Microsensors: MEMS, Biosensors and Nanosensors

Table of Contents

• Microsensors: MEMS, Biosensors and Nanosensors
• Chapter 1 - EXECUTIVE SUMMARY
  • SUMMARY TABLE: GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2013 ($ MILLIONS)
  • SUMMARY FIGURE: GLOBAL MICROSENSOR MARKET PROJECTIONS, 2007-2013 ($ MILLIONS)
• Chapter 2 - MICROSENSORS OVERVIEW
  • GENERAL DESCRIPTION
    • DEFINTIONS
  • Sensors
  • Microsensors
    • MEMS
  • Biochips
  • Nanosensors
• HISTORICAL PERSPECTIVE
• MICROSENSOR TECHNOLOGIES AND APPLICATIONS
  • TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS
  • TABLE 1 (CONTINUED)
    • ACCELEROMETERS
    • GYROSCOPES
    • PRESSURE MICROSENSORS
    • CHEMICAL AND GAS MICROSENSORS
    • THERMAL MICROSENSORS
    • BIOCHIPS
    • NANO-CHEMICAL SENSORS
    • NANO-BIOSENSORS
    • NANO-RADIATION SENSORS
    • NANO-THERMAL SENSORS
    • MICROSENSOR MARKETS
  • TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2007-2013 ($ MILLIONS)
  • TABLE 3 PROJECTED LARGEST SELLING TYPES OF MICROSENSORS, 2007 VS. 2013
  • TABLE 3 (CONTINUED)
  • TABLE 4 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2013 ($ MILLIONS)
  • FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END-USER SEGMENT, 2007-2013 (PERCENT OF TOTAL SALES)
• Chapter 3 - ENABLING TECHNOLOGIES FOR MICROSENSORS
• MATERIALS TECHNOLOGIES
  • FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2007 AND 2013 (PERCENT OF TOTAL MEMS SHIPMENTS)
  • FIGURE 3 (CONTINUED)
    • SILICON
    • POLYMERS
    • METALS
    • NANOMATERIALS
      • Carbon Nanotubes
      • Nanoribbons
      • Nanowires
      • Nanoceramics
  • MANUFACTURING TECHNOLOGIES
  • MICROMACHINING
    • Surface Micromachining
  • FIGURE 4 SACRIFICIAL LAYER ETCHING
    • Bulk Micromachining
    • LIGA
  • FIGURE 5 LIGA PROCESS DIAGRAM
    • Wafer Bonding
      • Anodic Bonding
      • Intermediate-Layer Assisted Bonding
      • Direct Bonding
      • Flip-Chip Bonding
  • ETCHING
    • Wet Anisotropic Etching
  • FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING
    • Dry Etching
      • Reactive Ion Etching
      • Deep Reactive Ion Etching
    • LASER MICROFABRICATION
      • Laser Micromachining
      • Laser-Assisted Chemical Etching
      • Laser Assisted Deposition
      • Stereolithography
      • Laser Surface Modification
      • Laser-Assisted Manipulation and Assembly
        • Laser Microbending
        • Physical Manipulation of Parts
        • Laser Joining
  • NANOPATTERNING
    • Nanoimprint Lithography
      • Hot Embossing Lithography
      • Ultraviolet Nanoimprint Lithography
      • Microcontact Printing
    • Dip Pen Nanolithography
      • Dip Pen Nanolithography (Continued)
    • Laser-Based Particle Deposition
• Chapter 4 - ACCELEROMETERS
  • TECHNOLOGIES
    • OPERATING MECHANISM
  • TABLE 5 MAJOR MEMS ACCELEROMETER TECHNOLOGIES
  • TABLE 5 (CONTINUED)
    • Capacitive
    • Electromagnetic
    • Piezoelectric
    • Piezoresistive
    • Optical
    • Tunneling
    • Thermal
  • AXES OF MEASUREMENT
  • LOW-G ACCELEROMETERS
• APPLICATIONS
  • TABLE 6 COMMERCIAL ACCELEROMETER APPLICATIONS
    • AUTOMOTIVE APPLICATIONS
      • Airbag Actuation
      • Stability Systems
      • Vehicle Navigation
  • LIFE SCIENCES
    • Rate-Responsive Heart Pacemakers
    • Actigraphs
  • ENERGY
    • Oil and Gas Exploration
  • MILITARY/AEROSPACE
  • INFORMATION TECHNOLOGY
    • Hard Disk Drop Protection
  • CONSUMER PRODUCTS
    • "Smart" Sporting Goods
    • Mobile Phone Operator Interface
    • Game Controller User Interface
    • Digital Camera Image Stabilization Systems
  • MISCELLANEOUS APPLICATIONS
• ACCELEROMETER MARKET
  • SUMMARY
  • TABLE 7 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 7 GLOBAL MEMS ACCLEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (PERCENT OF TOTAL SHIPMENTS)
• AUTOMOTIVE APPLICATIONS
  • TABLE 8 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Airbag Sensors
