laser-induced Shockwave Cleaning (LSC)
    - Technology
    - Applications
    - Advantages and Disadvantages
    - Manufacturers
    - Patent Analysis
  - Other Technologies
    - Nanoprobe Cleaning
    - Vapor Cleaning
CONTAMINATION DETECTION TECHNOLOGIES
- TECHNOLOGY
  - Table 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES
  - Laser Backscattering
  - Optical Microscopy
  - Other Technologies
- ADVANTAGES AND DISADVANTAGES
- Table 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVANTAGES AND DISADVANTAGES
- MANUFACTURERS
- Table 12 CONTAMINANT DETECTION SYSTEM MANUFACTURERS
- Table 12 (CONTINUED)
- Figure 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2005 (% OF TOTAL SALES)
- Figure 14 (CONTINUED)
- PATENT ANALYSIS
- Figure 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY TECHNOLOGY (%)
- Figure 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY ASSIGNEE (%)
CLEANING-RELATED CONTRACT SERVICES
- Table 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES

GLOBAL MARKET FOR ELECTRONICS CLEANING EQUIPMENT, SUPPLIES AND SERVICES, 2005-2011

SUMMARY
- OVERALL MARKET
- Table 14 GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
- Figure 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2005-2011 ($ BILLIONS)
- Figure 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY PROCESS TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES) (%)
- MARKET BY TECHNOLOGY TYPE
- Figure 19 MICROELECTRONICS CLEANING MARKET BY PROCESS TYPE, 2005 AND 2011* (% OF GLOBAL ELECTRONICS CLEANING SALES)
- MARKET BY APPLICATION TYPE
- Figure 20 MICROELECTRONICS CLEANING MARKET BY APPLICATION TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES)
- MARKETS BY REGION
- Figure 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2005 AND 2011 (%)
DETAILED ESTIMATES AND PROJECTIONS
- WET PROCESS MARKET
  - 2005 Sales
    - Figure 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS AND ULTRAPURE WATER, 2005 (%)
    - Equipment
    - Figure 23 WET CLEANING EQUIPMENT SALES BY TYPE, 2005 (%)
    - Chemicals
    - Figure 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE, 2005 (%)
    - Ultrapure Water
  - Market Drivers
    - Trends in Global Semiconductor Sales
    - Table 15 GLOBAL FORECAST OF SEMICONDUCTOR SALES, THROUGH 2011 ($ BILLIONS)
    - Figure 25 TRENDS IN GLOBAL SEMICONDUCTOR SALES, 2005-2011 ($ BILLIONS)
    - Growing Complexity of Semiconductors
    - Figure 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2005 AND 2011 (%)
    - Growing Use of 300 mm Wafers
    - Table 16 SALES OF 300 MM WAFER TOOLS, THROUGH 2005 ($ BILLIONS)
    - Figure 27 TRENDS IN SEMICONDUCTOR INDUSTRY INVESTMENT IN 300 MM-CAPABLE PROCESS EQUIPMENT, 2001-2005 ($ BILLIONS/PERCENT)
    - Table 17 GLOBAL FORECAST OF SINGLE-WAFER CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS/PERCENT)
    - Figure 28 SALES TRENDS IN SINGLE-WAFER CLEANING EQUIPMENT, 2005-2011 ($ BILLIONS/PERCENT)
    - New Interconnect Materials
    - Table 18 GLOBAL FORECAST OF LOW-K DIELECTRIC MATERIALS SALES USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2011 ($ MILLIONS)
    - Figure 29 SALES TRENDS FOR LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2005-2011 ($ MILLIONS)
    - Diversification of Wet Cleaning Chemistry Suppliers
    - Growing Importance of Nonsemiconductor Applications
    - Figure 30 GLOBAL SHARE OF SEMICONDUCTOR VS. NONSEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT, 2005 AND 2011 (%)
  - Projected Market: 2005 to 2010
    - Summary
    - Table 19 GLOBAL FORECAST OF WET PROCESS CLEANING EQUIPMENT AND CHEMICAL SALES, THROUGH 2011 ($ BILLIONS)
    - Equipment
    - Table 20 GLOBAL FORECAST OF WET PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
    - Figure 31 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2005 AND 2011 (%)
