Global MEMS/Microsystems - Markets and Opportunities

Table of Contents

EXECUTIVE SUMMARY

• Market
• Applications
• Materials and Manufacturing Technology

1 INTRODUCTION

• 1.1 Methodology
• 1.2 Definition of Terms

2 MEMS MARKET OVERVIEW

• 2.1 MEMS Device Market and Forecast
• 2.2 MEMS Equipment Market and Forecast
• 2.3 MEMS Material Market and Forecast

3 MEMS APPLICATIONS-TRENDS AND OPPORTUNITIES

• 3.1 Inkjet Heads
  • 3.1.1 Overview
  • 3.1.2 Market Outlook
  • 3.1.3 Key Players
  • 3.1.4 Application and Technology Trends
  • 3.1.5 Manufacturing Trends
• 3.2 Pressure Sensors
  • 3.2.1 Overview
  • 3.2.2 Market Outlook
  • 3.2.3 Key Players
  • 3.2.4 Application and Technology Trends
  • 3.2.5 Manufacturing Trends
• 3.3 Silicon Microphones
  • 3.3.1 Overview
  • 3.3.2 Market Outlook
  • 3.3.3 Key Players
  • 3.3.4 Application and Technology Trends
  • 3.3.5 Manufacturing Trends
• 3.4 Accelerometers
  • 3.4.1 Overview
  • 3.4.2 Market Outlook
  • 3.4.3 Key Players
  • 3.4.4 Application and Technology Trends
  • 3.4.5 Manufacturing Trends
• 3.5 Gyroscopes
  • 3.5.1 Overview
  • 3.5.2 Market Outlook
  • 3.5.3 Key Players
  • 3.5.4 Application and Technology Trends
  • 3.5.5 Manufacturing Trends
• 3.6 Digital Micromirror Display and Other MOEMS
  • 3.6.1 Overview
  • 3.6.2 Market Outlook
  • 3.6.3 Key Players
  • 3.6.5 Manufacturing Trends
• 3.7 Microfluidics
  • 3.7.1 Overview
  • 3.7.2 Market Outlook
  • 3.7.3 Key Players
  • 3.7.4 Application and Technology Trends
  • 3.7.5 Manufacturing Trends
• 3.8 RF MEMS
  • 3.8.1 Overview
  • 3.8.2 Market Outlook
  • 3.8.3 Key Players
  • 3.8.4 Application and Technology Trends
  • 3.8.5 Manufacturing Trends
• 3.9 Emerging MEMS
  • 3.9.1 Overview
  • 3.9.2 Energy Harvesting Devices
  • 3.9.3 Multi-Frequency Oscillator
  • 3.9.4 Silicon-Based Micro Motor
  • 3.9.5 Auto Focus and Micro Zoom

4 MATERIALS AND PROCESS TECHNOLOGIES-TRENDS AND OPPORTUNITIES

• 4.1 CMOS-MEMS Integration
• 4.2 Substrates
• 4.3 Lithography, Photoresists and Ancillaries
• 4.4 Wafer Bonding
• 4.5 Deposition and Etch
• 4.6 Anti-Stiction
• 4.7 Chemical Mechanical Planarization (CMP)
• 4.8 Packaging

5 APPENDICES

• 5.1 MEMS Equipment Suppliers by Segment
• 5.2 MEMS Materials Suppliers by Segmen
• 5.3 Companies Interviewed
• 5.4 List of Acronyms and Abbreviations
• 5.5 List of Figures and Tables

List of Figures and Tables

List of Figures

• Figure 2.1 The MEMS Supply Chain
• Figure 2.2 Top 30 MEMS Sales/Worldwide MEMS Sales 2003-2006
• Figure 3.1 Global Inkjet Head Market Forecast
• Figure 3.2 2006 Global Inkjet Head Market Share
• Figure 3.3 Global Pressure Sensor Market Forecast
• Figure 3.4 2006 Global Pressure Sensors Market Share
• Figure 3.5 Global MEMS Silicon Microphone Market Forecast
• Figure 3.6 Global Accelerometer Market Forecast
• Figure 3.7 Global Gyroscope Market Forecast
• Figure 3.8 Automotive Electronic Stability Functions and Components
• Figure 3.9 Global MOEMS Market Forecast
• Figure 3.10 Products Which Require A Compact Light Engine
• Figure 3.11 Light Engine Market Value
• Figure 3.12 Global Microfluidics Market Forecast
• Figure 3.13 Global RF MEMS Market Forecast
• Figure 3.14 Perpetuum Energy Harvester
• Figure 3.15 Typical Micro Fuel Cell Design
• Figure 3.16 SEM of MEMS First™WaferSiTime Products
• Figure 3.17 Liquid Lens in Operation
• Figure 4.1 Five Levels of Monolithic Integration
• Figure 4.2 MEMS in the Middle
• Figure 4.3 Beside IC or Pre-CMOS Process
• Figure 4.4 Above-IC Approach
• Figure 4.5 Integrated MEMS Market Forecast
• Figure 4.6 MEMS Substrate Market by Type
• Figure 4.7 Thick SOI Wafers for MEMS Devices
• Figure 4.8 Silicon Substrate Market by Diameter
• Figure 4.9 Photoresist and Ancillary Market Forecast
• Figure 4.10 Gases and Chemicals Market Forecast
• Figure 4.11 How Stiction Occurs
• Figure 4.12 Examples of Stiction on MEMS Devices
• Figure 4.13 Use of Supercritical CO2 and Self-Assembling Monolayer in the Device Process Flow
• Figure 4.14 SAM Materials for Anti-Stiction
• Figure 4.15 Packaging Coating Market Forecast
• Figure 4.16 SU-8 Applications

List of Tables

• Table 2.1 Top 30 MEMS Device Manufacturers
• Table 2.2 Top 12 MEMS Foundries
• Table 2.3 MEMS Device Markets and Forecasts by Application
• Table 2.4 MEMS Equipment Markets and Forecasts
• Table 2.5 MEMS Material Markets and Forecasts
• Table 3.1 Comparison of Nozzle Manufacturing Technologies
• Table 3.2 Accelerometer Forecast by Application
• Table 3.3 Gyroscope Forecast by Application
• Table 3.4 MOEMS Device Function and Applications
• Table 3.5 Microfluidics Food Chain
• Table 3.6 Current Microfluidics Markets
• Table 3.7 Microfluidic Application Drivers
• Table 3.8 Microfluidic Manufacturing Technologies
• Table 3.9 Emerging MEMS Products by Company
• Table 3.10 Global Emerging MEMS Market Forecast
• Table 3.11 Comparison of Competing AF/MZ Technologies
• Table 4.1 MEMS Substrate Market Forecast
• Table 4.2 Substrates by MEMS Device Type
• Table 4.3 Silicon Wafer Consumption by Diameter (in Thousands of Units)
• Table 4.4 Etching and Release of Sacrificial Layers in MEMS Devices
• Table 4.5 MEMS CMP Versus IC CMP
• Table 4.6 MEMS Packaging Requirements and Trends