  • TABLE 9 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2013 (MILLION UNITS)
  • FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, 2007-2013 (MILLION UNITS)
  • TABLE 10 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Vehicle Stability Control Systems
  • TABLE 11 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION VEHICLES)
  • FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, 2007-2013 (MILLION VEHICLES)
  • TABLE 12 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Navigation Systems
  • TABLE 13 PROJECTED GLOBAL SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2013 (MILLION VEHICLES)
  • FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS, 2007-2013 (MILLION SYSTEMS SHIPPED)
  • TABLE 14 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES APPLICATIONS
  • TABLE 15 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2013 ($ MILLIONS)
    • Rate-Responsive Heart Pacemakers
  • TABLE 16 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2013 (THOUSANDS OF PACEMAKERS)
  • FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, 2007-2013 (THOUSAND UNITS)
  • TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • Activity Monitoring Systems
  • TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
  • ENERGY
    • Seismic Detection Systems
  • TABLE 19 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• MILITARY/AEROSPACE
  • TABLE 20 PROJECTED GLOBAL SALES OF GPS SYSTEMS FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2007-2013 ($ MILLIONS)
  • TABLE 21 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • INFORMATION TECHNOLOGY
      • Hard Disk Drive Drop Protection
  • TABLE 22 GLOBAL MARKET PROJECTIONS FOR HARD DRIVE-EQUIPPED PORTABLE ELECTRONIC DEVICES, THROUGH 2013 (MILLION UNITS)
  • FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED PORTABLE ELECTRONIC DEVICES, 2007-2013 (MILLION DEVICES)
  • TABLE 23 GLOBAL MARKET PROJECTIONS FOR DRIVE DISK PROTECTION APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
  • TABLE 24 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2013 ($ MILLIONS)
    • Mobile Phone User Interface
  • TABLE 25 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2013 (MILLIONS OF HANDSETS)
  • FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, 2007-2013 (MILLIONS OF HANDSETS)
  • TABLE 26 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Electronic Gaming User Interface
  • TABLE 27 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Digital Camera Image Stabilization Systems
  • TABLE 28 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2013 (MILLION CAMERAS)
  • FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2007-2013 (MILLION UNITS)
  • TABLE 29 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • "Smart" Sporting Goods
  • TABLE 30 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN "SMART" SPORTING GOODS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• OTHER APPLICATIONS
  • TABLE 31 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Chapter 5 - GYROSCOPES
  • TECHNOLOGIES
  • TABLE 32 MAJOR MEMS GYROSCOPE TECHNOLOGIES
    • TUNING FORK GYROSCOPE
    • WINE GLASS RESONATOR GYROSCOPES
    • RING RESONATOR GYROSCOPES
    • VIBRATING WHEEL
    • SPINNING WHEEL GYROSCOPE
    • MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROS
      • Interferometric MOEMS Gyroscope
    • APPLICATIONS
  • TABLE 33 GYROSCOPIC MEMS APPLICATIONS
    • AUTOMOTIVE
      • Vehicle Stabilization Systems
      • Rollover Detection
      • Vehicle Navigation Systems
  • LIFE SCIENCES
    • "Smart" Wheelchairs
  • CONSUMER PRODUCTS
    • Digital Camera Image Stabilization Systems
    • Personal Transportation Devices
    • Robotic Toys
    • Household Robots
  • MILITARY/AEROSPACE
  • OTHER APPLICATIONS
    • Mobile Industrial/Service Robots
  • GYROSCOPE MARKET
    • SUMMARY
  • TABLE 34 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES, THROUGH 2013 ($ MILLIONS)
