Thin Film Deposition: Trends, Key Issues, Market Analysis

Table of Contents

Chapter 1 Introduction

Chapter 2 Executive Summary

Chapter 3 Physical Vapor Deposition

• 3.1 Introduction
• 3.2 Sputtering Technology
• 3.3 Plasma Technology
• 3.4 Reactor Designs
  • 3.4.1 Long-Throw Deposition
  • 3.4.2 Collimated Sputter Deposition
  • 3.4.3 Showerhead Deposition
  • 3.4.4 Ionized PVD
• 3.5 Semiconductor Processing
  • 3.5.1 Feature Patterning
  • 3.5.2 Gap Fill
• 3.6 Targets

Chapter 4 Chemical Vapor Deposition

• 4.1 Introduction
• 4.2 Chemical Vapor Deposition (CVD) Techniques
  • 4.2.1 APCVD
  • 4.2.2 LPCVD
  • 4.2.3 PECVD
  • 4.2.4 HDPCVD
  • 4.2.5 ALD

Chapter 5 Electrochemical Deposition

• 5.1 Introduction
• 5.2 Reactor Design
• 5.3 Challenges
• 5.4 Additives
• 5.5 Processing
  • 5.5.1 Superfilling
  • 5.5.2 Aspect Ratios
• 5.6 Copper Cathodes
• 5.7 Wet Copper Seed-Layer

Chapter 6 Film Deposition And Film Properties

• 6.1 Introduction
• 6.2 Dielectric Deposition
  • 6.2.1 Silicon Dioxide
    • 6.2.1.1 Thermal CVD
    • 6.2.1.2 PECVD
    • 6.2.1.3 HDPCVD
  • 6.2.2 Silicon Nitride
    • 6.2.2.1 Thermal CVD
    • 6.2.2.2 PECVD
    • 6.2.2.3 HDPCVD
  • 6.2.3 High-K Dielectrics
  • 6.2.4 Low-K Dielectrics
• 6.3 Metal Deposition
  • 6.3.1 Aluminum
  • 6.3.2 Tungsten/Tungsten Silicide
  • 6.3.3 Titanium Nitride

Chapter 7 Vendor Issues

• 7.1 Introduction
• 7.2 300mm Processing
• 7.3 Integrated Processing
• 7.4 Copper
• 7.5 Metrology
• 7.6 ESD
• 7.7 Parametric Test

Chapter 8 Market Forecast

• 8.1 Introduction
• 8.2 Key Issues
• 8.3 Market Forecast Assumptions
• 8.4 Market Forecast
  • 8.4.1 Chemical Vapor Deposition
  • 8.4.2 Physical Vapor Deposition
  • 8.4.3 Copper Electroplating Market
  • 8.4.4 Atomic Layer Deposition Market

FIGURES

• 3.1 Schematic Of Sputtering System
• 3.2 Magnetron Sputtering Design
• 3.3 Showerhead Reactor Design
• 3.4 Ionized PVD
• 4.1 APCVD Reactor
• 4.2 Tube CVD Reactor
• 4.3 HDPCVD Reactor
• 4.4 ALD Versus PVD Copper Barrier
• 5.1 Copper Electroplating System
• 8.1 Worldwide MCVD Market Shares
• 8.2 Worldwide DCVD Market Shares
• 8.3 Worldwide DCVD Market By Sectors
• 8.4 Worldwide HDHCVD Market Shares
• 8.5 Worldwide PECVD Market Shares
• 8.6 Worldwide SACVD Market Shares
• 8.7 Worldwide LPCVD Market Shares
• 8.8 Worldwide PVD Market Shares
• 8.9 Worldwide ECD Market Shares
• 8.10 ALD Applications a Share of Market
• 8.11 Worldwide ALD Market Shares

TABLES

• 8.1 Worldwide CVD Market Forecast
• 8.2 Worldwide MCVD Market Shares
• 8.3 Worldwide DCVD Market Shares
• 8.4 Worldwide HDPCVD Market Shares
• 8.5 Worldwide PECVD Market Shares
• 8.6 Worldwide SACVD Market Shares
• 8.7 Worldwide LPCVD Market Shares
• 8.8 Worldwide PVD Market Forecast
• 8.9 Worldwide PVD Market Shares
• 8.10 Worldwide ECD Market Forecast
• 8.11 Worldwide ALD Market Forecast