Chemicals and Materials for Sub-100 nm IC Manufacturing

Table of Contents

Chapter 1 Introduction

Chapter 2 Executive Summary

• 2.1 Key Industry Trends
• 2.2 Market Outlook
• 2.3 Supplier Opportunities

Chapter 3 IC Industry Trends

• 3.1 IC Industry Growth Forecast
• 3.2 Trends in IC Processing Technology

Chapter 4 Liquid Chemicals

• 4.1 Technology Issues
  • 4.1.1 Acids and Solvents
  • 4.1.2 Resists
• 4.2 Purity Requirements
  • 4.2.1 Purification Methods
    • Trends For Purity - Trace Elements
  • 4.2.2 Particulates
    • Effects on Yield
    • Particulate Removal Techniques
    • Particle Monitoring
• 4.3 Chemical Management
  • 4.3.1 Introduction
  • 4.3.2 Chemical Usage Reduction

Chapter 5 Gases

• 5.1 Technology Issues
• 5.2 Requirements
  • 5.2.1 Purification Alternatives
    • Historical Perspective
    • Trends For Purity - Consistency
  • 5.2.2 Particulate Considerations
    • Particle Monitoring
    • Filtration Methods
  • 5.2.3 Summary

Chapter 6 Sputtering and Evaporation Materials

• 6.1 Technology Issues
• 6.2 Purity Requirements

Chapter 7 Market Forecast

• 7.1 Market Driving Forces & Assumptions
• 7.2 Chemicals and Materials Forecast
  • 7.2.1 Forecast By Chemical and Material
  • 7.2.2 Chemical Use Per Unit Area Of Silicon Processed
• 7.2.3 Market Shares

Chapter 8 Strategic Customer Issues

• 8.1 Benchmarking a Vendor
  • 8.1.1 Statistical Quality Control
    • Assay and Related Items
    • Trace Elements
    • Particles
  • 8.1.2 Analytical Capabilities
  • 8.1.3 Product Manufacturing And/Or Sourcing
  • 8.1.4 General Considerations
    • Installation and Retrofitting Costs
• 8.2 In-House Quality Control And Assurance
  • 8.2.1 Analytical Tools
  • 8.2.2 How Much Testing
  • 8.2.3 Exhaust Gas Analysis

LIST OF FIGURES

• 4.1 Relationship Between Device Yield and Particles
• 4.2 Relationship Between Die Yield and Chip Size
• 4.3 Chemical Management Services Tasks
• 6.1 ITRS Roadmap 2003
• 6.2 Gate-Last Approach
• 6.3 Gate-First Approach
• 7.1 Chemical/Semiconductor Revenue Ratio
• 7.2 Worldwide Resist Market - 2007
• 7.3 Worldwide Resist Market by Geographic Region
• 7.4 Resist/Semiconductor Revenue Ratio
• 7.5 2004 Silicon Wafer Market
• 7.6 2010 Silicon Wafer Market
• 7.7 Cost of Chemicals Per Square Inch of Silicon
• 7.8 2007 Worldwide Market Shares for Gas Suppliers
• 7.9 2007 Worldwide Market Shares for Liquid Chemical Suppliers
• 7.10 2007 Worldwide Market Shares for Photoresist Suppliers
• 7.11 2007 Worldwide Market Shares for Sputtering Target Suppliers
• 7.12 2007 Worldwide Market Shares for Silicon Wafer Companies

LIST OF TABLES

• 4.1 Common Wafer Processing Chemicals
• 4.2 Photoresist Stripping Solutions
• 5.1 Gas Control System Issues
• 5.2 Potential Hazards of Processing Gases
• 7.1 Worldwide Forecast of Chemicals and Materials for IC Manufacture
• 7.2 Worldwide Market Forecast of Si Wafers
• 7.3 Worldwide Market Forecast of Sputtering Targets
• 7.4 Pricing Trend And Forecast For Silicon Wafers