  • FIGURE 16 GLOBAL MEMS ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
  • TABLE 35 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN AUTOMOTIVE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Stability Control
  • TABLE 36 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Rollover Detection
  • FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2007-2013 (MILLION UNITS)
  • TABLE 37 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSOCPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Navigation Systems
  • TABLE 38 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES
      • "Smart" Wheelchairs
        • "Smart" Wheelchairs (Continued)
  • TABLE 39 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN "SMART" WHEEHLCHAIRS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
  • TABLE 40 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN CONSUMER PRODUCTS, THROUGH 2013 ($ MILLIONS)
    • Digital Camera Image Stabilization Systems
  • TABLE 41 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • Personal Transportation Devices
  • FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, 2007-2013 (UNITS)
  • TABLE 42 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• MILITARY/AEROSPACE
  • TABLE 43 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • OTHER APPPLICATIONS
      • Mobile Industrial/ Service Robots
  • FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2007-2013 UNITS)
  • TABLE 44 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2013 (UNITS/$ MILLIONS)
• Chapter 6 - PRESSURE SENSORS
  • TECHNOLOGY
  • APPLICATIONS
  • TABLE 45 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2007
    • AUTOMOTIVE APPLICATIONS
      • Manifold Absolute Pressure (Map) Sensors
      • Tire Pressure Sensors
    • LIFE SCIENCES APPLICATIONS
      • Blood Pressure Monitors
      • CONSUMER PRODUCTS
        • Appliance Pressure Sensors
      • OTHER APPLICATIONS
      • PRESSURE SENSOR MARKET
        • SUMMARY
  • TABLE 46 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2013 ($ MILLIONS)
  • FIGURE 20 PROJECTED GLOBAL MEMS PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2007-2013 (PERCENT OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
  • TABLE 47 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Manifold Absolute Pressure Sensors
  • TABLE 48 GLOBAL MARKET PROJECTIONS FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Tire Pressure Sensors
  • TABLE 49 GLOBAL MARKET PROJECTIONS FOR MEMS TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • LIFE SCIENCES
      • Blood Pressure Monitors
  • TABLE 50 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD PRESSURE SENSORS, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
    • CONSUMER PRODUCTS
    • Appliance Pressure Sensors
  • TABLE 51 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSORS IN HOME APPIANCES, THROUGH 2013 (MILLION UNITS/$ MILLIONS)
• Chapter 7 - CHEMICAL AND GAS SENSORS
  • TECHNOLOGIES
    • ELECTROCHEMICAL SENSORS
    • MASS SENSORS
    • APPLICATIONS
  • TABLE 52 DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS, 2007
    • AUTOMOTIVE
      • Exhaust and Cabin Air Quality Sensors
    • LIFE SCIENCES
      • Blood Gas Monitors
  • ENVIRONMENTAL PROTECTION
    • Portable/Personal Air Quality Detectors
  • MILITARY/PUBLIC SAFETY
    • Chemical Agent Detectors
  • OTHER APPLICATIONS
    • Industrial Leak Detection and Process Control
  • MARKETS
  • TABLE 53 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 21 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 ((PERCENT OF TOTAL SHIPMENTS)
  • AUTOMOTIVE
  • TABLE 54 GLOBAL MARKET PROJECTIONS FOR MEMS GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Exhaust Gas and Cabin Air Quality Sensors
  • TABLE 55 PROJECTED NUMBER OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2013 (MILLION UNITS)
  • FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2007-2013 (MILLION VEHICLES)
    • LIFE SCIENCES
      • Blood Gas Monitors