    - Chemicals
    - Table 21 GLOBAL FORECAST OF WET PROCESS CLEANING CHEMISTRIES SALES, THROUGH 2011 ($ BILLIONS)
    - Figure 32 GLOBAL SHARE OF THE WET CLEAN CHEMISTRY MARKET, 2005 AND 2011 (%)
    - Ultrapure Water
    - Table 22 GLOBAL FORECAST OF ULTRAPURE WATER SALES, THROUGH 2011 ($ BILLIONS)
- DRY PROCESS MARKET
  - 2005 Sales
    - Figure 33 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2005 (%)
    - Figure 33 (CONTINUED)
    - Equipment
    - Figure 34 GLOBAL SHARE OF DRY CLEANING EQUIPMENT SALES BY TYPE, 2005 ($ BILLIONS)
    - Gases
    - Figure 35 GLOBAL SHARE OF DRY CLEANING GASES CONSUMPTION BY TYPE, 2005 (%)
    - Figure 35 (CONTINUED)
  - Market Drivers
    - Overall Resist Consumption
    - Table 23 GLOBAL FORECAST OF RESIST MATERIAL SALES, THROUGH 2011 ($ BILLIONS)
    - Figure 36 GLOBAL FORECAST IN MARKETS FOR RESIST MATERIALS, 2005-2011 ($ BILLIONS)
    - Use of New Resist and Semiconductor Materials
      - New Types of Photoresist
      - New Interconnect Materials
    - Overall Ozone Generation System Sales
    - Table 24 OZONE TECHNOLOGY SALES, THROUGH 2011 ($ MILLIONS)
    - Figure 37 GLOBAL FORECAST OF OZONE TECHNOLOGY MARKETS, 2005-2011 ($ MILLIONS)
  - Projected Market: 2006-2011
    - Summary
    - Table 25 GLOBAL FORECAST OF DRY PROCESS CLEANING EQUIPMENT AND GASES SALES, THROUGH 2011 ($ BILLIONS)
    - Equipment
    - Table 26 GLOBAL FORECAST OF DRY PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
    - Figure 38 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKET, 2005 AND 2011
    - Gases
    - Table 27 GLOBAL FORECAST OF DRY PROCESS CLEANING GAS SALES BY TYPE, THROUGH 2011 ($ BILLIONS)
    - Figure 39 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKETS BY TYPE, 2005 AND 2011 (%)
- EMERGING CLEANING TECHNOLOGY MARKETS
  - Supercritical Carbon Dioxide (SCCO2)
    - Sales
    - Market Drivers
    - Trends toward Advanced and Next-Generation Lithography (NGL) Technologies
    - Figure 40 GLOBAL FORECAST OF SALES TRENDS FOR NGL VS. OTHER PHOTRESIST TYPES, 2005-2011 ($ BILLIONS)
  - Projected Market: 2005 to 2010
    - Equipment
    - Table 28 SCCO2 CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
    - Carbon Dioxide
    - Table 29 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2011 ($ BILLIONS)
  - Other Emerging Cleaning Technologies
- CLEANING-RELATED SERVICES MARKETS
  - 2005 Sales
  - Figure 41 GLOBAL SHARE OF CLEANING-RELATED SERVICES MARKET, 2005 ($ BILLIONS)
  - Market Drivers
    - Semiconductor Industry Purchases of Outside Services
  - Figure 42 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES, 1997 AND 2002 ($ BILLIONS/% OF TOTAL SHIPMENT VALUE)
  - Projected Market, 2006 to 2011
  - Table 30 GLOBAL FORECAST OF CLEANING-RELATED CONTRACT SERVICE SALES, THROUGH 2011 ($ BILLIONS)
- CONTAMINANT DETECTION SYSTEM MARKETS
  - 2005 Sales
  - Figure 43 MICRODEVICE INSPECTION SYSTEM SALES, 2005 (%)
  - Market Drivers
  - Projected Market: 2006 to 2011
  - Table 31 GLOBAL FORECAST OF SEMICONDUCTOR INSPECTION SYSTEM SALES, THROUGH 2011 ($ BILLIONS)
OTHER FACTORS THAT COULD INFLUENCE THE CLEANING EQUIPMENT AND SUPPLIES MARKET
- ENVIRONMENTAL, HEALTH AND SAFETY ISSUES
  - United States
  - EU
  - Japan
  - Japan (Continued)

INDUSTRY STRUCTURE

NUMBERS AND SIZES OF FIRMS
Figure 44 MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS ACCORDING TO ANNUAL SALES LEVELS, 2005 (%)
CLEANING PRODUCT SPECIALIZATION
Table 32 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL SALES, 2005 ($ BILLIONS)
Figure 45 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2005 (CLEANING EQUIPMENT SALES AS A % OF TOTAL SALES)
NATIONALITY
Figure 46 NATIONALITIES OF MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS, 2005 (%)
OWNERSHIP TRENDS
- OWNERSHIP TRENDS (CONTINUED)