  • TABLE 56 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2013 (UNITS)
  • FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, 2007-2013 (UNITS)
  • TABLE 57 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD GAS SENSORS, THROUGH 2013 (UNITS/$ MILLIONS)
    • ENVIRONMENTAL PROTECTION
      • Air Quality Monitoring
  • TABLE 58 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2013 ($ BILLIONS)
  • FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, 2007-2013 ($ BILLIONS)
  • TABLE 59 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2013 (UNITS/$ MILLIONS)
    • MILITARY/PUBLIC SAFETY
      • Chemical Agent Detectors
  • TABLE 60 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
    • PROCESS INDUSTRIES
      • Industrial Process Control and Leak Detection
  • TABLE 61 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MEMS INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2013 ($ MILLIONS)
• Chapter 8 - THERMAL SENSORS
  • TECHNOLOGIES
    • MICROBOLOMETERS
    • MICROCANTILEVER IR DETECTORS
  • APPLICATIONS
    • AUTOMOTIVE
    • MILITARY/PUBLIC SAFETY
    • OTHER
  • MARKETS
  • TABLE 62 GLOBAL MARKET PROJECTIONS FOR OPTICAL MEMS IN INFRARED SENSORS BY APPLICATION SEGMENT, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
  • FIGURE 25 GLOBAL MEMS IR SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • AUTOMOTIVE
      • Night Vision Systems
  • TABLE 63 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MEMS SENSORS, THROUGH 2013 (THOUSAND UNITS/$ MILLIONS)
• Chapter 9 - BIOCHIPS
  • TECHNOLOGIES
    • SAMPLE MANIPULATION TECHNOLOGIES
      • Microchannels
      • Micropumps
        • Mechanical Micropumps
          • Piezoelectric Pumps
          • Pneumatic Pumps
          • Thermopneumatic Pumps
          • Electrostatic Pumps
        • Non-Mechanical Pumps
          • Capillary Pumps
          • Electrohydrodynamic Pumps
          • Electrokinetic Pumps
          • Magneto-Hydrodynamic Pumps
            • Phase Difference Pumps
        • Micronozzles
        • Microvalves
          • Passive Microvalves
          • Active Microvalves
        • Micromixers
          • Active Mixers
            • SAW Mixers
            • Magneto-HydrodynamicMixers
        • Passive Mixer
        • Microreactors
    • SENSING MEDIATOR
      • Enzyme Biochips
      • Affinity Biochips
    • TRANSDUCER
    • APPLICATIONS
  • TABLE 64 BIOCHIP APPLICATIONS
    • LIFE SCIENCES
    • MILITARY/PUBLIC SAFETY
      • Chemical and Biological Agent Detectors
    • PROCESS INDUSTRIES
      • Food Quality Testing
    • MARKETS
  • TABLE 65 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
  • FIGURE 26 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2007-2013 (% OF TOTAL SHIPMENTS)
    • LIFE SCIENCES
  • TABLE 66 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2013 ($ MILLIONS)
    • Life Sciences Research
  • TABLE 67 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2013 ($ MILLIONS)
    • Diagnostic Biochips
  • TABLE 68 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LOC DIAGNOSTIC DEVICES, THROUGH 2013 ($ MILLIONS)
    • MILITARY/PUBLIC SAFETY
  • TABLE 69 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CBW SENSORS, THROUGH 2013 ($ MILLIONS)
    • PROCESS INDUSTRIES
      • Food Testing
  • TABLE 70 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• Chapter 10 - NANO-CHEMICAL SENSORS
  • TECHNOLOGIES
  • TABLE 71 NANO-CHEMICAL SENSOR TECHNOLOGIES
    • NANOTUBES
      • Carbon Nanotubes
      • Other Types of Nanotubes
    • NANORIBBONS
    • NANOWIRES
    • NANO-CANTILEVERS
    • NANO-PARTICLES
    • NANOCERAMICS
      • APPLICATIONS
  • TABLE 72 NANO-CHEMICAL SENSOR APPLICATIONS
  • TABLE 72 (CONTINUED)
    • LIFE SCIENCES
      • Respiratory Monitoring
    • PROCESS INDUSTRIES
      • Leak Detection
    • MARKET
  • TABLE 73 GLOBAL SALES PROJECTIONS OF NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2013 ($ MILLIONS)
    • LIFE SCIENCES
      • Respiratory Monitors
  • TABLE 74 GLOBAL SALES PROJECTIONS FOR SPIROMETERS AND CAPNOMETERS, THROUGH 2013 ($ MILLIONS)
  • TABLE 75 GLOBAL MARKET FOR NANO-CHEMICAL SENSORS IN RESPIRATORY MONITORING APPLICATIONS, THROUGH 2013 ($ MILLIONS)
• PROCESS INDUSTRIES
  • TABLE 76 GLOBAL MARKET PROJECTIONS FOR NANO-CHEMICAL SENSORS IN PROCESS INDUSTRIES, THROUGH 2013 ($ MILLIONS)
• Chapter 11 - NANO-BIOSENSORS
  • TECHNOLOGIES
  • TABLE 77 NANO-BIOSENSOR TECHNOLOGIES
    • SILICON NANOWIRES
    • NANO-CANTILEVERS
    • FIBER OPTIC
    • NANOTUBES
    • NANOSTRUCTURED MEMBRANE
    • PHOSPHOLIPIDS
    • APPLICATIONS
  • TABLE 78 NANO-BIOSENSOR APPLICATIONS
    • LIFE SCIENCES
      • Molecular Diagnostics
      • Blood Analysis
    • MARKETS
      • LIFE SCIENCES
  • TABLE 79 PROJECTED GLOBAL SALES OF NANO-BIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2013 ($ MILLIONS)
    • Molecular Diagnostics
  • FIGURE 27 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2007 (%)
  • FIGURE 28 GLOBAL MARKET PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTICS, 2007-2013 ($ BILLIONS)
  • TABLE 80 GLOBAL MARKET PROJECTIONS FOR NANO-BIOSENSOR POINT- OF-CARE MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2013 ($ MILLIONS)
    • Glucose Monitoring
  • FIGURE 29 GLOBAL MARKET PROJECTIONS FOR GLUCOSE TEST STRIPS, 2007-2013 ($ BILLIONS)
  • FIGURE 29 (CONTINUED)
  • TABLE 81 GLOBAL MARKET PROJECTIONS FOR CARBON NANOTUBE GLUCOSE TEST STRIPS, THROUGH 2013 ($ MILLIONS)
• Chapter 12 - NANO-RADIATION SENSORS
  • TECHNOLOGIES
    • NANOCANTILEVER TECHNOLOGY
  • APPLICATIONS
  • TABLE 82 NANO-RADIATION SENSOR APPLICATIONS
    • MARKET
• Chapter 13 - NANO-THERMAL SENSORS
  • TECHNOLOGIES
    • NANOPOWDER-BASED SENSORS
  • MARKETS
  • APPLICATIONS
  • TABLE 83 NANO-THERMAL SENSOR APPLICATIONS
• Chapter 14 - INDUSTRY CHARACTERISTICS
  • NUMBER/SIZE OF FIRMS
  • FIGURE 30 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2007 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)
  • FIGURE 30 (CONTINUED)
    • MARKET SHARES
  • FIGURE 31 OVERALL GLOBAL MEMS MARKET SHARES BY COMPANY, 2007 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)
  • FIGURE 31 (CONTINUED)
• Chapter 15 - APPENDIX I: COMPANY PROFILES
  • AFFYMETRIX, INC.
  • ANALOG DEVICES, INC.
  • ARCHANGEL SYSTEMS, INC.
  • ROBERT BOSCH GMBH
  • BOSTON MICROSYSTEMS, INC.
  • CALIPER LIFE SCIENCES
  • CEPHEID THERAPEUTICS
  • CIPHERGEN, INC.
  • COLYBRYS SA
  • COMBIMATRIX CORP.
  • CONTINENTAL TEVES AG & CO. OHG
  • CUSTOM SENSORS AND TECHNOLOGIES
  • DELPHI CORP.
  • ENDEVCO CORP.
  • ENZO LIFE SCIENCES
  • EUROGENTEC
  • FEBIT AG
  • FLIR SYSTEMS, INC.
  • FREESCALE SEMICONDUCTOR, INC.
  • GE SENSING
  • GENETIX, LTD.
  • GMA INDUSTRIES, INC.
  • ICX PHOTONICS
  • INTEGRATED NANO-TECHNOLOGIES, LLC
  • I-STAT CORP.
  • KIONIX, INC.
  • KNOWLES ELECTRONICS
  • LOCKHEED MARTIN CORP.
  • MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
  • M-BIOTECH, INC.
  • MEASUREMENT SPECIALTIES, INC.
  • MEMSIC, INC.
  • MICROCHEMICAL SYSTEMS SA
  • MOLECULAR NANOSYSTEMS, INC.
  • MURATA MANUFACTURING CO., LTD.
  • NANOGEN, INC.
  • NANOMIX, INC.
  • NIMBLEGEN SYSTEMS, INC.
  • NIPPON DENSO CORP.
  • OMRON CORP.
  • SENSONOR AS
  • SILICON DESIGNS, INC.
  • SILICON SENSING SYSTEMS
  • SONY CORP.
  • SPHERE MEDICAL, LTD.
  • STMICROELECTRONICS
  • SYNKERA TECHNOLOGIES, INC.
  • TOSHIBA CORP.
  • ULIS
  • VTI TECHNOLOGIES OY
  • XEOTRON CORP.
• Chapter 16 - APPENDIX II: PATENT ANALYSIS
  • PATENTS BY TYPE OF MEMS
  • FIGURE 32 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT ISSUED SINCE JANUARY 1, 2005)
  • FIGURE 32 (CONTINUED)
    • MEMS PATENT ASSIGNEES
      • LARGEST PATENT HOLDERS
  • TABLE 84 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 3/7/2008)
    • PATENT HOLDERS BY NATIONALITY
  • FIGURE 33 U.S. MICROSENSOR PATENTS BY NATIONALITY OF MICROSENSOR ASSIGNEE (PERCENT OF PATENTS ISSUED BETWEEN 1/1/2005 AND 3/7/2008)