VENDOR PROFILES

AIR PRODUCTS AND CHEMICALS, INC.
AKRION, INC.
ANON, INC.
APPLIED MATERIALS, INC.
ARCH CHEMICALS, INC.
ATMI, INC.
AUSTIN AMERICAN TECHNOLOGY
AXCELIS TECHNOLOGIES, INC.
AXIC, INC.
AZ ELECTRONIC MATERIALS
THE BOC GROUP PLC
THE BWT GROUP
CANON USA, INC.
CYANTEC, INC.
DAINIPPON SCREEN MANUFACTURING CO., LTD.
DONGJIM SEMICHEM
DONGWOO FINE CHEMCIALS CO., LTD.
DUPONT ELECTRONIC TECHNOLOGIES
EKC TECHNOLOGIES
EV GROUP
FMC INDUSTRIAL CHEMICALS
FSI INTERNATIONAL, INC.
GENERAL CHEMICAL CORP.
GLEGG INDUSTRIES, INC.
HITACHI, LTD.
HONEYWELL ELECTRONIC MATERIALS
IONICS, INC.
JEOL, LTD.
KANTO CORP.
KLA-TENCOR CORP.
L'AIR LIQUIDE SA
LAM RESEARCH CORP.
LEICA MICROSYSTEMS AG
LOTUS SYSTEMS GMBH
MACDERMID, INC.
MALLINCKRODT BAKER, INC.
MATHESON TRI-GAS, INC.
MATTSON TECHNOLOGY, INC
MERCK KGA
MICELL INTEGRATED SYSTEMS, INC.
MITSUBISHI CHEMICAL CORP.
MKS INSTRUMENTS, INC.
NANOMETRICS, INC.
NEXX SYSTEMS, INC.
NIKON CORP.
NIPPON SANSO KK
NOVASCAN TECHNOLOGIES, INC.
NOVELLUS SYSTEMS, INC.
OSRAM SYLVANIA, INC.
PENTAGON TECHNOLOGIES, INC.
PRAXAIR, INC.
QUANTUMCLEAN, INC.
RD CHEMICAL
ROHM AND HAAS
SC FLUIDS, INC.
SCP GLOBAL TECHNOLOGIES, INC.
SEZ HOLDING, LTD.
SHIBAURA MECHATRONICS CORP.
SOLVAY S.A.
STOELTING
SUMITOMO CHEMICAL CO., LTD.
SUPERCRITICAL SYSTEMS, INC.
SUSS MICROTEC AG
TAIYO NIPPON SANSO KK
TEPLA AG
TOKYO ELECTRON, LTD.
TOKYO OHKA KOGYO CO., LTD.
U.S. FILTER CORP.
WAKO PURE CHEMICAL INDUSTRIES, LTD.
ZESTRON CORP.

LIST OF TABLES

Summary Table:
- GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
Table 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELDS
Table 2 WET CLEANING EQUIPMENT MANUFACTURERS
Table 3 WET CLEANING CHEMICAL MANUFACTURERS
Table 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS
Table 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS AND PATENT APPLICATIONS)
Table 6 DRY CLEANING GASES
Table 7 DRY CLEANING EQUIPMENT MANUFACTURERS
Table 8 DRY CLEANING GAS MANUFACTURERS
Table 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS
Table 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES
Table 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVANTAGES AND DISADVANTAGES
Table 12 CONTAMINANT DETECTION SYSTEM MANUFACTURERS
Table 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES
Table 14 GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
Table 15 GLOBAL FORECAST OF SEMICONDUCTOR SALES, THROUGH 2011 ($ BILLIONS)
Table 16 SALES OF 300 MM WAFER TOOLS, THROUGH 2005 ($ BILLIONS)
Table 17 GLOBAL FORECAST OF SINGLE-WAFER CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS/PERCENT)
Table 18 GLOBAL FORECAST OF LOW-K DIELECTRIC MATERIALS SALES USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2011 ($ MILLIONS)
Table 19 GLOBAL FORECAST OF WET PROCESS CLEANING EQUIPMENT AND CHEMICAL SALES, THROUGH 2011 ($ BILLIONS)
Table 20 GLOBAL FORECAST OF WET PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
Table 21 GLOBAL FORECAST OF WET PROCESS CLEANING CHEMISTRIES SALES, THROUGH 2011 ($ BILLIONS)
Table 22 GLOBAL FORECAST OF ULTRAPURE WATER SALES, THROUGH 2011 ($ BILLIONS)
Table 23 GLOBAL FORECAST OF RESIST MATERIAL SALES, THROUGH 2011 ($ BILLIONS)
Table 24 OZONE TECHNOLOGY SALES, THROUGH 2011 ($ MILLIONS)
Table 25 GLOBAL FORECAST OF DRY PROCESS CLEANING EQUIPMENT AND GASES SALES, THROUGH 2011 ($ BILLIONS)
Table 26 GLOBAL FORECAST OF DRY PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
Table 27 GLOBAL FORECAST OF DRY PROCESS CLEANING GAS SALES BY TYPE, THROUGH 2011 ($ BILLIONS)
Table 28 SCCO2 CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
Table 29 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2011 ($ BILLIONS)
Table 30 GLOBAL FORECAST OF CLEANING-RELATED CONTRACT SERVICE SALES, THROUGH 2011 ($ BILLIONS)
Table 31 GLOBAL FORECAST OF SEMICONDUCTOR INSPECTION SYSTEM SALES, THROUGH 2011 ($ BILLIONS)
Table 32 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL SALES, 2005 ($ BILLIONS)

LIST OF FIGURES

Summary Figure:
- GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, 2005-2011 ($ BILLIONS)
Figure 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
Figure 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2005 (%)
Figure 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2005 (%)
Figure 4 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING TECHNOLOGIES (%)
Figure 5 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT* (%)
Figure 6 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE* (%)
Figure 7 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO ULTRAPURE WATER BY PRODUCTION TECHNOLOGY TYPE* (%)
Figure 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM
Figure 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
Figure 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2005 (%)
Figure 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS CLEANING (%)
Figure 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%)
Figure 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%)
Figure 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2005 (% OF TOTAL SALES)
Figure 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY TECHNOLOGY (%)
Figure 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY ASSIGNEE (%)
Figure 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2005-2011 ($ BILLIONS)
Figure 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY PROCESS TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES) (%)
Figure 19 MICROELECTRONICS CLEANING MARKET BY PROCESS TYPE, 2005 and 2011 (% OF GLOBAL ELECTRONICS AND CLEANING SALES)
Figure 20 MICROELECTRONICS CLEANING MARKET BY APPLICATION TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES)
Figure 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2005 AND 2011 (%)
Figure 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS AND ULTRAPURE WATER, 2005 (%)
Figure 23 WET CLEANING EQUIPMENT SALES BY TYPE, 2005 (%)
Figure 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE, 2005 (%)
Figure 25 TRENDS IN GLOBAL SEMICONDUCTOR SALES, 2005-2011 ($ BILLIONS)
Figure 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2005 AND 2011 (%)
Figure 27 TRENDS IN SEMICONDUCTOR INDUSTRY INVESTMENT IN 300 MM-CAPABLE PROCESS EQUIPMENT, 2001-2005 ($ BILLIONS/PERCENT)
Figure 28 SALES TRENDS IN SINGLE-WAFER CLEANING EQUIPMENT, 2005-2011 ($ BILLIONS/PERCENT)
Figure 29 SALES TRENDS FOR LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2005-2011 ($ MILLIONS)
Figure 30 GLOBAL SHARE OF SEMICONDUCTOR VS. NONSEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT, 2005 AND 2011 (%)
Figure 31 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2005 AND 2011 (%)
Figure 32 GLOBAL SHARE OF THE WET CLEAN CHEMISTRY MARKET, 2005 AND 2011 (%)
Figure 33 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2005 (%)
Figure 34 GLOBAL SHARE OF DRY CLEANING EQUIPMENT SALES BY TYPE, 2005 ($ BILLIONS)
Figure 35 GLOBAL SHARE OF DRY CLEANING GASES CONSUMPTION BY TYPE, 2005 (%)
Figure 36 GLOBAL FORECAST IN MARKETS FOR RESIST MATERIALS, 2005-2011 ($ BILLIONS)
Figure 37 GLOBAL FORECAST OF OZONE TECHNOLOGY MARKETS, 2005-2011 ($ MILLIONS)
Figure 38 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKET, 2005 AND 2011
Figure 39 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKETS BY TYPE, 2005 AND 2011 (%)
Figure 40 GLOBAL FORECAST OF SALES TRENDS FOR NGL VS. OTHER PHOTRESIST TYPES, 2005-2011 ($ BILLIONS)
Figure 41 GLOBAL SHARE OF CLEANING-RELATED SERVICES MARKET, 2005 ($ BILLIONS)
Figure 42 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES, 1997 AND 2002 ($ BILLIONS/% OF TOTAL SHIPMENT VALUE)
Figure 43 MICRODEVICE INSPECTION SYSTEM SALES, 2005 (%)
Figure 44 MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS ACCORDING TO ANNUAL SALES LEVELS, 2005 (%)
Figure 45 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2005 (CLEANING EQUIPMENT SALES AS A % OF TOTAL SALES)
Figure 46 NATIONALITIES OF MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS, 2005 (%)

Semiconductor/Microelectronics Cleaning

Table of Contents